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US4987044A Expired / Lapsed US ⏱️ 0.0 years remaining

Method and apparatus for maintaining desired exposure levels

Assignee: DSM IP Assets BV
•
Filing: 1989-05-31
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Granted: 1991-01-22
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Expires: 2009-05-31
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Abstract

Abstract A radiation beam used for selectively exposing a surface is moved in a helical path by means of two oscillating mirrors vibrating about axes that are mutually perpendicular. By maintaining a constant product for oscillating frequency and rotational oscillatory mirror deflection, the level of exposure can be made substantially constant.

Inventors

  • 👤 Eustathios Vassiliou

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-26 14:55
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70416; G03F7/0037; Y; Y10; Y10S; Y10S430/00; Y10S430/146; Y10S430/148; Y10S430/156; Y10S430/16

Claims Analysis

Total Claims: 16
Claim 1
Independent Claim 231 words
A method for subjecting predetermined portions of a surface to desired exposure levels with a beam of radiation, comprising the steps of: deflecting said beam towards said surface through a set of a first mirror and a second mirror, the first mirror having a first rotational axis, the second mirror having a second rotational axis; oscillating said first mirror about said first axis at a desired frequency and effective amplitude with a substantially sinusoidal motion, and oscillating said second mirror about said second axis with a substantially sinusoidal motion at substantially said desired frequency and effective amplitude as employed for said first mirror, so that both mirrors are characterized by a common frequency value and a common effective amplitude value; maintaining a substantially 90 degree phase difference between the sinusoidal motion of the first mirror and the sinusoidal motion of the second mirror; tracing said surface with said beam in a spiral path by changing gradually and simultaneously the common value of the effective amplitude and the common value of the frequency inversely, so that the product of the two values is controlled so as to yield a desired exposure level on the traced surface when the beam is on; and turning the beam off and on at predetermined angular positions in order to subject said predetermined portions of said surface located within the prearranged positions to a desired exposure level.
Claim 2
Independent Claim 231 words
A method for subjecting predetermined portions of a surface to desired exposure levels with a beam of radiation, comprising the steps of: deflecting said beam towards said surface through a set of a first mirror and a second mirror, the first mirror having a first rotational axis, the second mirror having a second rotational axis; oscillating said first mirror about said first axis at a desired frequency and effective amplitude with a substantially sinusoidal motion, and oscillating said second mirror about said second axis with a substantially sinusoidal motion at substantially said desired frequency and effective amplitude as employed for said first mirror, so that both mirrors are characterized by a common frequency value and a common effective amplitude value; maintaining a substantially 90 degree phase difference between the sinusoidal motion of the first mirror and the sinusoidal motion of the second mirror; tracing said surface with said beam in a spiral path by changing gradually and simultaneously the common value of the effective amplitude and the common value of the frequency inversely, so that the product of the two values is controlled so as to yield a desired exposure level on the traced surface when the beam is on; and turning the beam off and on at predetermined angular positions in order to subject said predetermined portions of said surface located within the prearranged positions to a desired exposure level.
Claim 3
Dependent Claim 14 words
The method of claim 1 wherein said desired exposure is a constant exposure level.
Claim 4
Dependent Claim 15 words
The method of claim 1 wherein said first axis is perpendicular to said second axis.
Claim 5
Dependent Claim 29 words
The method of claim 1, wherein the product of the common value of frequency and the common value of effective amplitude is kept constant for maintaining substantially constant exposure.
Claim 6
Dependent Claim 21 words
The method of claim 4, wherein an additional step of common effective amplitude correction is superimposed for maintaining substantially constant exposure.
Claim 7
Dependent Claim 19 words
The method of claim 5, wherein a step of common frequency correction is superimposed for maintaining substantially constant exposure.
Claim 8
Dependent Claim 14 words
The method of claim 1, wherein the beam of radiation is a laser beam.
Claim 9
Dependent Claim 12 words
The method of claim 1, wherein the surface comprises a photographic constituent.
Claim 10
Dependent Claim 13 words
The method of claim 1, wherein the surface comprises a liquid crystal constituent.
Claim 11
Dependent Claim 12 words
The method of claim 1, wherein the surface comprises a xerographic constituent.
Claim 12
Dependent Claim 12 words
The method of claim 1, wherein the surface comprises a magnetic constituent.
Claim 13
Dependent Claim 12 words
The method of claim 1, wherein the surface comprises an ablating constituent.
Claim 14
Dependent Claim 12 words
The method of claim 1, wherein the surface comprises a deforming constituent.
Claim 15
Dependent Claim 12 words
The method of claim 1, wherein the surface comprises a photopolymer constituent.
Claim 16
Dependent Claim 110 words
The method of claim 1, wherein the surface is a photocurable composition, and further comprising the following steps in order to fabricate an integral three dimensional object from successive layers of the photocurable composition; (a) forming a layer of the photocurable composition; (b) photocuring at least a portion of the layer of the photocurable composition by exposure to the radiation beam; (c) introducing a new layer of photocurable composition on the layer previously exposed to the radiation beam; (d) photocuring at least a portion of the new layer by exposure to the radiation beam; and (e) repeating steps (c) and (d) until a desired integral three dimensional object is fabricated.

References Cited (Backward Citations)

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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1994-01-21 1994-07-23 1995-01-22 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1998-01-21 1998-07-23 1999-01-22 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2002-01-21 2002-07-23 2003-01-22 $7700.00 Window Closed / Lapsed

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