US5028778A
Expired / Lapsed
US
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Surface analysis method and a device therefor
Assignee: Hitachi Ltd
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Filing: 1989-10-20
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Granted: 1991-07-02
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Expires: 2009-10-20
Abstract
Abstract Surface analysis method capable of obtaining depth profiles of elements and chemical bonds in a nondestructive manner and with high accuracy, which comprises irradiating light to a sample surface to be analyzed with changing its energy, detecting electrons emitted from the surface of the above sample and corresponding to a certain binding energy, and subjecting the resultant detected signal to integration transform; and constitution of a device for carrying out the method.
Inventors
- 👤 Ken Ninomiya
- 👤 Shigeru Nishimatsu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 23:18
CPC Classifications
G; G01; G01N; G01N23/00; G01N23/22; G01N23/227; G01N23/2273
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
47 words
A surface analysis method which comprises irradiating light to a surface of a sample with changing its energy, detecting a signal of only electrons emitted from the surface of the sample and corresponding to a certain binding energy, and subjecting the resultant detected signal to integration transform.
Claim 2
Dependent Claim
47 words
A surface analysis method which comprises irradiating light to a surface of a sample with changing its energy, detecting a signal of only electrons emitted from the surface of the sample and corresponding to a certain binding energy, and subjecting the resultant detected signal to integration transform.
Claim 3
Dependent Claim
15 words
A surface analysis method according to claim 1 wherein the integration transform is Laplace transform.
Claim 4
Dependent Claim
53 words
A surface analysis method according to claim 1 wherein the integration transform is integration transform in which a change of photoionization cross section of an element accompanying a change of energy of incident light to the sample, a change of intensity of the incident light or these two changes are taken into account.
Claim 5
Dependent Claim
20 words
A surface analysis method according to claim 1 wherein the light is in the soft X-ray to vacuum ultraviolet regions.
Claim 6
Dependent Claim
22 words
A surface analysis method according to claim 1 wherein the light is focused on a certain region on the the sample surface.
Claim 7
Dependent Claim
25 words
A surface analysis method according to claim 5 wherein the light is focused by using a mirror optics, a transmission·diffraction optics or both of these.
Claim 8
Dependent Claim
24 words
A surface analysis method according to claim 5 wherein the sample is displaced with controlling its position relative to the axis of the light.
Claim 9
Dependent Claim
17 words
A surface analysis method according to claim 5 wherein the light is scanned on the sample surface.
Claim 10
Dependent Claim
55 words
A surface analysis method according to claim 1, wherein the detecting of a signal of only electrons emitted from the surface of the sample and corresponding to a certain binding energy is effected in synchronization with the change of energy of the irradiating light, the integration transform enabling a depth composition profile of the sample.
Claim 11
Dependent Claim
54 words
A surface analysis method which comprises irradiating light to a surface of a sample with changing its energy, detecting a signal of only electrons which are emitted from the surface of the sample and have a constant energy difference from the energy of the light, and subjecting the resultant detected signal to integration transform.
Claim 12
Dependent Claim
54 words
A surface analysis method which comprises irradiating light to a surface of a sample with changing its energy, detecting a signal of only electrons which are emitted from the surface of the sample and have a constant energy difference from the energy of the light, and subjecting the resultant detected signal to integration transform.
Claim 13
Dependent Claim
61 words
A surface analysis method according to claim 10, wherein the detecting of a signal of only electrons which are emitted from the surface of the sample and have a constant energy difference from the energy of the light is effected in synchronization with the change of energy of the light, the integration transform enabling a depth composition profile of the sample.
Claim 14
Dependent Claim
58 words
A surface analysis device for observation of electrons emitted from a sample surface by light irradiation to the sample surface, which comprises means of changing the energy of the light, energy analysis means of the emitted electrons in synchronization with an energy change of the light, detection means of energy-analyzed electrons, and integration-transform means of an electron-detected signal.
Claim 15
Dependent Claim
58 words
A surface analysis device for observation of electrons emitted from a sample surface by light irradiation to the sample surface, which comprises means of changing the energy of the light, energy analysis means of the emitted electrons in synchronization with an energy change of the light, detection means of energy-analyzed electrons, and integration-transform means of an electron-detected signal.
Claim 16
Dependent Claim
19 words
A surface analysis device according to claim 12 wherein the integration-transform means is means of carrying out Laplace transform.
Claim 17
Dependent Claim
65 words
A surface analysis device according to claim 12 wherein the integration-transform means has means of inputting a change of photoionization cross section accompanying a change of energy of the incident light onto the sample, or it has monitoring means of a change of intensity of the incident light accompanying the change of energy of the incident light, and means of inputting the monitor intensity signal.
Claim 18
Dependent Claim
26 words
A surface analysis device according to any of the preceding claims 12 to 14 wherein the light is in the soft X-rays to vacuum ultraviolet regions.
Claim 19
Dependent Claim
23 words
A surface analysis device according to claim 12 which has means of focusing the light on a certain region on the sample surface.
Claim 20
Dependent Claim
30 words
A surface analysis device according to claim 16 wherein the means for focusing the light comprises a system of mirror optics, a system of transmission·diffraction optics or both of these.
Claim 21
Dependent Claim
26 words
A surface analysis device according to claim 16 which has means of displacing the sample to a designated position relative to the axis of the light.
Claim 22
Dependent Claim
19 words
A surface analysis device according to claim 16 which has means of scanning the light on the sample surface.
Claim 23
Dependent Claim
24 words
A surface analysis device according to claim 16 the means of scanning is means using the reflection of the light on a mirror surface.
Claim 24
Dependent Claim
59 words
A surface analysis device according to claim 12, wherein the energy analysis means and the detecting means enable detection of a signal of only electrons emitted from the surface of the sample and corresponding to a certain binding energy in synchronization with the energy change of the light, the integration-transform means enabling a depth composition profile of the sample.
References Cited (Backward Citations)
US4590376A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-07-01 | 1994-12-31 | 1995-07-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-07-01 | 1998-12-31 | 1999-07-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-07-01 | 2002-12-31 | 2003-07-02 | $7700.00 | Window Closed / Lapsed |