US4981712A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of producing thin-film electroluminescent device using CVD process to form phosphor layer
Assignee: Central Glass Co Ltd
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Filing: 1989-05-26
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Granted: 1991-01-01
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Expires: 2009-05-26
Abstract
Abstract In producing a thin-film electroluminescent device having a ZnS:Mn film deposited by a MOCVD process using a mixed gas containing an organic zinc compound, an organic sulfur compound and an organic manganese compound, either methyl mercaptan or ethyl mercaptan is used as the sulfur compound and diπ-cyclopentadienylmanganese as the manganese compound. The zinc compound is preferably dimethylzinc or diethylzinc. As the merits of using such a combination of organic metal compounds the MOCVD operation can be accomplished at a relatively low substrate temperature, and the deposited ZnS:Mn film is high in the light emitting efficiency and low in the threshold voltage.
Inventors
- 👤 Yuji Yamamoto
- 👤 Tsuyoshi Maekawa
- 👤 Kazutoshi Nakaya
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 23:50
CPC Classifications
H; H05; H05B; H05B33/00; H05B33/12; H05B33/22; C; C09; C09K; C09K11/00; C09K11/08; C09K11/57; C09K11/572; C09K11/574; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/305; C23C16/306; H05B33/10; H05B33/14
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
126 words
In a method of producing a thin-film electroluminescent device having a thin film of zinc sulfide doped with manganese as an electroluminescent phosphor layer, a pair of electrodes located on the opposite two sides of the phosphor layer, respectively, and a dielectric layer interposed between the phosphor layer and each or predetermined one of the two electrodes, the method including the step of depositing said thin film by a metal-organic chemical vapor deposition process using a mixed gas consisting essentially of an organic zinc compound, an organic sulfur compound and an organic manganese compound, the improvement comprising said mixed gas containing a mercaptan selected from the group consisting of methyl mercaptan and ethyl melcaptan as said organic sulfur compound and di-π-cyclopentadienylmanganese as said organic manganese compound.
Claim 2
Dependent Claim
126 words
In a method of producing a thin-film electroluminescent device having a thin film of zinc sulfide doped with manganese as an electroluminescent phosphor layer, a pair of electrodes located on the opposite two sides of the phosphor layer, respectively, and a dielectric layer interposed between the phosphor layer and each or predetermined one of the two electrodes, the method including the step of depositing said thin film by a metal-organic chemical vapor deposition process using a mixed gas consisting essentially of an organic zinc compound, an organic sulfur compound and an organic manganese compound, the improvement comprising said mixed gas containing a mercaptan selected from the group consisting of methyl mercaptan and ethyl melcaptan as said organic sulfur compound and di-π-cyclopentadienylmanganese as said organic manganese compound.
Claim 3
Dependent Claim
21 words
A method according to claim 1, wherein said organic zinc compound is selected from the group consisting of dimethylzinc and diethylzinc.
Claim 4
Dependent Claim
22 words
A method according to claim 1, further comprising the step of forming said dielectric layer by a plasma chemical vapor deposition process.
Claim 5
Dependent Claim
27 words
A method according to claim 3, wherein said dielectric layer is formed as a laminate of a SiO 2 film and a Si 3 N 4 film.
Claim 6
Dependent Claim
12 words
A thin-film electroluminescent device produced by a method according to claim 1.
References Cited (Backward Citations)
JPS6298596A
Cited
US4804558A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-12-31 | 1994-07-02 | 1995-01-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-12-31 | 1998-07-02 | 1999-01-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-12-31 | 2002-07-02 | 2003-01-01 | $7700.00 | Window Closed / Lapsed |