US4998134A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Exposure apparatus
Assignee: Canon Inc
•
Filing: 1989-07-21
•
Granted: 1991-03-05
•
Expires: 2009-07-21
Abstract
Abstract An apparatus for photolithographically transferring, onto a plate-like member a pattern corresponding to picture elements of a liquid crystal display device and a pattern corresponding to driving circuits and so on, by use of a photomask. The surface of the plate-like member is divided into different areas and, each time one of the different areas of the plate-like member is subjected to the pattern transfer operation, the plate-like member is fed stepwise relative to an optical system provided to project an image of the photomask onto the plate-like member. At the same time, the range of the photomask pattern which is to be transferred onto the plate-like member is changed. By this, a portion of the picture-element pattern and a portion of the circuit pattern are transferred onto each of the different areas on the plate-like member, whereby a large-size pattern contributable to form a large-size display picture plane and a pattern contributable to form a control circuit for controlling the picture plane are transferred on the plate-like member.
Inventors
- 👤 Junji Isohata
- 👤 Koichi Matsushita
- 👤 Hironori Yamamoto
- 👤 Makoto Miyazaki
- 👤 Kunitaka Ozawa
- 👤 Hideki Yoshinari
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 19:36
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70058; G03F7/70066; G03F7/70216; G03F7/70358; G03F7/70425; G03F7/70475; G03F7/70691; H; H10; H10P; H10P95/00; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/136; G02F1/1362; G02F1/13625
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
184 words
A method of exposure in the manufacture of a panel display device, comprising the steps of: preparing a first mask pattern for forming display elements and a second mask pattern for forming an element able to actuate the display elements; placing a workpiece having a surface on a movable table; variably defining a zone for irradiation of the first and second mask patterns by using movable masking blades, and allowing the first and second mask patterns to be selectively transferred to the workpiece surface; moving the movable table so that different portions of the workpiece surface are brought to and positioned at a predetermined exposure station in a predetermined sequence; and supplying radiation energy to the variably defined zone so that the first and second mask patterns are selectively transferred to the workpiece surface; and interrelating the variable defining of the zone with the moving of the movable table so that plural first mask patterns are printed on a first region of the workpiece surface while plural second mask patterns are printed on a second region of the workpiece surface outside the first region.
Claim 2
Independent Claim
184 words
A method of exposure in the manufacture of a panel display device, comprising the steps of: preparing a first mask pattern for forming display elements and a second mask pattern for forming an element able to actuate the display elements; placing a workpiece having a surface on a movable table; variably defining a zone for irradiation of the first and second mask patterns by using movable masking blades, and allowing the first and second mask patterns to be selectively transferred to the workpiece surface; moving the movable table so that different portions of the workpiece surface are brought to and positioned at a predetermined exposure station in a predetermined sequence; and supplying radiation energy to the variably defined zone so that the first and second mask patterns are selectively transferred to the workpiece surface; and interrelating the variable defining of the zone with the moving of the movable table so that plural first mask patterns are printed on a first region of the workpiece surface while plural second mask patterns are printed on a second region of the workpiece surface outside the first region.
Claim 3
Dependent Claim
22 words
A method according to claim 1, wherein said first mask pattern preparing provides a liquid crystal display plane on the workpiece surface.
Claim 4
Dependent Claim
18 words
A method according to claim 1, further comprising contiguously printing the first mask patterns in the first region.
Claim 5
Independent Claim
126 words
A method of exposure in the manufacture of a panel display device, for exposing different portions of a workpiece with radiation in a predetermined sequence, said method comprising the steps of: preparing a first mask pattern for forming display elements on the workpiece and a second mask pattern providing an element on the workpiece able to actuate the display elements; placing the workpiece on a stage; positioning one portion of the workpiece at an exposure station having an exposure range variably defined by a plurality of masking blades; and controlling the stage and the masking blades so that plural first mask patterns are printed in a first region of the workpiece while plural second mask patterns are printed in a second region outside the first region.
Claim 6
Independent Claim
126 words
A method of exposure in the manufacture of a panel display device, for exposing different portions of a workpiece with radiation in a predetermined sequence, said method comprising the steps of: preparing a first mask pattern for forming display elements on the workpiece and a second mask pattern providing an element on the workpiece able to actuate the display elements; placing the workpiece on a stage; positioning one portion of the workpiece at an exposure station having an exposure range variably defined by a plurality of masking blades; and controlling the stage and the masking blades so that plural first mask patterns are printed in a first region of the workpiece while plural second mask patterns are printed in a second region outside the first region.
Claim 7
Dependent Claim
22 words
A method according to claim 4, wherein said first mask pattern preparing provides a liquid crystal display plane on the workpiece surface.
Claim 8
Dependent Claim
18 words
A method according to claim 4, further comprising contiguously printing the first mask patterns in the first region.
Claim 9
Dependent Claim
93 words
An exposure apparatus, comprising: stage means for supporting a workpiece; a plurality of masking members arranged to variably define an exposure range in relation to a first mask pattern providing display elements and a second mask pattern providing an element able to actuate the display elements; and means for controlling said stage means and said masking members so that plural first mask patterns are printed in a first region of the workpiece while plural second mask patterns are printed in a second region of the workpiece outside the first region of the workpiece.
Claim 10
Dependent Claim
93 words
An exposure apparatus, comprising: stage means for supporting a workpiece; a plurality of masking members arranged to variably define an exposure range in relation to a first mask pattern providing display elements and a second mask pattern providing an element able to actuate the display elements; and means for controlling said stage means and said masking members so that plural first mask patterns are printed in a first region of the workpiece while plural second mask patterns are printed in a second region of the workpiece outside the first region of the workpiece.
Claim 11
Dependent Claim
20 words
An apparatus according to claim 7, further comprising means for contiguously printing the first mask patterns in the first region.
References Cited (Backward Citations)
US3716296A
Cited
US4068948A
Cited
US4128331A
Cited
JPS54134565A
Cited
JPS57183032A
Cited
US4530587A
Cited
JPS60120A
Cited
US4589769A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-03-04 | 1994-09-03 | 1995-03-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-03-04 | 1998-09-03 | 1999-03-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-03-04 | 2002-09-03 | 2003-03-05 | $7700.00 | Window Closed / Lapsed |