US4990859A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process and apparatus for determining the impedance of the discharge in a plasma reactor system comprising a tuning box and application to the regulation of the impedance or the ionic current in such reactor
Assignee: Commissariat à l'Énergie Atomique et Aux Énergies Alternatives
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Filing: 1989-06-23
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Granted: 1991-02-05
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Expires: 2009-06-23
Abstract
Abstract A method and apparatus for determining the impedance of the discharge in a plasma reactor system comprising a tuning box having variable capacitors is described. The impedance of the discharge is determined in dependence on a pre-established relationship between the operational positions of the variable capacitors on the one hand and the impedance of the discharge on the other. The ionic current relative to the discharge in the reactor also may be determined by taking into account the high frequency voltage of the reactor.
Inventors
- 👤 Bernard Bouyer
- 👤 Bernard Andries
- 👤 Guillaume Ravel
- 👤 Louise Peccoud
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 01:41
CPC Classifications
G; G01; G01R; G01R27/00; G01R27/28; G01R27/32; G01R27/02; G01R27/22
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
84 words
A method for determining the impedance of the discharge in a high frequency plasma reactor system comprising a tuning box having variable capacitors, the method comprising the steps of: (1) establishing a relationship between the operational positions of the variable capacitors on the one hand and the impedance of the discharge on the other; (2) determining the respective positions of the variable capacitors; and (3) determining the impedance of the discharge in dependence on these respective positions and by means of the established relationship.
Claim 2
Independent Claim
84 words
A method for determining the impedance of the discharge in a high frequency plasma reactor system comprising a tuning box having variable capacitors, the method comprising the steps of: (1) establishing a relationship between the operational positions of the variable capacitors on the one hand and the impedance of the discharge on the other; (2) determining the respective positions of the variable capacitors; and (3) determining the impedance of the discharge in dependence on these respective positions and by means of the established relationship.
Claim 3
Dependent Claim
45 words
A method according to claim 1, and including determining the ionic current relative to the discharge in the reactor in dependence on the high frequency voltage applied between the terminals of the reactor, the respective positions of the variable capacitors and the said established relationship.
Claim 4
Independent Claim
91 words
An apparatus for determining the impedance of the discharge in a high frequency plasma reactor system comprising a tuning box having variable capacitors, the apparatus comprising: pickups for supplying signals representing the respective operational positions of the variable capacitors, and electronic processing means for controlling the impedance of the discharge of the signals supplied by the pickups and a pre-established relationship between the operational positions of the variable capacitors on the one hand and the impedance of the discharge on the other, such relationship being stored in the electronic processing means.
Claim 5
Independent Claim
91 words
An apparatus for determining the impedance of the discharge in a high frequency plasma reactor system comprising a tuning box having variable capacitors, the apparatus comprising: pickups for supplying signals representing the respective operational positions of the variable capacitors, and electronic processing means for controlling the impedance of the discharge of the signals supplied by the pickups and a pre-established relationship between the operational positions of the variable capacitors on the one hand and the impedance of the discharge on the other, such relationship being stored in the electronic processing means.
Claim 6
Independent Claim
109 words
An apparatus for determining the impedance of the discharge in a high frequency plasma reactor system comprising a tuning box having variable capacitors, the apparatus comprising: pickups for supplying signals representing the respective operational positions of the variable capacitors, and electronic processing means for determining the ionic current relative to the discharge in the reactor by means of the high frequency voltage applied between the terminals of the reactor, the signals supplied by the pickups, and a pre-established relationship between the operational positions of the variable capacitors on the one hand and the impedance of the discharge on the other, such relationship being stored in the electronic processing means.
Claim 7
Independent Claim
109 words
An apparatus for determining the impedance of the discharge in a high frequency plasma reactor system comprising a tuning box having variable capacitors, the apparatus comprising: pickups for supplying signals representing the respective operational positions of the variable capacitors, and electronic processing means for determining the ionic current relative to the discharge in the reactor by means of the high frequency voltage applied between the terminals of the reactor, the signals supplied by the pickups, and a pre-established relationship between the operational positions of the variable capacitors on the one hand and the impedance of the discharge on the other, such relationship being stored in the electronic processing means.
Claim 8
Independent Claim
180 words
A system for regulating the impedance of the discharge of the ionic current in a high frequency plasma reactor supplied by a high frequency generator via a tuning box having automatic tuning means, the tuning box comprising variable capacitors for adapting the output impedance of the generator to the input impedance of the reactor, the automatic tuning means being adapted to adjust the positions of the variable capacitors of the tuning box so as to cancel out the power reflected towards the generator, the system comprising pickups for supplying signals representing the respective positions of the variable capacitors, and electronic processing means for controlling the impedance of the discharge by means of the signals supplied by the pickups and a pre-established relationship between the operational positions of the variable capacitors on the one hand and the impedance of the discharge on the other, such relationship being stored in the electronic processing means and being adapted to control the power of the generator such that the impedance of the discharge or the ionic current is maintained equal to a desired value.
Claim 9
Independent Claim
180 words
A system for regulating the impedance of the discharge of the ionic current in a high frequency plasma reactor supplied by a high frequency generator via a tuning box having automatic tuning means, the tuning box comprising variable capacitors for adapting the output impedance of the generator to the input impedance of the reactor, the automatic tuning means being adapted to adjust the positions of the variable capacitors of the tuning box so as to cancel out the power reflected towards the generator, the system comprising pickups for supplying signals representing the respective positions of the variable capacitors, and electronic processing means for controlling the impedance of the discharge by means of the signals supplied by the pickups and a pre-established relationship between the operational positions of the variable capacitors on the one hand and the impedance of the discharge on the other, such relationship being stored in the electronic processing means and being adapted to control the power of the generator such that the impedance of the discharge or the ionic current is maintained equal to a desired value.
Claim 10
Dependent Claim
50 words
A system according to claim 5, wherein the capacitors each comprise a moveable part and a fixed part, the automatic tuning means comprise motors for turning the parts of said capacitors relative to one another, and the pickups are of the potentiometric kind mounted on the shafts of the motors.
References Cited (Backward Citations)
CA735073A
Cited
US3569777A
Cited
DE2422808A1
Cited
US4207137A
Cited
EP0064413A1
Cited
JPS61176862A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-02-04 | 1994-08-06 | 1995-02-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-02-04 | 1998-08-06 | 1999-02-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-02-04 | 2002-08-06 | 2003-02-05 | $7700.00 | Window Closed / Lapsed |