US5006760A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Capacitive feed for plasma reactor
Assignee: Motorola Solutions Inc
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Filing: 1987-01-09
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Granted: 1991-04-09
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Expires: 2007-01-09
Abstract
Abstract A capacitive feed is disclosed for the lower electrode in a parallel plate plasma reactor. One plate of the capacitor comprises the lower electrode or a contact to the lower electrode. The other plate of the capacitor comprises an annular member insulated from the lower electrode, or the contact. There are no RF connections directly to the lower electrode.
Inventors
- 👤 Herbert G. Drake, Jr.
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 17:48
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32082; H01J37/32091; H01J37/32431; H01J37/32532; H01J37/32568
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
76 words
In a plasma reactor having an enclosed volume in which a plasma is generated between a grounded electrode and a moveable, powered electrode separated by an insulator, the improvement comprising means for capacitively coupling RF power to said enclosed volume wherein said means comprises a conductive ring for overlapping a portion of said moveable electrode and a second insulator for separating said conductive ring from said moveable electrode to form a capacitor with said moveable electrode.
Claim 2
Dependent Claim
76 words
In a plasma reactor having an enclosed volume in which a plasma is generated between a grounded electrode and a moveable, powered electrode separated by an insulator, the improvement comprising means for capacitively coupling RF power to said enclosed volume wherein said means comprises a conductive ring for overlapping a portion of said moveable electrode and a second insulator for separating said conductive ring from said moveable electrode to form a capacitor with said moveable electrode.
Claim 3
Dependent Claim
19 words
The reactor as set forth in claim 1 wherein said second insulator comprises a coating on said conductive ring.
Claim 4
Dependent Claim
19 words
The reactor as set forth in claim 2 and further comprising an electromagnetic shield connected to said lower electrode.
Claim 5
Dependent Claim
26 words
The reactor as set forth in claim 3 and further comprising a ground ring for engaging said electromagnetic shield when said lower electrode closes said reactor.
Claim 6
Independent Claim
42 words
A method for coupling RF power to a plasma glow discharge formed between two electrodes comprising the step of: capacitively coupling RF power to said discharge through a series capacitor wherein one plate of said series capacitor is one of said electrodes.
Claim 7
Independent Claim
42 words
A method for coupling RF power to a plasma glow discharge formed between two electrodes comprising the step of: capacitively coupling RF power to said discharge through a series capacitor wherein one plate of said series capacitor is one of said electrodes.
References Cited (Backward Citations)
US3489933A
Cited
US4209357A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-04-08 | 1994-10-08 | 1995-04-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-04-08 | 1998-10-08 | 1999-04-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-04-08 | 2002-10-08 | 2003-04-09 | $7700.00 | Window Closed / Lapsed |