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US4989059A Expired / Lapsed US ⏱️ 0.0 years remaining

Solar cell with trench through pn junction

Assignee: Schott Solar CSP Inc
•
Filing: 1989-06-30
•
Granted: 1991-01-29
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Expires: 2009-06-30
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Abstract

Abstract A solar cell fabrication procedure is described in which a trench is cut in the substrate so as to electrically isolate front and back regions of a flat solar cell. The trench is preferably cut around the perimeter of the rear side of the cell. The trench is preferably formed by an excimer laser which may be used to ablate a trench without diffusing conductive material deeper into the cell.

Inventors

  • 👤 Ronald H. Micheels
  • 👤 Percy Valdivia
  • 👤 Jack I. Hanoka

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-04 04:59
CPC Classifications
H; H10; H10F; H10F10/00; H10F10/10; H10F10/14; H10F71/00; H10F71/121; H10P; H10P34/00; H10P34/40; H10P34/42; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y02E10/546; Y02E10/547; Y02P; Y02P70/00; Y02P70/50; Y10; Y10S; Y10S438/00; Y10S438/94

Claims Analysis

Total Claims: 14
Claim 1
Independent Claim 80 words
A solid state semiconductor device formed by a method comprising the steps of: (a) providing a silicon substrate having a front surface, a rear surface, and opposite side edge surfaces, and a preformed PN junction adjacent all of said surfaces; and (b) using an excimer laser to ablate a trench through said PN junction along one of said front and rear surfaces so as to electrically isolate the junction at said front surface from the junction at said rear surface.
Claim 2
Dependent Claim 80 words
A solid state semiconductor device formed by a method comprising the steps of: (a) providing a silicon substrate having a front surface, a rear surface, and opposite side edge surfaces, and a preformed PN junction adjacent all of said surfaces; and (b) using an excimer laser to ablate a trench through said PN junction along one of said front and rear surfaces so as to electrically isolate the junction at said front surface from the junction at said rear surface.
Claim 3
Dependent Claim 18 words
The device of claim 1 in which said trench is ablated along the perimeter of said front surface.
Claim 4
Dependent Claim 18 words
The device of claim 1 in which said trench is ablated along the perimeter of said back surface.
Claim 5
Dependent Claim 16 words
The device of claim 1 in which said solid state semiconductor device is a photovoltaic cell.
Claim 6
Dependent Claim 24 words
The device of claim 1 in which said trench is formed using a laser with a wavelength between about 193 and about 351 nm.
Claim 7
Dependent Claim 14 words
The device of claim 1 in which said trench is approximately 10-25 microns deep.
Claim 8
Dependent Claim 20 words
The device of claim 1 in which said substrate further includes ohmic contacts formed on said front and back surfaces.
Claim 9
Dependent Claim 20 words
The device of claim 7 in which said substrate further includes a conductive metal coating one of said ohmic contacts.
Claim 10
Dependent Claim 34 words
The device of claim 7 in which said ohmic contact formed on the back surface is aluminum and said trench is ablated in said rear surface in an area not covered by said aluminum.
Claim 11
Dependent Claim 20 words
The device of claim 1 in which said laser is an excimer laser having a wavelength of approximately 248 nm.
Claim 12
Dependent Claim 83 words
The device of claim 1 in which step (b) further comprises: ablating a trench along one side edge of said substrate; rotating said substrate 90 degrees to expose a new side edge of said substrate; ablating a trench along said new side edge; and repeating said rotating and ablating steps so as to ablate a trench along each other side edge of said substrate, whereby to electrically isolate the back surface region of said substrate from the remaining surface region of said substrate.
Claim 13
Dependent Claim 22 words
The device of claim 11 in which said substrate is translated to permit multiple trench-forming steps along each side of said substrate.
Claim 14
Dependent Claim 20 words
The device of claim 1 in which said laser is an excimer laser having a wavelength of approximately 308 nm.

References Cited (Backward Citations)

US3411952A Cited
US4046594A Cited
US4095329A Cited
US4128732A Cited
US4335503A Cited
US4608451A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1994-01-28 1994-07-30 1995-01-29 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1998-01-28 1998-07-30 1999-01-29 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2002-01-28 2002-07-30 2003-01-29 $7700.00 Window Closed / Lapsed

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