US5013683A
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Method for growing tilted superlattices
Assignee: University of California, San Diego
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Filing: 1989-01-23
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Granted: 1991-05-07
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Expires: 2009-01-23
Abstract
Abstract A method for growing a superlattice structure on a substrate. First, a periodic array of monoatomic surface steps are created on the surface of the substrate at an area to have the superlattice structure grown thereon. There is apparatus for creating a beam of a material being input thereto and for selectively including or not including respective ones of a plurality of materials within the beam. The beam is directed at the steps of the substrate. Finally, logic causes control apparatus to include and not include respective ones of the materials within the beam in a pre-established pattern of time periods which will cause the materials to be deposited on the steps in a series of stacked monolayers. Tilted Superlattices (TSLs) and Coherent Tilted Superlattices (CTSLs) are created. The method can create pseudo ternary semiconductor alloys as part of a CTSL by employing at least two binary compound semiconductor alloys in the deposition process. It can also create a quantum wire superlattice by sandwiching a thin CTSL layer between two wider band gap layers. Additionally, it can create a tilted superlattice with zero misfit strain by using three binary compounds to produce a pseudo-ternary compound in a direction parallel to the substrate normal while the tilted superlattice structure provides a desired band gap in a direction parallel to the substrate surface. One may form the CTSL as part of a field effect transistor (FET) wherein the CTSL is part of the FET gate or form the CTSL as the cladding layers of a quantum wire laser having a GaAs active layer.
Inventors
- 👤 Pierre M. Petroff
- 👤 Herbert Kroemer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 19:32
CPC Classifications
B; B82; B82Y; B82Y10/00; H; H10; H10P; H10P14/00; H10P14/20; H10P14/29; H10P14/2901; H10P14/2907; H10P14/2911; H10D; H10D30/00; H10D30/01; H10D30/051; H10D62/00; H10D62/80; H10D62/81; H10D62/815; H10D62/8161; H10D62/8181; H10P14/22; H10P14/24; H10P14/2926; H10P14/32; H10P14/3202; H10P14/3214; H10P14/3221; H10P14/36; Y; Y10; Y10S; Y10S117/00; Y10S117/901; Y10S117/902; Y10S148/00; Y10S148/025; Y10S148/097; Y10S148/16; Y10S148/169; Y10S438/00; Y10S438/962
Claims Analysis
Total Claims: 36
Claim 1
Independent Claim
196 words
The method for growing a superlattice structure on a substrate comprising the steps of: (a) creating a periodic array of monoatomic surface steps on the substrate comprised of a plurality of equal and adjacent monoatomically thick steps on the surface of the substrate at an area to have the superlattice structure grown thereon wherein each step contains a plurality of atomic bonding sites on the surface thereof; (b) providing means for creating a beam of a material being input thereto and control means operably connected for selectively including or not including respective ones of a plurality of materials within the beam; (c) directing the beam at the steps of the substrate; (d) establishing time periods for deposition of the materials for each of the monolayers such that the total number of atoms of the materials deposited will be equal in number to the number of the atomic bonding sites; and (e) causing the control means to include and not include respective ones of the materials within the beam in a pre-established pattern of the time periods from step (d) which will cause the materials to be deposited on the steps in a series of stacked monolayers.
Claim 2
Independent Claim
196 words
The method for growing a superlattice structure on a substrate comprising the steps of: (a) creating a periodic array of monoatomic surface steps on the substrate comprised of a plurality of equal and adjacent monoatomically thick steps on the surface of the substrate at an area to have the superlattice structure grown thereon wherein each step contains a plurality of atomic bonding sites on the surface thereof; (b) providing means for creating a beam of a material being input thereto and control means operably connected for selectively including or not including respective ones of a plurality of materials within the beam; (c) directing the beam at the steps of the substrate; (d) establishing time periods for deposition of the materials for each of the monolayers such that the total number of atoms of the materials deposited will be equal in number to the number of the atomic bonding sites; and (e) causing the control means to include and not include respective ones of the materials within the beam in a pre-established pattern of the time periods from step (d) which will cause the materials to be deposited on the steps in a series of stacked monolayers.
Claim 3
Dependent Claim
46 words
The method of growing a superlattice structure on a substrate of claim 1 wherein said step of creating a periodic array of monoatomic surface steps on the substrate includes the step of: carefully polishing the substrate by a few degrees from a major cyrstallographic plane thereof.
Claim 4
Dependent Claim
41 words
The method for growing a superlattice structure on a substrate of claim 2 wherein said step of polishing the substrate includes the step of: polishing the substrate in a misorientation direction chosen to result in step edges as straight as possible.
Claim 5
Dependent Claim
46 words
The method for growing a superlattice structure on a substrate of claim 3 wherein the substrate is GaAs and: the misorientation direction is chosen to be orthogonal to the {110} direction of the substrate whereby the edges of the steps are terminated by Arsenic dangling bonds.
Claim 6
Dependent Claim
47 words
The method for growing a superlattice structure on a substrate of claim 1 and additionally comprising the step of: making the steps more periodic by depositing a GaAs buffer layer at a temperature corresponding to the disappearance of oscillations of RHEED diffraction spots associated with the steps.
Claim 7
Dependent Claim
70 words
The method for growing a superlattice structure on a substrate of claim 1 and additionally comprising the step of: maximizing the straightness of the steps and thereby controlling interface roughness by minimizing kink density along the edges of the steps by employing a growth temperature in combination with the beam that gives the narrowest RHEED spots associated with the steps for the beam direction parallel to edges of the steps.
Claim 8
Dependent Claim
33 words
The method for growing a superlattice structure on a substrate of claim 6 wherein said step of employing a growth temperature includes the step of: setting the growth temperature to approximately 610° C.
Claim 9
Dependent Claim
106 words
The method for growing a superlattice structure on a substrate of claim 1 with two elements and additionally including the steps of: (a) measuring the fraction of monolayers of the elements to be deposited from RHEED oscillations obtained during prior epitaxy of the elements to determine the times, t1 and t2, taken for the deposition of a monolayer of each of two elements; (b) using the times t1 and t2 to establish the times mt1 and nt2 required for deposition of m and n fractional monolayers; and, (c) using the times mt1 and nt2 as the times for deposition of the two elements for each monolayer.
Claim 10
Dependent Claim
53 words
The method for growing a superlattice structure on a substrate of claim 8 and additionally including the step of: employing a sufficiently high temperature in combination with the beam to establish a layer growth mode and allow fast migration of atoms of the materials to nearest nucleation sites being edges of the steps.
Claim 11
Dependent Claim
93 words
The method for growing a superlattice structure on a substrate of claim 9 wherein each monolayer is comprised of two materials and said step of causing the control means to include and not include respective ones of the materials within the beam in a pre-established pattern of time periods includes: establishing the time periods for each of the materials of each monolayer such that the total amount of the materials deposited is wider than the width of a step whereby the monolayers tilt from being normal to the substrate as they are stacked.
Claim 12
Independent Claim
211 words
The method for growing a superlattice structure on a substrate by depositing elements thereon in a stacked series of monolayers comprising the steps of: (a) creating a periodic array of monoatomic surface steps on the substrate comprised of a plurality of equal and adjacent monoatomically thick steps on the surface of the substrate at an area to have the superlattice structure grown thereon wherein each step contains a plurality of atomic bonding sites on the surface thereof; (b) providing means for creating a beam containing the elements to be deposited and control means operably connected for selectively including or not including respective ones of the elements within the beam; (c) establishing time periods for deposition of the elements for each of the monolayers such that the total number of atoms of the elements deposited will be equal in number to the number of the atomic bonding sites; (d) directing the beam at the steps of the substrate; and, (e) causing the control means to include and not include respective ones of the elements within the beam in a pre-established pattern of the time periods from step (c) which will cause the elements to be deposited on the steps in a series of stacked monolayers whereby a Coherent Superlattice (CSL) is formed.
Claim 13
Independent Claim
211 words
The method for growing a superlattice structure on a substrate by depositing elements thereon in a stacked series of monolayers comprising the steps of: (a) creating a periodic array of monoatomic surface steps on the substrate comprised of a plurality of equal and adjacent monoatomically thick steps on the surface of the substrate at an area to have the superlattice structure grown thereon wherein each step contains a plurality of atomic bonding sites on the surface thereof; (b) providing means for creating a beam containing the elements to be deposited and control means operably connected for selectively including or not including respective ones of the elements within the beam; (c) establishing time periods for deposition of the elements for each of the monolayers such that the total number of atoms of the elements deposited will be equal in number to the number of the atomic bonding sites; (d) directing the beam at the steps of the substrate; and, (e) causing the control means to include and not include respective ones of the elements within the beam in a pre-established pattern of the time periods from step (c) which will cause the elements to be deposited on the steps in a series of stacked monolayers whereby a Coherent Superlattice (CSL) is formed.
Claim 14
Dependent Claim
146 words
The method for growing a superlattice structure on a substrate of claim 11 wherein Al, Ga, and As are to be deposited on a substrate to form stacked monolayers of AlAs and GaAs and said step of causing the control means to include and not include respective ones of the elements within the beam in a pre-established pattern of time periods includes the steps of: (a) first depositing sufficient atoms of Al to form an Al monolayer; (b) next depositing sufficient atoms of As to combine with the Al monolayer to form an AlAs monolayer; (c) then depositing sufficient atoms of Ga to form a Ga monolayer adjacent the Al monolayer; (d) next depositing sufficient atoms of As to combine with the Ga monolayer to form a GaAs monolayer; and, (e) repeating steps (a) through (d) until the desired thickness of stacked monolayers has been grown.
Claim 15
Dependent Claim
131 words
The method for growing a superlattice structure on a substrate of claim 11 wherein Al, Ga, and As are to be deposited on a substrate to form stacked monolayers of AlAs and GaAs and said step of causing the control means to include and not include respective ones of the elements within the beam in a pre-established pattern of time periods includes the steps of: (a) first depositing sufficient atoms of Al to form an Al monolayer; (b) then depositing sufficient atoms of Ga to form a Ga monolayer adjacent the Al monolayer; (c) next depositing sufficient atoms of As to combine with the Al and Ga monolayers to form AlAs and GaAs monolayers; and (d) repeating steps (a) through (c) until the desired thickness of stacked monolayers has been grown.
Claim 16
Dependent Claim
160 words
The method for growing a superlattice structure on a substrate of claim 11 wherein Al, Ga, and As are to be deposited on a substrate to form stacked monolayers of AlAs and GaAs and said step of causing the control means to include and not include respective ones of the elements within the beam in a pre-established pattern of time periods includes the steps of: (a) starting the simultaneous depositing of Al and Ga atom to form adjacent Al and Ga monolayers; (b) stopping the depositing of Al when sufficient atoms of Al have been deposited to form the desired Al monolayer; (c) stopping the depositing of Ga when sufficient atoms of Ga have been deposited to form the desired Ga monolayer; (d) next depositing sufficient atoms of As to combine with the Al and Ga monolayers to form AlAs and GaAs monolayers; and, (e) repeating steps (a) through (d) until the desired thickness of stacked monolayers have been grown.
Claim 17
Dependent Claim
44 words
The method for growing a superlattice structure on a substrate of claim 14 and additionally comprising between steps (c) and (d) thereof the step of: delaying for a period of time sufficient to allow Al and Ga atom migration within each of the monolayers.
Claim 18
Dependent Claim
24 words
The method for growing a superlattice structure on a substrate of claim 15 wherein: said period of time for delay is approximately 0.3 second.
Claim 19
Dependent Claim
58 words
The method for growing a superlattice structure on a substrate of claim 14 wherein: said steps are accomplished during the simultaneous step of controlling the temperature of the environment of the substrate at a temperature TC wherein RHEED oscillations associated with the superlattice being formed disappear whereby all step edges being formed are moving in phase during growth.
Claim 20
Dependent Claim
33 words
The method for growing a superlattice structure on a substrate of claim 17 wherein: said step of controlling the temperature of the environment comprises controlling the temperature (TC) to be approximately ˜625° C.
Claim 21
Dependent Claim
80 words
The method for growing a superlattice structure on a substrate of claim 11 wherein there are a pair of monolayer formed by a pair of elements A and B on each step and additionally comprising the step of: making the width m of element A plus the width n of element B less than or equal to the width p of the step whereby the stacked monolayers form layers of elements A and B which are normal to the substrate.
Claim 22
Dependent Claim
63 words
The method for growing a superlattice structure on a substrate of claim 19 wherein each step contains a plurality of atomic bonding sites on the surface thereof and additionally including the step of: depositing a total number of atoms of the elements A and B equal in number to the number of the atomic bonding sites whereby a Coherent Superlattice (CSL) is formed.
Claim 23
Dependent Claim
80 words
The method for growing a superlattice structure on a substrate of claim 11 wherein there are a pair of monolayer formed by a pair of elements A and B on each step and additionally comprising the step of: making the width m of element A plus the width n of element B greater than the width p of the step whereby the stacked monolayers form layers of elements A and B which are tilted from being normal to the substrate.
Claim 24
Dependent Claim
42 words
The method for growing a superlattice structure on a substrate of claim 21 and additionally including the step of: creating pseudo ternary semiconductors alloys as part of the CTSL by employing at least two binary compound semiconductors alloys in the deposition process.
Claim 25
Dependent Claim
62 words
The method of growing a superlattice structure on a substrate of claim 22 wherein said step of employing at least two binary compound semiconductor alloys in the deposition process comprises the steps of: (a) choosing two elements A and B for the deposition process; and, (b) employing the deposition sequence ABAAABAAAB . . . to yield an AB ternary, A binary structure.
Claim 26
Dependent Claim
63 words
The method for growing a superlattice structure on a substrate of claim 22 wherein said step of employing at least two binary compound semiconductor alloys in the deposition process comprises the steps of: (a) choosing three elements A, B, and C for the deposition process; and, (b) employing the deposition sequence ABCBABCBABC . . . to yield an Ac ternary, B binary structure.
Claim 27
Dependent Claim
63 words
The method for growing a superlattice structure on a substrate of claim 22 wherein said step of employing at least two binary compound semiconductor alloys in the deposition process comprises the steps of: (a) choosing three elements A, B, and C for the deposition process; and, (b) employing the deposition sequence ABAAABAAAB . . . to yield an AB ternary, A binary structure.
Claim 28
Dependent Claim
63 words
The method for growing a superlattice structure on a substrate of claim 22 wherein said step of employing at least two binary compound semiconductor alloys in the deposition process comprises the steps of: (a) choosing three elements A, B, and C for the deposition process; and, (b) employing the deposition sequence ABCCABCCABC . . . to yield an AC ternary, BC binary structure.
Claim 29
Dependent Claim
63 words
The method for growing a superlattice structure on a substrate of claim 22 wherein said step of employing at least two binary compound semiconductor alloys in the deposition process comprising the steps of: (a) choosing three elements A, B, and C for the deposition process; and, (b) employing the deposition sequence ABCAABCAABC . . . to yield an AC ternary, AB binary structure.
Claim 30
Dependent Claim
62 words
The method for growing a superlattice structure on a substrate of claim 22 wherein said step of employing at least two binary compound semiconductor alloys in the deposition process comprises the steps of: (a) choosing two elements A and B for the deposition process; and, (b) employing the deposition sequence ABAAABAAAB . . . to yield an AB ternary, A binary structure.
Claim 31
Dependent Claim
38 words
The method for growing a superlattice structure on a substrate of claim 21 and additionally including the step of: creating a quantum wire superlattice by sandwiching a thin tilted superlattice (TSL) layer between two wider band gap layers.
Claim 32
Dependent Claim
62 words
The method for growing a superlattice structure on a substrate of claim 25 and additionally including the step of: creating a tilted superlattice with misfit strain by using three binary compounds to produce a pseudo-ternary compound in a direction parallel to the substrate normal while the tilted superlattice structure provides a desired band gap in a direction parallel to the substrate surface.
Claim 33
Dependent Claim
39 words
The method for growing a superlattice structure on a substrate of claim 25 and additionally including the step of: forming the CTSL as part of a field effect transistor (FET) wherein the TSL is part of the FET gate.
Claim 34
Dependent Claim
36 words
The method for growing a superlattice structure on a substrate of claim 25 and additionally including the step of: forming the CTSL as the cladding layers of a quantum wire laser having a GaAs active layer.
Claim 35
Independent Claim
208 words
The method for producing a self-organizing system with semiconductor alloys comprising the steps of: (a) creating a periodic array of monoatomic surface steps on a substrate comprised of a plurality of equal and adjacent monoatomically thick steps on the surface of the substrate at an area to have a self-organizing superlattice structure grown thereon wherein each step contains a plurality of atomic bonding sites on the surface thereof; (b) providing means for creating a beam of a material being input thereto and control means operably connected for selectively including or not including respective ones of a plurality of semiconductor materials to be alloyed within the beam; (c) directing the beam at the steps of the substrate; (d) causing the control means to include and not include respective ones of the semiconductor materials within the beam in a pre-established pattern of time periods which will cause the materials to be deposited on the steps in a series of self-organizing stacked monolayers; and, (e) establishing the time periods for deposition of the materials for each of the monolayers such that the total number of atoms of the materials deposited is equal in number to the number of the atomic bonding sites whereby a self-organizing, coherent, tilted, superlattice structure is formed.
Claim 36
Independent Claim
208 words
The method for producing a self-organizing system with semiconductor alloys comprising the steps of: (a) creating a periodic array of monoatomic surface steps on a substrate comprised of a plurality of equal and adjacent monoatomically thick steps on the surface of the substrate at an area to have a self-organizing superlattice structure grown thereon wherein each step contains a plurality of atomic bonding sites on the surface thereof; (b) providing means for creating a beam of a material being input thereto and control means operably connected for selectively including or not including respective ones of a plurality of semiconductor materials to be alloyed within the beam; (c) directing the beam at the steps of the substrate; (d) causing the control means to include and not include respective ones of the semiconductor materials within the beam in a pre-established pattern of time periods which will cause the materials to be deposited on the steps in a series of self-organizing stacked monolayers; and, (e) establishing the time periods for deposition of the materials for each of the monolayers such that the total number of atoms of the materials deposited is equal in number to the number of the atomic bonding sites whereby a self-organizing, coherent, tilted, superlattice structure is formed.
References Cited (Backward Citations)
US4058430A
Cited
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