Equipment and method for supply of organic metal compound

Claim 1

Supply equipment for stable supply of feed gas of an organic metal compound at a constant concentration which comprises a generally cylindrical vessel having a solid organic metal compound housed therein, said vessel comprising an upper cylinder supported on and extending upwardly from a smaller diameter, coaxial lower cylinder, an inlet tube communicating with said lower cylinder for providing carrier gas for vaporizing said organic metal compound, an outlet tube communicating with said upper cylinder for letting out the carrier gas substantially saturated with the vaporized organic metal compound, a room provided in the lower part of the lower cylinder of the vessel, said room being connected to said carrier gas inlet tube, a packet bed of a solid organic metal compound formed above said room and extending upwardly from said lower cylinder into said upper cylinder, and a partition with a plurality of pores in said lower cylinder partitioning said room and said packed bed, the carrier gas introduced into said room in said lower cylinder being passed through said partition to and through said packed bed whereby it becomes substantially saturated with the organic metal compound, said organic metal compound-saturated carrier gas emerging from said packed bed into said upper cylinder and exiting said equipment through said outlet tube.