US4983249A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for producing semiconductive single crystal
Assignee: PRODUCTION ENGINEERING ASSOCIATION SHIN OSAKA CHIYODA BLDG 5F J-ROOM
•
Filing: 1989-03-09
•
Granted: 1991-01-08
•
Expires: 2009-03-09
Abstract
Abstract A n-type ZnSe thin layer is prepared by heating a ZnSe signal crystal substrate in a hydrogen atmosphere under a pressure of from 0.1 Torr. to 10 Torr. at a temperature of from 250° C. to 450° C. while supplying a gaseous organozinc compound, H 2 Se gas and a gaseous organoaluminum compound in such amounts that a molar ratio of Se/Zn is from 10 to 100 and a molar ratio of Al/Zn is from 0.02 to 0.07 to grow the aluminum-doped ZnSe thin film on the ZnSe single crystal substrate.
Inventors
- 👤 Tsunemasa Taguchi
- 👤 Hirokuni Nanba
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 05:06
CPC Classifications
H; H10; H10H; H10H20/00; H10H20/80; H10H20/81; H10H20/822; H10H20/823; H10H20/8232; C; C30; C30B; C30B25/00; C30B25/02; C30B25/18; C30B29/00; C30B29/10; C30B29/46; C30B29/48; H10H20/01; H10H20/011; H10H20/012; H10P; H10P14/00; H10P14/20; H10P14/24; H10P14/29; H10P14/2901; H10P14/2913; H10P14/2916; H10P14/34; H10P14/3402; H10P14/3424; H10P14/3431; H10P14/3438; H10P14/3441; H10P14/3442; Y; Y10; Y10S; Y10S117/00; Y10S117/901; Y10S117/902; Y10S117/906
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
215 words
A method for growing a ZnSe single crystal substrate comprising the steps of: a) placing a portion of a ZnSe polycrystal in a sealed reactor tube containing at least one gas selected from the group consisting of an inert gas, nitrogen and H 2 Se and maintained at pressure of 0.1 Torr. to 100 Torr., Taguchi et al., Ser. No. 07/322,200 b) moving the reactor tube containing the ZnSe polycrystal through i) a low temperature first zone maintained at a temperature from room temperature to 100° C./cm, ii) a temperature-raising second zone having a temperature gradient from 50° C./cm to 200° C./cm, iii) a high temperature third zone maintained at a temperature from 700° C. to 900° C., wherein the temperature of the temperature of the temperature-raising second zone does not exceed the temperature of the high temperature third zone, iv) a temperature-lowering fourth zone having a temperature gradient from -200° C./cm to -50° C./cm and v) a low temperature fifth zone maintained at a temperature from room temperature to 100° C. in this order at a rate of 0.05 mm/day to 5 mm/day while maintaining the solid state of the substrate wherein ZnSe polycrystal is converted to ZnSe single crystal, and vi) cutting the ZnSe single crystal to form the ZnSe single crystal substrate.
Claim 2
Independent Claim
215 words
A method for growing a ZnSe single crystal substrate comprising the steps of: a) placing a portion of a ZnSe polycrystal in a sealed reactor tube containing at least one gas selected from the group consisting of an inert gas, nitrogen and H 2 Se and maintained at pressure of 0.1 Torr. to 100 Torr., Taguchi et al., Ser. No. 07/322,200 b) moving the reactor tube containing the ZnSe polycrystal through i) a low temperature first zone maintained at a temperature from room temperature to 100° C./cm, ii) a temperature-raising second zone having a temperature gradient from 50° C./cm to 200° C./cm, iii) a high temperature third zone maintained at a temperature from 700° C. to 900° C., wherein the temperature of the temperature of the temperature-raising second zone does not exceed the temperature of the high temperature third zone, iv) a temperature-lowering fourth zone having a temperature gradient from -200° C./cm to -50° C./cm and v) a low temperature fifth zone maintained at a temperature from room temperature to 100° C. in this order at a rate of 0.05 mm/day to 5 mm/day while maintaining the solid state of the substrate wherein ZnSe polycrystal is converted to ZnSe single crystal, and vi) cutting the ZnSe single crystal to form the ZnSe single crystal substrate.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-01-07 | 1994-07-09 | 1995-01-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-01-07 | 1998-07-09 | 1999-01-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-01-07 | 2002-07-09 | 2003-01-08 | $7700.00 | Window Closed / Lapsed |