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US5010249A
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Diamond probe and forming method thereof
Assignee: Seiko Instruments Inc
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Filing: 1989-09-13
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Granted: 1991-04-23
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Expires: 2009-09-13
Abstract
Abstract The present invention provides a method of manufacturing a probe having an extremely hard and acute tip, which involves the steps of precipitating a carbon film mixed with a columnar diamond crystal and an amorphous carbonic component at a tip of a probe material; and protruding the columnar diamond crystal by selectively etching the amorphous carbonic component. According to the present invention, it is possible to improve a resolving power of the analyzing device and probe durability as well.
Inventors
- 👤 Akira Nishikawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 15:04
CPC Classifications
G; G01; G01Q; G01Q70/00; G01Q70/16; G01Q70/08; G01Q70/14; H; H01; H01J; H01J9/00; H01J9/02; H01J9/022; H01J9/025; H01J2201/00; H01J2201/30; H01J2201/304; H01J2201/30446; H01J2201/30453; H01J2201/30457
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
74 words
A method of forming a diamond probe, comprising the steps of: precipitating a carbon film comprised of a mixture of a columnar diamond crystal and an amorphous carbonic component at a pointed tip of a probe material by a gas-phase synthesizing method; thereafter causing said columnar diamond crystal to protrude by selectively etching only said amorphous carbonic component; and subsequently coating a conductive film on a probe formed with said protruded columnar diamond crystal.
Claim 2
Independent Claim
74 words
A method of forming a diamond probe, comprising the steps of: precipitating a carbon film comprised of a mixture of a columnar diamond crystal and an amorphous carbonic component at a pointed tip of a probe material by a gas-phase synthesizing method; thereafter causing said columnar diamond crystal to protrude by selectively etching only said amorphous carbonic component; and subsequently coating a conductive film on a probe formed with said protruded columnar diamond crystal.
Claim 3
Dependent Claim
41 words
A diamond probe comprising: a probe material having a pointed tip on which to form a carbon film comprised of a mixture of a columnar diamond crystal and an amorphous carbonic component, and a conductive film coated on said carbon film.
Claim 4
Dependent Claim
41 words
A diamond probe comprising: a probe material having a pointed tip on which to form a carbon film comprised of a mixture of a columnar diamond crystal and an amorphous carbonic component, and a conductive film coated on said carbon film.
References Cited (Backward Citations)
US4873115A
Cited
US4668865A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-04-22 | 1994-10-22 | 1995-04-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-04-22 | 1998-10-22 | 1999-04-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-04-22 | 2002-10-22 | 2003-04-23 | $7700.00 | Window Closed / Lapsed |