US5028132A
Expired / Lapsed
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Examination of surface structure
Assignee: BASF SE
•
Filing: 1990-03-16
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Granted: 1991-07-02
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Expires: 2010-03-16
Abstract
Abstract A technique for examining surface structures which differ in respect of refractive index and/or height modulation of the surface comprises introducing these surface structures into a plasmon surface polariton field and scanning them by means of surface plasmon microscopy.
Inventors
- 👤 Werner Hickel
- 👤 Wolfgang Knoll
- 👤 Benno Rothenhaeusler
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 13:16
CPC Classifications
G; G01; G01B; G01B11/00; G01B11/30; G01N; G01N21/00; G01N21/17; G01N21/55; G01N21/552; G01N21/553; G01B11/306
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
38 words
A process for examining surface structures which differ in respect of refractive index and/or height modulation of the surface, which comprises introducing these surface structures into a plasmon surface polariton field and scanning them by surface plasmon microscopy.
Claim 2
Dependent Claim
38 words
A process for examining surface structures which differ in respect of refractive index and/or height modulation of the surface, which comprises introducing these surface structures into a plasmon surface polariton field and scanning them by surface plasmon microscopy.
Claim 3
Dependent Claim
39 words
A process as claimed in claim 1, wherein the surface structures are moved by a device toward a metal or semiconductor film on a surface of a glass prism in an attitude parallel to said metal or semiconductor film.
Claim 4
Dependent Claim
29 words
A process as claimed in claim 2, wherein there is a vacuum or a transparent medium between the surface structure to be examined and the metal or semiconductor film.
Claim 5
Dependent Claim
29 words
A process as claimed in claim 3, wherein the transparent medium situated between the surface structures to be examined and the metal or semiconductor film is liquid or gaseous.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-07-01 | 1994-12-31 | 1995-07-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-07-01 | 1998-12-31 | 1999-07-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-07-01 | 2002-12-31 | 2003-07-02 | $7700.00 | Window Closed / Lapsed |