US5009765A
Expired / Lapsed
US
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Sputter target design
Assignee: Tosoh SMD Inc
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Filing: 1990-05-17
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Granted: 1991-04-23
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Expires: 2010-05-17
Abstract
Abstract A cathode sputtering assembly includes a sputter target welded to a corresponding backing member, where the target and backing member are adapted for insertion into a sputtering system. The target has a reduced diameter portion profiled for receipt within a counterbored upper section of the backing member. The target has a beveled surface above the reduced diameter section, and the backing member has an upper tapered edge, where the interface between the sputtering target and the backing member cooperate to define a V-groove. Both the target and the backing member are comprised of aluminum and the target and backing member are TIG welded together with aluminum filler rod.
Inventors
- 👤 Sohail S. Qamar
- 👤 Harry W. Conard
- 👤 Lowell E. Hamilton
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 20:21
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3411; H01J37/3435; C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/3407; C23C14/3414
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
149 words
A sputter target assembly of the type wherein a cooling medium is to be provided in heat exchange relation with said target, comprising: a sputter target having an upper surface carrying the material to be sputtered, an outer, peripheral surface and a cooling surface; backing means comprising an upper mounting section positioned adjacent to the sputter target and having an outer peripheral surface, wherein the backing means and the target cooling surface, together, define a chamber adapted for reception of the cooling medium with the peripheral surfaces of the target member and the backing means nested adjacent each other to define an interface, recess means formed at the interface of the sputter target and the backing means along adjacent peripheral surfaces of the sputter target and the backing means, and metal bonding means disposed in the recess means for fixedly retaining the backing means and the sputter target together.
Claim 2
Dependent Claim
149 words
A sputter target assembly of the type wherein a cooling medium is to be provided in heat exchange relation with said target, comprising: a sputter target having an upper surface carrying the material to be sputtered, an outer, peripheral surface and a cooling surface; backing means comprising an upper mounting section positioned adjacent to the sputter target and having an outer peripheral surface, wherein the backing means and the target cooling surface, together, define a chamber adapted for reception of the cooling medium with the peripheral surfaces of the target member and the backing means nested adjacent each other to define an interface, recess means formed at the interface of the sputter target and the backing means along adjacent peripheral surfaces of the sputter target and the backing means, and metal bonding means disposed in the recess means for fixedly retaining the backing means and the sputter target together.
Claim 3
Dependent Claim
21 words
The assembly as recited in claim 1 wherein said cooling surface is disposed on the underside portion of said upper surface.
Claim 4
Dependent Claim
19 words
The assembly of claim 1, wherein said sputter target and said backing means are in partial overlapping coaxial disposition.
Claim 5
Dependent Claim
17 words
The assembly of claim 1 wherein said sputter target and said backing means are annular in shape.
Claim 6
Dependent Claim
22 words
The assembly of claim 4 wherein the recess means includes an outwardly projecting surface portion on the peripheral surface of the target.
Claim 7
Dependent Claim
16 words
The assembly of claim 5, wherein said outwardly projecting surface is frusto-conical in shape facing outwardly.
Claim 8
Dependent Claim
14 words
The assembly of claim 1, wherein said backing means is a hollow annular ring.
Claim 9
Dependent Claim
17 words
The assembly of claim 1, wherein said target and said backing member are both comprised of aluminum.
Claim 10
Dependent Claim
23 words
The assembly of claim 8, wherein said target and said backing member are welded together by aluminum filler rod at said recess means.
Claim 11
Dependent Claim
105 words
A sputtering target assembly, comprising: an open ended backing member having an upper edge; a sputter target having an upper surface carrying the material to be sputtered, the sputter target further comprising an outer diameter, the sputter target being positioned over the open ended backing member with the outer diameter of the sputter target positioned proximate to, and complementing, the upper edge of the backing member to cooperatively define a peripheral outer recess at the intersection of the backing member and the sputter target and metallic bonding means at least partially filling the peripheral outer recess thereby retaining the backing member and sputter target together.
Claim 12
Dependent Claim
105 words
A sputtering target assembly, comprising: an open ended backing member having an upper edge; a sputter target having an upper surface carrying the material to be sputtered, the sputter target further comprising an outer diameter, the sputter target being positioned over the open ended backing member with the outer diameter of the sputter target positioned proximate to, and complementing, the upper edge of the backing member to cooperatively define a peripheral outer recess at the intersection of the backing member and the sputter target and metallic bonding means at least partially filling the peripheral outer recess thereby retaining the backing member and sputter target together.
Claim 13
Dependent Claim
18 words
The assembly of claim 10, wherein the sputter target and backing member are comprised of the same material.
Claim 14
Dependent Claim
16 words
The assembly of claim 11, wherein the sputter target and backing member are comprised of aluminum.
Claim 15
Dependent Claim
14 words
The assembly of claim 12, wherein the recess is filled with aluminum filler rod.
Claim 16
Dependent Claim
16 words
The assembly of claim 10, wherein the upper edge of the backing member is beveled outwardly.
Claim 17
Dependent Claim
16 words
The assembly of claim 10, wherein an outer diameter of the sputter target is beveled outwardly.
Claim 18
Dependent Claim
37 words
The assembly of claim 10, wherein the target includes a reduced diameter outer section at a lower end thereof, the reduced diameter section being adapted for receipt within an inner diameter of the open ended backing member.
Claim 19
Dependent Claim
37 words
The assembly of claim 16, wherein the open ended backing member includes an enlarged diameter inner section located on an inner diameter of the upper edge adapted for receipt of the reduced diameter section of the target.
Claim 20
Independent Claim
111 words
A method of interconnecting a sputter target to a backing member, comprising the steps of: providing an upper mounting section on the backing member; providing an annular opening in the upper mounting section; providing an outer diameter on the sputter target adapted for receipt within the annular opening; providing a frusto-conical surface on the sputtering target above the said diameter; inserting the sputtering target into the annular opening, until the frusto-conical surface of the target abuts the upper mounting section of the backing member, thereby forming a recess therebetween; and bonding the backing member and the sputter target together at the recess, to secure the sputtering target to the backing member.
Claim 21
Independent Claim
111 words
A method of interconnecting a sputter target to a backing member, comprising the steps of: providing an upper mounting section on the backing member; providing an annular opening in the upper mounting section; providing an outer diameter on the sputter target adapted for receipt within the annular opening; providing a frusto-conical surface on the sputtering target above the said diameter; inserting the sputtering target into the annular opening, until the frusto-conical surface of the target abuts the upper mounting section of the backing member, thereby forming a recess therebetween; and bonding the backing member and the sputter target together at the recess, to secure the sputtering target to the backing member.
Claim 22
Dependent Claim
18 words
The method of claim 18, wherein the sputtering target and the backing member are each formed of aluminum.
Claim 23
Dependent Claim
19 words
The method of claim 19, wherein the sputtering target and the backing member are welded together at the recess.
References Cited (Backward Citations)
US3749662A
Cited
US4014779A
Cited
US4100055A
Cited
US4169031A
Cited
US4324631A
Cited
US4457825A
Cited
US4385979A
Cited
JPS59215484A
Cited
US4657654A
Cited
JPS61279672A
Cited
US4826584A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-04-22 | 1994-10-22 | 1995-04-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-04-22 | 1998-10-22 | 1999-04-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-04-22 | 2002-10-22 | 2003-04-23 | $7700.00 | Window Closed / Lapsed |