US4987004A
Expired / Lapsed
US
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Plasma processing method and apparatus
Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 1990-05-11
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Granted: 1991-01-22
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Expires: 2010-05-11
Abstract
Abstract A plasma process and an apparatus therefor are described. A number of substrates are disposed between a pair of electrodes, to which a high frequency electric power is applied in order to generate glow discharge and induce a plasma. The substrates in the plasma are applied with an alternating electric field. By virtue of the alternating electric field, the substrates are subjected to sputtering action.
Inventors
- 👤 Shunpei Yamazaki
- 👤 Mitsunori Tsuchiya
- 👤 Atsushi Kawano
- 👤 Shinji Imatou
- 👤 Kazuhisa Nakashita
- 👤 Toshiji Hamatani
- 👤 Takashi Inushima
- 👤 Kenji Itou
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 01:05
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32082; C; C23; C23C; C23C16/00; C23C16/44; C23C16/50; C23C16/517; H01J37/32137; H01J37/32155; H01J37/32165; H01J37/32431; H01J37/32532; H01J37/32568; H01J37/34; H01J2237/00; H01J2237/32; H01J2237/33; H01J2237/332; H01J2237/3321
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
136 words
A plasma processing method comprising: disposing in a reaction space a plurality of printing drums where each drum has a photosensitive coating disposed thereon; supplying a reactive gas comprising carbon into said reaction space wherein said reaction space is defined between a pair of electrodes where a first high frequency power source is connected to the first of said pair of electrodes and a second high frequency power source is connected to the second of said pair of electrodes and where the first high frequency power source is phase shifted with respect to the second high frequency power source; inducing a plasma of the reactive gas in said reaction space by actuating said first and second high frequency power sources; and forming a carbon containing coating on each of the photosensitive coatings of the printing drums.
Claim 2
Dependent Claim
136 words
A plasma processing method comprising: disposing in a reaction space a plurality of printing drums where each drum has a photosensitive coating disposed thereon; supplying a reactive gas comprising carbon into said reaction space wherein said reaction space is defined between a pair of electrodes where a first high frequency power source is connected to the first of said pair of electrodes and a second high frequency power source is connected to the second of said pair of electrodes and where the first high frequency power source is phase shifted with respect to the second high frequency power source; inducing a plasma of the reactive gas in said reaction space by actuating said first and second high frequency power sources; and forming a carbon containing coating on each of the photosensitive coatings of the printing drums.
Claim 3
Dependent Claim
16 words
A method as in claim 1 where each of said photosensitive coatings comprises an organic photoconductor.
Claim 4
Dependent Claim
17 words
A method as in claim 2 where said carbon containing coating is a diamond like carbon coating.
Claim 5
Dependent Claim
20 words
A method as in claim 3 where the thickness of the diamond like carbon coating is 0.1 to 3.0 microns.
Claim 6
Dependent Claim
30 words
The method of claim 1 wherein the differential phase between the first and second high frequency power sources is in a range of -30° to ±30° or 150° to 210°.
Claim 7
Dependent Claim
45 words
The method as in claim 1 including applying an alternating electric power, whose frequency is lower than that of said first and second high frequency power sources, to said printing drums during the plasma state reaction in order to facilitate sputtering action on said drums.
Claim 8
Dependent Claim
30 words
The method of claim 6 wherein the frequency of at least one of said first and second high frequency power sources is in the range of 1 to 50 MHz.
Claim 9
Dependent Claim
19 words
The method of claim 7 wherein said alternating power is selected in a range of 1 to 500 KHz.
Claim 10
Dependent Claim
12 words
The method of claim 1 wherein said printing drums are negatively biased.
Claim 11
Dependent Claim
11 words
The method of claim 1 wherein said electrodes are mesh electrodes.
Claim 12
Dependent Claim
128 words
A plasma processing apparatus comprising: a reaction chamber; a gas feeding system for introducing a reactive gas comprising carbon into said reaction chamber; a vacuum pump for evacuating said reaction chamber and maintaining a predetermined gas pressure in said reaction chamber; a pair of electrodes between which a plasma generating space is defined; at least one substrate holder for supporting in said plasma generating space a plurality of drums where each drum has a photosensitive coating disposed thereon so that a carbon containing coating is formed on each photosensitive coating; first and second high frequency power sources respectively connected to said pair of electrodes; and phase shifting means for shifting the phase of the first high frequency power source with respect to the second high frequency power source.
Claim 13
Dependent Claim
128 words
A plasma processing apparatus comprising: a reaction chamber; a gas feeding system for introducing a reactive gas comprising carbon into said reaction chamber; a vacuum pump for evacuating said reaction chamber and maintaining a predetermined gas pressure in said reaction chamber; a pair of electrodes between which a plasma generating space is defined; at least one substrate holder for supporting in said plasma generating space a plurality of drums where each drum has a photosensitive coating disposed thereon so that a carbon containing coating is formed on each photosensitive coating; first and second high frequency power sources respectively connected to said pair of electrodes; and phase shifting means for shifting the phase of the first high frequency power source with respect to the second high frequency power source.
Claim 14
Dependent Claim
16 words
An apparatus as in claim 11 where each of said photosensitive coatings comprises an organic photoconductor.
Claim 15
Dependent Claim
17 words
An apparatus as in claim 12 where said carbon containing coating is a diamond like carbon coating.
Claim 16
Dependent Claim
20 words
An apparatus as in claim 13 where the thickness of the diamond like carbon coating is 0.1 to 3.0 microns.
Claim 17
Dependent Claim
31 words
An apparatus as in claim 12 wherein the differential phase between the first and second high frequency power sources is in a range of -30° to +30° or 150° to 210°.
Claim 18
Dependent Claim
48 words
An apparatus as in claim 11 including an alternating power supply for applying an alternating voltage to said printing drums, the frequency of the alternating voltage being chosen so that the printing drums are substantially subjected to sputtering action of the plasma generated in the plasma generating space.
References Cited (Backward Citations)
JPS61264355A
Cited
US4749636A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-01-21 | 1994-07-23 | 1995-01-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-01-21 | 1998-07-23 | 1999-01-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-01-21 | 2002-07-23 | 2003-01-22 | $7700.00 | Window Closed / Lapsed |