US5019707A
Expired / Lapsed
US
⏱️ 0.0 years remaining
High speed waveform sampling with a tunneling microscope
Assignee: International Business Machines Corp
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Filing: 1989-03-23
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Granted: 1991-05-28
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Expires: 2009-03-23
Abstract
Abstract Stroboscopic voltage measurements are effected within a short time window with very high spatial resolution using a tunneling microscope. Sampling the tunneling current is implemented by modulating the distance between the tunneling tip and a conductor which carries the waveform to be sampled. In one embodiment, the tunneling tip is mounted on a crystal oscillator to modulate the separation between the tunneling tip and the conductor. As an alternative, an acoustic modulator is used to produce mechanical motion in the surface of the sample in order to modulate the distance between the sample and the tunneling tip.
Inventors
- 👤 George L. Chiu
- 👤 Jean-Marc Halbout
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 20:04
CPC Classifications
G; G01; G01Q; G01Q60/00; G01Q60/10; G01Q60/14; B; B82; B82Y; B82Y35/00; G01R; G01R31/00; G01R31/28; G01R31/302; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/861; Y10S977/872
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
59 words
A tunneling microscope for effecting measurements on a sample with a sample conductor supported thereon, said microscope comprising: a test probe with a test probe tip supported adjacent said sample conductor, means for measuring samples of current in said test probe tip, and an acoustic modulator for varying the distance between said test probe tip and said sample conductor.
Claim 2
Dependent Claim
59 words
A tunneling microscope for effecting measurements on a sample with a sample conductor supported thereon, said microscope comprising: a test probe with a test probe tip supported adjacent said sample conductor, means for measuring samples of current in said test probe tip, and an acoustic modulator for varying the distance between said test probe tip and said sample conductor.
Claim 3
Dependent Claim
17 words
The tunneling microscope as recited in claim 1 wherein said acoustic modulator is supported on said sample.
Claim 4
Dependent Claim
54 words
A tunneling microscope measurement circuit wherein a distance between a test probe tip and a sample modulates tunneling current, said measuring circuit comprising: a piezoelectric stack mechanically coupled to the test probe tip, and a crystal oscillator coupled to said piezoelectric stack for modulating the distance between the test probe tip and the sample.
Claim 5
Dependent Claim
54 words
A tunneling microscope measurement circuit wherein a distance between a test probe tip and a sample modulates tunneling current, said measuring circuit comprising: a piezoelectric stack mechanically coupled to the test probe tip, and a crystal oscillator coupled to said piezoelectric stack for modulating the distance between the test probe tip and the sample.
Claim 6
Dependent Claim
47 words
A tunneling microscope measurement circuit wherein a distance between a test probe tip and a sample modulates tunneling current, said measurement circuit comprising an acoustic modulator for modulating the distance between the test probe tip and the sample, and a crystal oscillator coupled to said acoustic modulator.
Claim 7
Dependent Claim
47 words
A tunneling microscope measurement circuit wherein a distance between a test probe tip and a sample modulates tunneling current, said measurement circuit comprising an acoustic modulator for modulating the distance between the test probe tip and the sample, and a crystal oscillator coupled to said acoustic modulator.
Claim 8
Dependent Claim
63 words
A tunneling microscope measurement circuit for fast changing waveforms wherein a distance between a test probe tip and a sample modulates tunneling current comprising: a crystal oscillator for modulating the distance between the test probe tip and the sample, and means for measuring the tunneling current at a time when there is a given distance between the test probe tip and the sample.
Claim 9
Dependent Claim
63 words
A tunneling microscope measurement circuit for fast changing waveforms wherein a distance between a test probe tip and a sample modulates tunneling current comprising: a crystal oscillator for modulating the distance between the test probe tip and the sample, and means for measuring the tunneling current at a time when there is a given distance between the test probe tip and the sample.
Claim 10
Dependent Claim
100 words
A tunneling microscope for effecting measurements on a sample and a conductor supported thereon, said microscope comprising: a mechanical oscillator driven by an oscillator drive signal, a test probe with a test probe tip supported for movement toward and away from said sample conductor in response to motion produced by said mechanical oscillator, means for measuring samples of current in said test probe tip, said mechanical oscillator including a drive signal source, a power divider responsive to said drive signal source for driving a piezoelectric stack, and a frequency divider responsive to said power divider for producing a trigger signal.
Claim 11
Dependent Claim
100 words
A tunneling microscope for effecting measurements on a sample and a conductor supported thereon, said microscope comprising: a mechanical oscillator driven by an oscillator drive signal, a test probe with a test probe tip supported for movement toward and away from said sample conductor in response to motion produced by said mechanical oscillator, means for measuring samples of current in said test probe tip, said mechanical oscillator including a drive signal source, a power divider responsive to said drive signal source for driving a piezoelectric stack, and a frequency divider responsive to said power divider for producing a trigger signal.
Claim 12
Dependent Claim
33 words
A tunneling microscope as recited in claim 6 wherein said test probe tip and said piezoelectric stack are arranged to bring said probe tip to within about 5 Å of said sample conductor.
Claim 13
Dependent Claim
31 words
A tunneling microscope as recited in claim 7 wherein said test probe tip and said piezoelectric stack are arranged to drive said probe tip about 100 Å from said sample conductor.
Claim 14
Dependent Claim
39 words
A tunneling microscope as recited in claim 6 wherein said test probe tip and said piezoelectric stack are arranged to drive said probe tip within a range of about 5 Å to about 100 Å from said sample conductor.
Claim 15
Dependent Claim
83 words
A tunneling microscope for effecting measurements on a sample and a conductor supported thereon, said microscope comprising: (a) gating means for gating tunneling current on and off, said gating means comprising: (a1) a mechanical oscillator driven by an oscillator drive signal, and (a2) a test probe with a test probe tip supported for movement toward and away from said sample conductor in response to motion produced by said mechanical oscillator, and (b) means for measuring samples of current in said test probe tip.
Claim 16
Dependent Claim
83 words
A tunneling microscope for effecting measurements on a sample and a conductor supported thereon, said microscope comprising: (a) gating means for gating tunneling current on and off, said gating means comprising: (a1) a mechanical oscillator driven by an oscillator drive signal, and (a2) a test probe with a test probe tip supported for movement toward and away from said sample conductor in response to motion produced by said mechanical oscillator, and (b) means for measuring samples of current in said test probe tip.
Claim 17
Dependent Claim
18 words
A tunneling microscope as recited in claim 10 wherein: said mechanical oscillator is driven by a crystal oscillator.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-05-27 | 1994-11-26 | 1995-05-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-05-27 | 1998-11-26 | 1999-05-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-05-27 | 2002-11-26 | 2003-05-28 | $7700.00 | Window Closed / Lapsed |