Patent US4214410A successfully refreshed from Google Patents.
US5025147A
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Sensor for converting a distance to optical and further to electrical energy, and surface scanning apparatus using same
Assignee: Leica Microsystems Holdings GmbH
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Filing: 1988-09-22
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Granted: 1991-06-18
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Expires: 2008-09-22
Abstract
Abstract In an apparatus for sensing a distance between a sensor and a surface of a body being measured, a sensor body of the sensor is formed as a light waveguide for laser light. A light exit site for light diffracted within the sensor body is located at a surface thereof which faces away from the measured body. A detection particle is located at the surface of the sensor body, which faces the measured body. The detection particle has a substantially convex and rounded off form and a major dimension which is smaller than the wavelength of the light. The measured body is located in the optical near field of the detection particle. A detector device converts the optical energy of the diffracted light into an electrical detector signal. A continuous thin film is provided as a coating on the sensor. It substantially covers the detection particle and at least a part of the surface of the sensor body in the vicinity of the detection particle. The film has a thickness which is smaller than one half of a predetermined wavelength. The sensor is used to finally convert a distance value into an electrical value.
Inventors
- 👤 Urs T. Durig
- 👤 Ulrich C. Fischer
- 👤 Wolfgang D. Pohl
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 05:55
CPC Classifications
G; G01; G01B; G01B11/00; G01B11/30; G01B11/306; G01Q; G01Q20/00; G01Q20/02; G01Q60/00; G01Q60/18; G01Q60/22; G11; G11B; G11B11/00; G11B11/10; G11B11/105; G11B11/10532; G11B21/00; G11B21/16; G11B21/20; G11B5/00; G11B5/48; G11B5/58; G11B5/60; G11B5/6005; G11B9/00; G11B9/12; G11B9/14; G11B9/1409
Claims Analysis
Total Claims: 37
Claim 1
Independent Claim
318 words
An optical sensor for converting a distance value between a sensor and a body to be measured to a quantity of optical energy by using laser light of a predetermined wavelength and for converting said quantity of optical energy to an electrical value representative of said distance value, said sensor including a reference site, said body to be measured including a surface having a measurement site, said distance value being defined between the reference site of the sensor and the measurement site at the surface of the measured body located opposite the sensor and being small enough to be located, at a predetermined wavelength, in an optical near field of the reference site, the sensor comprising: a sensor body formed as a light waveguide for said laser light and having a light entrance site, a first light exit site for the light guided through the sensor body and a second light exit site for the light diffracted within the sensor body, said second light exit site being located at a first surface of the sensor body on a side thereof which faces away from the measured body, a detection particle acting as an antenna and located at a second surface of the sensor body between said light entrance site and said first light exit site and having a substantially convex and rounded off shape and a major dimension which is smaller than said predetermined wavelength, and a detector means for converting the optical energy of a light portion which leaves the sensor body at the second light exit site into an electrical detector signal, said sensor body being provided with a continuous thin film formed as a coating so as to substantially cover the detection particle and at least part of said second surface of the sensor body in the vicinity of the detection particle, said thin film having a thickness which is smaller than said predetermined wavelength.
Claim 2
Dependent Claim
318 words
An optical sensor for converting a distance value between a sensor and a body to be measured to a quantity of optical energy by using laser light of a predetermined wavelength and for converting said quantity of optical energy to an electrical value representative of said distance value, said sensor including a reference site, said body to be measured including a surface having a measurement site, said distance value being defined between the reference site of the sensor and the measurement site at the surface of the measured body located opposite the sensor and being small enough to be located, at a predetermined wavelength, in an optical near field of the reference site, the sensor comprising: a sensor body formed as a light waveguide for said laser light and having a light entrance site, a first light exit site for the light guided through the sensor body and a second light exit site for the light diffracted within the sensor body, said second light exit site being located at a first surface of the sensor body on a side thereof which faces away from the measured body, a detection particle acting as an antenna and located at a second surface of the sensor body between said light entrance site and said first light exit site and having a substantially convex and rounded off shape and a major dimension which is smaller than said predetermined wavelength, and a detector means for converting the optical energy of a light portion which leaves the sensor body at the second light exit site into an electrical detector signal, said sensor body being provided with a continuous thin film formed as a coating so as to substantially cover the detection particle and at least part of said second surface of the sensor body in the vicinity of the detection particle, said thin film having a thickness which is smaller than said predetermined wavelength.
Claim 3
Dependent Claim
19 words
Sensor according to claim 1, wherein the detector means is formed as an integral part of the sensor body.
Claim 4
Dependent Claim
22 words
Sensor according to claim 1, wherein the detector means is positioned at the sensor body adjacent to the second light exit site.
Claim 5
Dependent Claim
28 words
Sensor according to claim 1, and further including a further light waveguide, the detector means being connected to the second light exit site by said further light waveguide.
Claim 6
Dependent Claim
18 words
Sensor according to claim 1, wherein the detection particle has a major dimension of less than 500 nm.
Claim 7
Dependent Claim
20 words
Sensor according to claim 1, wherein the detection particle has a major dimension in the range 20 to 100 nm.
Claim 8
Dependent Claim
28 words
Sensor according to claim 1, wherein the detection particle is formed of a metal in which, at a predetermined wavelength, the excitation of plasmons or polaritons is possible.
Claim 9
Dependent Claim
15 words
Sensor according to claim 1, wherein the detection particle is formed of a dielectric material.
Claim 10
Dependent Claim
13 words
Sensor according to claim 1, wherein the detection particle is a latex spherule.
Claim 11
Dependent Claim
28 words
Sensor according to claim 1, wherein the thin film is formed of a metal in which, at a predetermined wavelength, the excitation of plasmons or polaritons is possible.
Claim 12
Dependent Claim
30 words
Sensor according to claim 7, wherein said predetermined wavelength is selected within the visible light spectrum and the metal is selected from the group consisting of gold, silver and copper.
Claim 13
Dependent Claim
30 words
Sensor according to claim 10, wherein said predetermined wavelength is selected within the visible light spectrum and the metal is selected from the group consisting of gold, silver and copper.
Claim 14
Dependent Claim
22 words
Sensor according to claim 10, wherein the thin film is formed of gold and has a thickness of less than 100 nm.
Claim 15
Dependent Claim
15 words
Sensor according to claim 1, wherein the detection particle has the shape of a sphere.
Claim 16
Dependent Claim
15 words
Sensor according to claim 1, wherein the detection particle has a shape of a cone.
Claim 17
Dependent Claim
15 words
Sensor according to claim 1, wherein the detection particle has the shape of a pyramid.
Claim 18
Dependent Claim
293 words
In a combination of an apparatus for scanning a surface of a measured body with a sensor for converting a distance value between the sensor and the measured body into optical energy by using laser light and converting optical energy into an electrical value and including a sensor body formed as a light waveguide and having a film coating, a detector particle acting as an antenna, and a detector means for conveying optical energy of the light which leaves said sensor body into a detector signal, wherein a measuring direction is defined which, in the vicinity of a measurement site of the body being measured, is substantially normal to the surface of the measured body, and a scanning direction is defined which is substantially parallel to the surface of the measured body, and wherein the sensor and the measured body are movable relative to each other in both said directions, the apparatus comprising: drive means connected to said sensor to position said sensor relative to the body being measured; first control means for controlling the relative movement of the sensor in the scanning direction according to a predetermined scanning pattern; second control means for controlling the relative movement of the sensor in the measuring direction as a function of a detector signal from said detector means and for delivering a positioning signal to said drive means for said movement; a feedback line for delivering to the second control means a feedback of the detector signal in order to keep the detector signal constant during the relative movement of the sensor in the scanning direction, and a circuit for delivering a measured value of a distance between said sensor and the surface to be scanned, said value being a function of the positioning signal.
Claim 19
Dependent Claim
293 words
In a combination of an apparatus for scanning a surface of a measured body with a sensor for converting a distance value between the sensor and the measured body into optical energy by using laser light and converting optical energy into an electrical value and including a sensor body formed as a light waveguide and having a film coating, a detector particle acting as an antenna, and a detector means for conveying optical energy of the light which leaves said sensor body into a detector signal, wherein a measuring direction is defined which, in the vicinity of a measurement site of the body being measured, is substantially normal to the surface of the measured body, and a scanning direction is defined which is substantially parallel to the surface of the measured body, and wherein the sensor and the measured body are movable relative to each other in both said directions, the apparatus comprising: drive means connected to said sensor to position said sensor relative to the body being measured; first control means for controlling the relative movement of the sensor in the scanning direction according to a predetermined scanning pattern; second control means for controlling the relative movement of the sensor in the measuring direction as a function of a detector signal from said detector means and for delivering a positioning signal to said drive means for said movement; a feedback line for delivering to the second control means a feedback of the detector signal in order to keep the detector signal constant during the relative movement of the sensor in the scanning direction, and a circuit for delivering a measured value of a distance between said sensor and the surface to be scanned, said value being a function of the positioning signal.
Claim 20
Dependent Claim
236 words
In a combination of an apparatus for scanning a surface of a measured body with a sensor for converting a distance value between the sensor and the surface of the measured body into optical energy by using laser light and converting optical energy into an electrical value and including a sensor body formed as a light waveguide and having a film coating, a detector particle acting as an antenna, and a detector means for converting optical energy of the light which leaves said sensor body, into a detector signal, wherein a measuring direction is defined which, in the vicinity of a measurement site of the body being measured, is substantially normal to the surface of the measured body, and a scanning direction is defined which is substantially parallel to the surface of the measured body, and wherein the sensor and the measured body are movable relative to each other in said measuring direction while being fixed relative to each other in any direction normal to the measuring direction, the apparatus comprising: control means for controlling the relative movement of the sensor in the scanning direction according to a predetermined scanning pattern, and a circuit for delivering during a relative movement of the sensor in the scanning direction, a measured value of a variation of a distance between said sensor and the measured body, said value being a function of a detector signal of said detector means.
Claim 21
Dependent Claim
236 words
In a combination of an apparatus for scanning a surface of a measured body with a sensor for converting a distance value between the sensor and the surface of the measured body into optical energy by using laser light and converting optical energy into an electrical value and including a sensor body formed as a light waveguide and having a film coating, a detector particle acting as an antenna, and a detector means for converting optical energy of the light which leaves said sensor body, into a detector signal, wherein a measuring direction is defined which, in the vicinity of a measurement site of the body being measured, is substantially normal to the surface of the measured body, and a scanning direction is defined which is substantially parallel to the surface of the measured body, and wherein the sensor and the measured body are movable relative to each other in said measuring direction while being fixed relative to each other in any direction normal to the measuring direction, the apparatus comprising: control means for controlling the relative movement of the sensor in the scanning direction according to a predetermined scanning pattern, and a circuit for delivering during a relative movement of the sensor in the scanning direction, a measured value of a variation of a distance between said sensor and the measured body, said value being a function of a detector signal of said detector means.
Claim 22
Dependent Claim
269 words
In a combination of an apparatus for scanning a surface of a measured body with a sensor for converting a distance value between the sensor and the surface of the measured body into optical energy by using laser light and converting optical energy into an electrical value and including a sensor body formed as a light waveguide and having a film coating, a detector particle acting as an antenna, and a detector means for converting optical energy of the light which leaves said sensor body into a detector signal, wherein a measuring direction is defined which, in the vicinity of a measurement site of the measured body, is substantially normal to the surface of the measured body, and a scanning direction is defined which is substantially parallel to the surface of the measured body, and wherein the sensor and the measured body are movable relative to each other in both said directions, the apparatus comprising: a drive means connected to said sensor to position said sensor relative to said measured body, control means for controlling the relative movement of the sensor in the measuring direction in response to a detector signal from said detector means and for delivering a positioning signal to said drive means for said movement, a feedback line for delivering to the control means a feedback of the detector signal in order to keep the detector signal constant during a relative movement of the sensor in the measuring direction, and a circuit for delivering a measured value of a distance between said sensor and said measurement site, said value being a function of the positioning signal.
Claim 23
Dependent Claim
269 words
In a combination of an apparatus for scanning a surface of a measured body with a sensor for converting a distance value between the sensor and the surface of the measured body into optical energy by using laser light and converting optical energy into an electrical value and including a sensor body formed as a light waveguide and having a film coating, a detector particle acting as an antenna, and a detector means for converting optical energy of the light which leaves said sensor body into a detector signal, wherein a measuring direction is defined which, in the vicinity of a measurement site of the measured body, is substantially normal to the surface of the measured body, and a scanning direction is defined which is substantially parallel to the surface of the measured body, and wherein the sensor and the measured body are movable relative to each other in both said directions, the apparatus comprising: a drive means connected to said sensor to position said sensor relative to said measured body, control means for controlling the relative movement of the sensor in the measuring direction in response to a detector signal from said detector means and for delivering a positioning signal to said drive means for said movement, a feedback line for delivering to the control means a feedback of the detector signal in order to keep the detector signal constant during a relative movement of the sensor in the measuring direction, and a circuit for delivering a measured value of a distance between said sensor and said measurement site, said value being a function of the positioning signal.
Claim 24
Dependent Claim
308 words
In a combination of an apparatus for scanning the surface of a measured body with a sensor for converting a distance value between the sensor and the measured body into optical energy by using laser light and converting optical energy into an electrical value and including a sensor body formed as a light waveguide and having a film coating, a detector particle acting as an antenna, and a detector means for converting optical energy of light which leaves said sensor body into a detector signal, wherein a measuring direction is defined which, in the vicinity of a measurement site of the measured body, is substantially normal to the surface of the measured body, and a scanning direction is defined which is substantially parallel to the surface of the measured body, and wherein the sensor and the measured body are movable relative to each other in both said directions, the apparatus comprising: drive means connected to said sensor to position the sensor relative to said measured body, control means for controlling the relative movement of the sensor in the measuring direction as a function of a detector signal from said detector means and for delivering a positioning signal to said drive means for said movement, a first circuit for delivering an mean value signal representative of the value of a detector signal of said detector means, averaged over a predetermined time, a feedback line for delivering to the control means the mean value signal in order to keep said value signal constant during the relative movement of the sensor in the measuring direction, and a second circuit for delivering a measured value of a distance between said sensor and said measurement site of the surface of the body being measured, said value being a function of a difference between the detector signal and the mean value signal averaged therefrom.
Claim 25
Dependent Claim
308 words
In a combination of an apparatus for scanning the surface of a measured body with a sensor for converting a distance value between the sensor and the measured body into optical energy by using laser light and converting optical energy into an electrical value and including a sensor body formed as a light waveguide and having a film coating, a detector particle acting as an antenna, and a detector means for converting optical energy of light which leaves said sensor body into a detector signal, wherein a measuring direction is defined which, in the vicinity of a measurement site of the measured body, is substantially normal to the surface of the measured body, and a scanning direction is defined which is substantially parallel to the surface of the measured body, and wherein the sensor and the measured body are movable relative to each other in both said directions, the apparatus comprising: drive means connected to said sensor to position the sensor relative to said measured body, control means for controlling the relative movement of the sensor in the measuring direction as a function of a detector signal from said detector means and for delivering a positioning signal to said drive means for said movement, a first circuit for delivering an mean value signal representative of the value of a detector signal of said detector means, averaged over a predetermined time, a feedback line for delivering to the control means the mean value signal in order to keep said value signal constant during the relative movement of the sensor in the measuring direction, and a second circuit for delivering a measured value of a distance between said sensor and said measurement site of the surface of the body being measured, said value being a function of a difference between the detector signal and the mean value signal averaged therefrom.
Claim 26
Dependent Claim
52 words
Combination according to claim 17, for scanning the surface of a measured body which surface is convex, wherein said sensor body has a surface which faces said measured body and has at least one straight generatrix passing through a location of said surface of the sensor where the detection particle is located.
Claim 27
Dependent Claim
54 words
Combination according to claim 17, for scanning the surface of a measured body, which surface is substantially plane, wherein said sensor body has a surface which faces said measured body and is convex towards the measured body at least at a location of the surface of the sensor where the detection particle is located.
Claim 28
Dependent Claim
52 words
Combination according to claim 18, for scanning the surface of a measured body which surface is convex, wherein said sensor body has a surface which faces said measured body and is at least one straight generatrix passing through a location of said surface of the sensor where the detection particle is located.
Claim 29
Dependent Claim
54 words
Apparatus according to claim 18, for scanning the surface of a measured body which surface is substantially plane, wherein said sensor body has a surface which faces said measured body and is convex towards the measured body at least at a location of the surface of the sensor where the detection particle is located.
Claim 30
Dependent Claim
52 words
Combination according to claim 19, for scanning the surface of a measured body which surface is convex, wherein said sensor body has a surface which faces said measured body and has at least one straight generatrix passing through a location of said surface of the sensor where the detection particle is located.
Claim 31
Dependent Claim
54 words
Combination according to claim 19, for scanning the surface of a measured body, which surface is substantially plane, wherein said sensor body has a surface which faces said measuring body and is convex towards the measured body at least at a location of the surface of the sensor where the detection particle is located.
Claim 32
Dependent Claim
52 words
Combination according to claim 20, for scanning the surface of a measured body which surface is convex, wherein said sensor body has a surface which faces said measured body and has at least one straight generatrix passing through a location of said surface of the sensor where the detection particle is located.
Claim 33
Dependent Claim
54 words
Combination according to claim 20, for scanning the surface of a measured body, which surface is substantially plane, wherein said sensor body has a surface which faces said measured body and is convex towards the measured body at least at a location of the surface of the sensor where the detection particle is located.
Claim 34
Dependent Claim
17 words
Combination according to claim 17, wherein the laser light directed to enter the sensor body is p-polarized.
Claim 35
Dependent Claim
17 words
Combination according to claim 18, wherein the laser light directed to enter the sensor body is p-polarized.
Claim 36
Dependent Claim
17 words
Combination according to claim 19, wherein the laser light directed to enter the sensor body is p-polarized.
Claim 37
Dependent Claim
17 words
Combination according to claim 20, wherein the laser light directed to enter the sensor body is p-polarized.
References Cited (Backward Citations)
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Cited
US4604520A
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