US4985739A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Low-leakage JFET
Assignee: Analog Devices Inc
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Filing: 1987-04-27
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Granted: 1991-01-15
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Expires: 2007-04-27
Abstract
Abstract A low-leakage-current JFET having electrically isolated top and bottom gates. The structure employs enclosed geometry wherein one source/drain region fully surrounds the other source/drain region. Connection to the top gate is made through a diffusion-barrier to prevent penetration of metallization into the top gate contact region. A non-penetrating contact layer is provided on the upper surface of the top gate so that the material of the contact layer does not enter the top gate region to any significant extent. Both the channel region and the shield layer are formed by ion-implantation.
Inventors
- 👤 Jerome F. Lapham
- 👤 Adrian P. Brokaw
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 14:30
CPC Classifications
H; H10; H10D; H10D62/00; H10D62/80; H10D62/83; H10D30/00; H10D30/80; H10D30/83; H10D64/00; H10D64/60; H10D64/62
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
230 words
A low-leakage-current JFET comprising: a semi-conductor body comprising a lightly doped layer of one conductivity type having a generally planar surface; a first source/drain region of a conductivity type opposite said one conductivity type in the surface of said body; a second source/drain region of a conductivity type opposite said one conductivity type and surrounding said first source/drain region; a channel region of conductivity type opposite said one conductivity type extending between said first and second source/drain regions at a shallow depth just below said surface; a shield layer of said one conductivity type above said channel region and serving as the top gate for said JFET; said lightly doped layer serving as the bottom gate of said JFET; said bottom gate layer being conductively isolated from said top gate; top gate contact means for said shield layer having an upper portion connectible to terminal means to convey electrical signals to said top gate; said top gate contact means comprising a nonpentrating contact layer over at least a portion of said top gate; said top gate contact means further comprising an interior contact segment in said top gate portion comprising additional impurity of said one conductivity type located wholly above the level of said channel region; said top gate contact means serving to avoid conductive electrical connection from said upper portion thereof through said channel region to said lightly-doped layer.
Claim 2
Dependent Claim
230 words
A low-leakage-current JFET comprising: a semi-conductor body comprising a lightly doped layer of one conductivity type having a generally planar surface; a first source/drain region of a conductivity type opposite said one conductivity type in the surface of said body; a second source/drain region of a conductivity type opposite said one conductivity type and surrounding said first source/drain region; a channel region of conductivity type opposite said one conductivity type extending between said first and second source/drain regions at a shallow depth just below said surface; a shield layer of said one conductivity type above said channel region and serving as the top gate for said JFET; said lightly doped layer serving as the bottom gate of said JFET; said bottom gate layer being conductively isolated from said top gate; top gate contact means for said shield layer having an upper portion connectible to terminal means to convey electrical signals to said top gate; said top gate contact means comprising a nonpentrating contact layer over at least a portion of said top gate; said top gate contact means further comprising an interior contact segment in said top gate portion comprising additional impurity of said one conductivity type located wholly above the level of said channel region; said top gate contact means serving to avoid conductive electrical connection from said upper portion thereof through said channel region to said lightly-doped layer.
Claim 3
Dependent Claim
17 words
A device as in claim 1, including back gate contact means establishing connection to said lightly-doped layer.
Claim 4
Dependent Claim
21 words
A device as in claim 2, wherein said top gate contact means includes a metal layer as said upper portion thereof.
Claim 5
Dependent Claim
15 words
A device as in claim 1, wherein said channel region and shield layer are ion-implanted.
Claim 6
Dependent Claim
15 words
A device as in claim 4, wherein said non-penetrating contact layer includes a silicide compound.
Claim 7
Dependent Claim
12 words
A device as in claim 5, wherein said contact layer comprises Platinum-Silicide.
Claim 8
Dependent Claim
15 words
A device as in claim 4, including a diffusion barrier over said non-penetrating contact layer.
Claim 9
Dependent Claim
12 words
A device as in claim 7, wherein said diffusion barrier comprises Titanium.
Claim 10
Dependent Claim
15 words
A device as in claim 8, wherein said diffusion barrier comprises an alloy including Tungsten.
Claim 11
Dependent Claim
14 words
A device as in claim 7, including a metallization layer over said diffusion barrier.
Claim 12
Dependent Claim
12 words
A device as in claim 10, wherein said metallization layer is Aluminum.
Claim 13
Dependent Claim
25 words
A device as in claim 1, comprising additional contact means for said source/drain regions, with all of said contact means including a non-penetrating contact layer.
Claim 14
Dependent Claim
36 words
A device as in claim 12, wherein all of said contact means further comprise a diffusion barrier and are identical, whereby the contact means for all connections can be formed simultaneously by the same processing steps.
References Cited (Backward Citations)
US4412238A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-01-14 | 1994-07-16 | 1995-01-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-01-14 | 1998-07-16 | 1999-01-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-01-14 | 2002-07-16 | 2003-01-15 | $7700.00 | Window Closed / Lapsed |