US5024894A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of producing silicon and similar wafers buffered for the deposition of metal oxide superconducting (MOS) polymer composites and the like by insulating metal oxides (IMO) suitable as substrates for MOS, and novel buffered wafers provided thereby
Assignee: Academy of Applied Science Inc
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Filing: 1989-09-15
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Granted: 1991-06-18
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Expires: 2009-09-15
Abstract
Abstract New Method of buffering silicon and similar semiconductor wafers with appropriate metal oxide layers which, in turn, have been found to be excellent substrates for MOS depositions without interaction with the semiconductor surface, and novel buffered wafers produced thereby.
Inventors
- 👤 James C. W. Chien
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 22:57
CPC Classifications
C; C23; C23C; C23C18/00; C23C18/02; C23C18/12; C23C18/1204; C23C18/1208; C23C18/1216; C23C18/14; G; G03; G03F; G03F7/00; G03F7/004; G03F7/0042; G03F7/0047; H; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0661; H10N60/0772; Y; Y10; Y10S; Y10S428/00; Y10S428/901; Y10S428/922; Y10S428/9265; Y10S428/93; Y10S505/00; Y10S505/70; Y10S505/701; Y10T; Y10T428/00; Y10T428/31504; Y10T428/31678
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
30 words
A semiconductor wafer suitable for MOS deposition upon a surface thereof comprising a thin insulating metal oxide buffer layer adhered to said surface and compatible with MOS materials deposited thereon.
Claim 2
Dependent Claim
30 words
A semiconductor wafer suitable for MOS deposition upon a surface thereof comprising a thin insulating metal oxide buffer layer adhered to said surface and compatible with MOS materials deposited thereon.
Claim 3
Dependent Claim
32 words
A coated/buffered semiconductor wafer as claimed in claim 1 and in which said metal oxide buffer layer was formed from a PMC precursor and is of the order of microns in thickness.
Claim 4
Dependent Claim
50 words
A coated/buffered semiconductor wafer as claimed in claim 2 and in which the buffer layer insulating metal oxide is selected from the group consisting of MgO, LaGaO 3 , SrTiO 3 , NdGaO 3 , GdGa, YSZ and LaAlO 3 , and the semiconductor is one of Si and GaAs.
Claim 5
Independent Claim
72 words
A method of buffering semiconductor wafers from undesirable chemical interaction with metal oxide superconducting (MOS) materials to be deposited upon a surface thereof, that comprises, applying to the semiconductor wafer surface a coating of polymer-metal-complex (PMC) to form thereon a corresponding insulating metal oxide thin layer adhered to the said wafer surface and non-reactive therewith, said layer to receive MOS deposition thereupon and buffering the same from reaction with the wafer surface.
Claim 6
Independent Claim
72 words
A method of buffering semiconductor wafers from undesirable chemical interaction with metal oxide superconducting (MOS) materials to be deposited upon a surface thereof, that comprises, applying to the semiconductor wafer surface a coating of polymer-metal-complex (PMC) to form thereon a corresponding insulating metal oxide thin layer adhered to the said wafer surface and non-reactive therewith, said layer to receive MOS deposition thereupon and buffering the same from reaction with the wafer surface.
Claim 7
Dependent Claim
44 words
A method as claimed in claim 4 and in which the semiconductor is silicon and the insulating metal oxide buffer layer is selected from the group consisting of MgO, LaGaO 3 , SrTiO 3 , NdGaO 3 , GdGa, YSZ and LaAlO 3 .
Claim 8
Dependent Claim
22 words
A method as claimed in claim 5 and in which said metal oxide buffer layer is formed in the micron thickness range.
Claim 9
Dependent Claim
21 words
A method as claimed in claim 6 and in which said thickness is in the range of 0.1 to 10 μm.
Claim 10
Dependent Claim
10 words
A semiconductor wafer formed by the process of claim 4.
Claim 11
Dependent Claim
107 words
A method as claimed in claim 1 and in which the (MOS) material is prepared from a polymer-metal-complex (PMC) precursor including metals selected from the group consisting of Y, Ba, Bi, Sr, Ca, Ti, Pb, Ag and Cu intermixed with a thermally stable heteroatom resist polymer comprising successive aromatic rings with intervening structures that render the same sensitive to and unstable in the presence of radiation and selected from the group consisting of amic acid, imide, imidazole, oxadiazole, triazole and oxazole and their respective precursors, with the said material converted by oxidation to (MOS) characteristics following irradiation of the same to create the desired (MOS) conductor pattern.
References Cited (Backward Citations)
No citation records indexed.
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| 3.5 Years (Year 4) | 1994-06-17 | 1994-12-17 | 1995-06-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-06-17 | 1998-12-17 | 1999-06-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-06-17 | 2002-12-17 | 2003-06-18 | $7700.00 | Window Closed / Lapsed |