US4998664A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Bond signature analyzer
Assignee: PALOMAR TECHNOLOGIES Inc
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Filing: 1989-12-22
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Granted: 1991-03-12
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Expires: 2009-12-22
Abstract
Abstract A feedback signal of an ultrasonic generator (13) employed in a ball bonder (11) is sampled by an analog-to-digital converter (23) under control of a microprocessor (25) to provide a "bond signature" indicative of bond quality. The microprocessor (25) then compares the bond signature to limits representing a good quality bond to provide an indication of a good or failed bond. The indication may be visually provided by projecting the bond signature and limits on a display (27), as well as automatically provided by a programmed comparison.
Inventors
- 👤 Owen E. Gibson
- 👤 William J. Gleeson
- 👤 Larry D. Burkholder
- 👤 Bradley K. Benton
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 08:38
CPC Classifications
B; B23; B23K; B23K20/00; B23K20/002; B23K20/004; B23K20/005; B23K20/007; B23K20/10; B23K31/00; B23K31/12; B23K31/125; H; H10; H10W; H10W72/00; H10W72/071; H10W72/0711; H10W72/07141; H10W72/075; H10W72/07521; H10W72/07531; H10W72/07532; H10W72/07533; H10W72/50; H10W72/531; H10W72/536; H10W72/551; H10W72/552; H10W72/5522
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
277 words
For use with apparatus for forming wirebonds at selected bond sites wherein power is applied to the bond sites during formation of said wirebonds, the improvement comprising: means for deriving an analog signal representative of the power coupled to the bond site; and means for sampling said analog signal and determining bond quality from the sampled signal, said sampling means comprising analog-to-digital converter means responsive to a first control signal for sampling said analog signal at a frequency selected by a second control signal to generate a series of digital samples; and digital processor means for supplying said first and second control signals and for receiving and storing said samples; wherein said apparatus forms a ball bond and wherein said digital processor means includes means for generating a first toggle signal indicative of the beginning of formation of said ball bond, and wherein said analog-to-digital converter means is responsive to said first toggle signal to sample said analog signal during formation of said ball bond; wherein said apparatus forms a second bond after formation of said ball bond, wherein said digital processor means generates a second toggle signal indicative of the beginning of formation of said second bond, and wherein said analog-to-digital converter means is responsive to said second toggle signal to sample said analog signal during formation of said second bond; and wherein said apparatus forms a tail and wherein said digital processor means includes means for generating a third toggle signal indicative of the beginning of formation of said tail, and wherein said analog-to-digital converter means is responsive to said third toggle signal to sample said analog signal during formation and tear of said tail.
Claim 2
Dependent Claim
277 words
For use with apparatus for forming wirebonds at selected bond sites wherein power is applied to the bond sites during formation of said wirebonds, the improvement comprising: means for deriving an analog signal representative of the power coupled to the bond site; and means for sampling said analog signal and determining bond quality from the sampled signal, said sampling means comprising analog-to-digital converter means responsive to a first control signal for sampling said analog signal at a frequency selected by a second control signal to generate a series of digital samples; and digital processor means for supplying said first and second control signals and for receiving and storing said samples; wherein said apparatus forms a ball bond and wherein said digital processor means includes means for generating a first toggle signal indicative of the beginning of formation of said ball bond, and wherein said analog-to-digital converter means is responsive to said first toggle signal to sample said analog signal during formation of said ball bond; wherein said apparatus forms a second bond after formation of said ball bond, wherein said digital processor means generates a second toggle signal indicative of the beginning of formation of said second bond, and wherein said analog-to-digital converter means is responsive to said second toggle signal to sample said analog signal during formation of said second bond; and wherein said apparatus forms a tail and wherein said digital processor means includes means for generating a third toggle signal indicative of the beginning of formation of said tail, and wherein said analog-to-digital converter means is responsive to said third toggle signal to sample said analog signal during formation and tear of said tail.
Claim 3
Dependent Claim
42 words
The apparatus of claim 1 wherein said digital processor means is responsive to said first, second, and third toggle signals to control the number of samples taken and the frequency of sampling during said ball formation, stitch formation, and tail formation, respectively.
Claim 4
Dependent Claim
27 words
The apparatus of claim 2 wherein said digital processor means includes display means and means for displaying said samples and a limit curve on said display means.
Claim 5
Dependent Claim
29 words
The apparatus of claim 3 wherein said digital processor means automatically compares said samples to said limit curve and provides an indication of pass or fail to a user.
Claim 6
Dependent Claim
12 words
The apparatus of claim 4 wherein said limit curve is heuristically determined.
Claim 7
Dependent Claim
15 words
The apparatus of claim 4 wherein said digital processing means automatically determines said limit curve.
Claim 8
Dependent Claim
32 words
The apparatus of claim 4 wherein pass or fail is determined by said processor means according to a failure mode definition comprising a number of failed point clusters in a selected window.
Claim 9
Dependent Claim
82 words
A wirebonder comprising: a bonding tool; an ultrasonic generator employing a feedback loop to control the application of ultrasonic energy to the bonding tool and wherein said feedback loop generates a DC feedback correction signal which is indicative of the changes in feedback required to stabilize the ultrasonic energy used to vibrate the bonding tool during the bonding process; means for sampling said DC feedback correction signal to produce a plurality of samples; and means for determining bond quality from said samples.
Claim 10
Dependent Claim
82 words
A wirebonder comprising: a bonding tool; an ultrasonic generator employing a feedback loop to control the application of ultrasonic energy to the bonding tool and wherein said feedback loop generates a DC feedback correction signal which is indicative of the changes in feedback required to stabilize the ultrasonic energy used to vibrate the bonding tool during the bonding process; means for sampling said DC feedback correction signal to produce a plurality of samples; and means for determining bond quality from said samples.
Claim 11
Dependent Claim
90 words
The wirebonder of claim 8 wherein said bonding tool forms a ball bond and said sampling means generates a first toggle signal indicative of the beginning of formation of said ball bond; wherein said bonding tool forms a second bond after formation of said ball bond and said sampling means generates a second toggle signal indicative of the beginning of formation of said second bond; and wherein said bonding tool forms a tail and said sampling means generates a third toggle signal indicative of formation and tear of said tail.
Claim 12
Dependent Claim
36 words
The improvement of claim 8 wherein said means for determining comprises: a display means; and digital processor means for controlling said sampling, for storing said samples, and for causing said display means to display said samples.
Claim 13
Dependent Claim
27 words
The improvement of claim 10 wherein said digital processor means is further operative to display at least one limit curve in conjunction with display of said samples.
Claim 14
Independent Claim
98 words
A method of determining quality of bonds made by a bonder employing coupling of power to a bond site, comprising the steps of: providing an ultrasonic generator employing a feedback loop to control the application of ultrasonic energy to a bonding tool; generating a DC correction signal, said DC correction signal being generated by said feedback loop which signal is indicative of the changes in feedback required to stabilize the ultrasonic energy used to vibrate a bonding tool during the bonding process; sampling said DC correction signal; storing said samples; and analyzing said samples to determine bond quality.
Claim 15
Independent Claim
98 words
A method of determining quality of bonds made by a bonder employing coupling of power to a bond site, comprising the steps of: providing an ultrasonic generator employing a feedback loop to control the application of ultrasonic energy to a bonding tool; generating a DC correction signal, said DC correction signal being generated by said feedback loop which signal is indicative of the changes in feedback required to stabilize the ultrasonic energy used to vibrate a bonding tool during the bonding process; sampling said DC correction signal; storing said samples; and analyzing said samples to determine bond quality.
Claim 16
Dependent Claim
70 words
The method of claim 12 wherein the bonder forms a ball bond followed by a second bond and a tail and said sampling step includes generating a first toggle signal indicative of the beginning of formation of a ball bond, a second toggle signal indicative of formation of a second bond after formation of the ball bond, and a third toggle signal indicative of formation and tear of a tail.
Claim 17
Dependent Claim
18 words
The method of claim 12 wherein said step of analyzing comprises comparing said samples to a limit function.
Claim 18
Dependent Claim
14 words
The method of claim 14 wherein said limit function comprises a heuristically determined curve.
Claim 19
Dependent Claim
25 words
The method of claim 14 wherein said step of analyzing further includes the step of automatically generating said limit function using a digital processor means.
Claim 20
Dependent Claim
17 words
The method of claim 16 wherein said step of comparing is performed by said digital processor means.
Claim 21
Dependent Claim
25 words
The method of claim 12 wherein said power coupled to the bond site includes power generated through application of ultrasonic energy to the bond site.
Claim 22
Dependent Claim
17 words
The method of claim 18 wherein said signal comprises a feedback signal produced in an ultrasonic generator.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-03-11 | 1994-09-10 | 1995-03-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-03-11 | 1998-09-10 | 1999-03-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-03-11 | 2002-09-10 | 2003-03-12 | $7700.00 | Window Closed / Lapsed |