Corrosion-resistant and heat-resistant amorphous aluminum-based alloy thin film and process for producing the same
Abstract
Abstract The present invention provides a corrosion-resistant and heat-resistant aluminum-based alloy thin film consisting of a composite having a composition represented by the general formula, Al a Ni b X c N d , wherein: X is a metal element selected from Y and Zr and a, b, c and d are as follows, in atomic percentages: 70≦a≦93, 0.5≦b≦7.5, 0.5≦c≦12 and 1≦d≦18, the composite being at least 50% (by volume) composed of an amorphous phase. The thin films are produced by depositing a material having the composition represented by the above-defined general formula onto a substrate by a thin film formation technique, such as sputtering, vacuum deposition or ion plating. In the production process, only nitrogen may be supplied as gas. The novel aluminum-based alloy thin film has superior corrosion-resistance and heat-resistance together with high levels of hardness and wear resistance. Further, the thin films can be subjected to a high degree of bending.
Inventors
- 👤 Hiroshi Yamagata
Bibliographic Details
Claims Analysis
Total Claims: 6References Cited (Backward Citations)
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