US5004307A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Near field and solid immersion optical microscope
Assignee: Leland Stanford Junior University
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Filing: 1990-04-12
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Granted: 1991-04-02
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Expires: 2010-04-12
Abstract
Abstract An optical microscope which includes a high refractive index solid immersion lens interposed between the objective lens and the object being viewed to provide a microscope having resolution which is far better than the Rayleigh diffraction limit in air.
Inventors
- 👤 Gordon S. Kino
- 👤 Scott M. Mansfield
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 23:24
CPC Classifications
G; G01; G01Q; G01Q60/00; G01Q60/18; G01Q60/22; B; B82; B82Y; B82Y20/00; B82Y35/00; G02; G02B; G02B1/00; G02B1/02; G02B21/00; G02B21/02; G02B21/33
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
86 words
In an optical microscope including an objective lens closely spaced to an object to be viewed, the improvement comprising a high refractive index solid immersion lens having a spherical surface facing said objective lens and a flat front surface spaced from the spherical surface and passing through the geometrical center of the spherical surface disposed between the objective lens and the object being viewed to increase the resolution of the microscope by the factor 1/n where n is the refractive index of the solid immersion lens.
Claim 2
Dependent Claim
86 words
In an optical microscope including an objective lens closely spaced to an object to be viewed, the improvement comprising a high refractive index solid immersion lens having a spherical surface facing said objective lens and a flat front surface spaced from the spherical surface and passing through the geometrical center of the spherical surface disposed between the objective lens and the object being viewed to increase the resolution of the microscope by the factor 1/n where n is the refractive index of the solid immersion lens.
Claim 3
Dependent Claim
24 words
An optical microscope as in claim 1 wherein the refractive index of the solid immersion lens substantially matches that of the object being viewed.
Claim 4
Dependent Claim
20 words
An optical microscope as in claim 1 in which the solid immersion lens is silicon and the object is silicon.
Claim 5
Dependent Claim
30 words
An optical microscope as in claim 1 including means for mounting the solid immersion lens for yieldable vertical movement to protect the lens and object if they come into contact.
Claim 6
Dependent Claim
16 words
An optical microscope as in claim 1 wherein said optical microscope is a scanning optical microscope.
Claim 7
Dependent Claim
19 words
An optical microscope as in claim 1 in which the microscope is a near field real-time scanning optical microscope.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-04-01 | 1994-10-01 | 1995-04-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-04-01 | 1998-10-01 | 1999-04-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-04-01 | 2002-10-01 | 2003-04-02 | $7700.00 | Window Closed / Lapsed |