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US5016567A Expired / Lapsed US ⏱️ 0.0 years remaining

Apparatus for treatment using gas

Assignee: Tokyo Electron Ltd
•
Filing: 1989-08-17
•
Granted: 1991-05-21
•
Expires: 2009-08-17
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Abstract

Abstract A heat treatment apparatus used in the manufacturing of semiconductor devices and the like, for treating with a reaction gas substrates placed in a reaction tube of the apparatus. A support table is provided within the reaction tube, for supporting substrates during a treatment process, and is rotated during each treatment by a motor, via a shaft penetrating the reaction tube. That portion of the reaction tube which is penetrated by the shaft is provided with a journal bearing and a magnetic fluid seal member. The seal member is surrounded by an enclosing space which substantially separates the seal member from the reaction space within the reaction tube, the enclosing space and the reaction space communicating with each other via a narrow passage. During a heat treatment, a shield gas is supplied into the enclosing space, the pressure within the enclosing space being maintained at a higher level than that within the reaction space. As a result, the reaction gas and a gas produced during heat treatment cannot come into contact with the seal member, and thus cannot adversely affect the seal member.

Inventors

  • 👤 Katsuhiko Iwabuchi
  • 👤 Osamu Yokokawa
  • 👤 Eiichiro Takanabe

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-04 02:32
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/4401; C23C16/4409; Y; Y10; Y10S; Y10S156/00; Y10S156/912

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 175 words
A treatment apparatus for supplying a treatment gas into a treatment space to treat an object, comprising: means for defining said treatment space; a corrodible portion forming part of the treatment apparatus and contained therein, and susceptible to corrosion in an atmosphere within the treatment space; means for defining an enclosing space by enclosing the corrodible portion contained in the treatment space; and means for supplying a noncorrosive shield gas into the enclosing space, wherein: said enclosing space is held in a positive pressure higher than that of said treatment space by supplying the shield gas during the treatment, said treatment space defining means is comprised of a reaction tube and a lid for opening/closing the reaction tube, and said corrodible portion is located on the lid, and a gas pipe for said shield gas supplying means is divided into a primary pipe located on said reaction tube, and a secondary pipe on said lid, and said primary and secondary pipes are automatically connected to each other in an air-tight state by closing said lid.
Claim 2
Dependent Claim 175 words
A treatment apparatus for supplying a treatment gas into a treatment space to treat an object, comprising: means for defining said treatment space; a corrodible portion forming part of the treatment apparatus and contained therein, and susceptible to corrosion in an atmosphere within the treatment space; means for defining an enclosing space by enclosing the corrodible portion contained in the treatment space; and means for supplying a noncorrosive shield gas into the enclosing space, wherein: said enclosing space is held in a positive pressure higher than that of said treatment space by supplying the shield gas during the treatment, said treatment space defining means is comprised of a reaction tube and a lid for opening/closing the reaction tube, and said corrodible portion is located on the lid, and a gas pipe for said shield gas supplying means is divided into a primary pipe located on said reaction tube, and a secondary pipe on said lid, and said primary and secondary pipes are automatically connected to each other in an air-tight state by closing said lid.
Claim 3
Dependent Claim 22 words
An apparatus according to claim 1, wherein the enclosing space and the treatment space communicate with each other via a narrow path.
Claim 4
Dependent Claim 26 words
An apparatus according to claim 2, further including means, located adjacent to said shield gas supply means, for directing the shield gas toward the corrodible portion.
Claim 5
Dependent Claim 24 words
An apparatus according to claim 1, wherein the corrodible portion comprises a magnetic seal member for supporting a rotating shaft extending through said lid.
Claim 6
Dependent Claim 16 words
An apparatus according to claim 1 wherein the shield gas is one selected from inert gases.
Claim 7
Dependent Claim 16 words
An apparatus according to claim 1 wherein the shield gas is one selected from inert gases.
Claim 8
Dependent Claim 28 words
An apparatus according to claim 1, wherein the pressure in the enclosing space is always higher by about 5 to 10 Torr than that in the treatment space.

References Cited (Backward Citations)

JPS5978526A Cited
JPS6214223A Cited
JPS62235729A Cited
JPS62245623A Cited
JPS62245624A Cited
JPS62281320A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1994-05-20 1994-11-19 1995-05-21 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1998-05-20 1998-11-19 1999-05-21 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2002-05-20 2002-11-19 2003-05-21 $7700.00 Window Closed / Lapsed

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