Patent US434307A successfully refreshed from Google Patents.
US5013384A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vacuum system
Assignee: US Philips Corp
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Filing: 1990-06-22
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Granted: 1991-05-07
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Expires: 2010-06-22
Abstract
Abstract An inlet opening in an evacuatable vacuum system is substantially enlarged and closed off by a porous plate so that the ingress of dust is avoided and a very uniform inflow of gas is realized. A similar plate can be used for closing off a gas outlet opening of the vacuum chamber.
Inventors
- 👤 Willem F. Mellink
- 👤 Peter J. G. M. Janssen
- 👤 Jan Zwier
- 👤 Harm Lotterman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 05:53
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0451; H10P72/0462; H10P72/0402
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
85 words
A vacuum system for the storage, measurement or treatment of objects sensitive to dust contamination comprising: a housing forming an evacuatable chamber, said chamber having a gas inlet and a gas outlet, said inlet and outlet each having a corresponding given cross-sectional area; means for forming an intermediate chamber between said inlet and said chamber; and a porous filter plate between said intermediate chamber and said evacuatable chamber, said plate having a gas passage surface area relatively large with respect to said inlet cross-sectional area.
Claim 2
Dependent Claim
85 words
A vacuum system for the storage, measurement or treatment of objects sensitive to dust contamination comprising: a housing forming an evacuatable chamber, said chamber having a gas inlet and a gas outlet, said inlet and outlet each having a corresponding given cross-sectional area; means for forming an intermediate chamber between said inlet and said chamber; and a porous filter plate between said intermediate chamber and said evacuatable chamber, said plate having a gas passage surface area relatively large with respect to said inlet cross-sectional area.
Claim 3
Dependent Claim
37 words
A vacuum system as claimed in claim 1, characterized in that an active passage surface area of the porous plate amounts to at least from approximately 2 to 10 times the cross-sectional area of the outlet opening.
Claim 4
Dependent Claim
16 words
The system of claim 1 wherein said intermediate chamber is a widened portion of said inlet.
Claim 5
Dependent Claim
17 words
The system of claim 1 including detachable clamping means for securing the porous plate to said housing.
Claim 6
Dependent Claim
18 words
The system of claim 3 further including a second porous plate between the outlet and said evacuatable chamber.
Claim 7
Dependent Claim
42 words
The system of claim 5 wherein said housing has a second intermediate chamber between said evacuatable chamber and said outlet, said second chamber being an enlarged portion of said outlet, said second plate being between the second chamber and said evacuatable chamber.
Claim 8
Dependent Claim
19 words
A vacuum system as claimed in claim 6, characterized in that it forms part of a chip inspection apparatus.
Claim 9
Dependent Claim
19 words
A vacuum system as claimed in claim 6, characterized in that it forms part of an ion implantation apparatus.
Claim 10
Dependent Claim
19 words
A vacuum system as claimed in claim 6, characterized in that it forms part of a scanning electron microscope.
Claim 11
Dependent Claim
28 words
A vacuum system as claimed in claim 6, characterized in that it forms part of an apparatus for the manufacture or inspection of objects sensitive to dust contamination.
Claim 12
Dependent Claim
23 words
The system of claim 6 including means secured to the housing for receiving at least one semiconductor for processing in said evacuated chamber.
Claim 13
Dependent Claim
24 words
The system of claim 1 including means secured to the housing for receiving at least one semiconductor element for processing in said evacuated chamber.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-05-06 | 1994-11-05 | 1995-05-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-05-06 | 1998-11-05 | 1999-05-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-05-06 | 2002-11-05 | 2003-05-07 | $7700.00 | Window Closed / Lapsed |