US4979134A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for measuring surface temperature of semiconductor wafer substrate, and heat-treating apparatus
Assignee: Tokyo Electron Ltd
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Filing: 1989-07-14
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Granted: 1990-12-18
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Expires: 2009-07-14
Abstract
Abstract A method for measuring the surface temperature of a wafer substrate and a heat-treating apparatus are both used in a semiconductor device-manufacturing process wherein a reference light including infrared rays is intermittently emitted toward a wafer substrate. Infrared rays of a plurality of different types whose wavelengths are shorter than 1 μm and differ from each other are selectively detected from the reference light emitted toward the wafer substrate, the reference light reflected by the wafer substrate, and the light radiated from the wafer substrate itself. On the basis of the detection performed with respect to the emitted reference light, the reflected reference light and the radiated infrared rays, the surface temperature of the wafer substrate is calculated. A substrate-heating element is controlled on the basis of the calculated temperature.
Inventors
- 👤 Jiro Arima
- 👤 Hiroji Tsujimura
- 👤 Tomonori Narita
- 👤 Hiroki Takebuchi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 20:20
CPC Classifications
G; G01; G01J; G01J5/00; G01J5/0003; G01J5/0007; G01J5/52; G01J5/53; G01J5/532; G01J5/02; G01J5/08; G01J5/0803; G01J5/0805; G01J5/60; G01J5/602
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
153 words
A method for measuring a surface temperature of a semiconductor wafer substrate, comprising the steps of: emitting infrared ray-including reference light toward the semiconductor wafer substrate; selectively detecting infrared rays of a plurality of kinds whose wavelengths are differ from each other, among the infrared rays included in the reference light; detecting infrared rays having the same wavelengths as those of the selectively detected infrared rays, among the infrared rays included in the reference light reflected by the wafer substrate and among the infrared rays radiated by the wafer substrate itself; discriminating the infrared rays included in the reference light reflected by the wafer substrate from the infrared rays radiated by the wafer substrate itself; and calculating the surface temperature of the wafer substrate on the basis of the selectively detected infrared rays, the discriminated infrared rays included in the reflected reference light, and the discriminated infrared rays radiated by the wafer substrate.
Claim 2
Independent Claim
153 words
A method for measuring a surface temperature of a semiconductor wafer substrate, comprising the steps of: emitting infrared ray-including reference light toward the semiconductor wafer substrate; selectively detecting infrared rays of a plurality of kinds whose wavelengths are differ from each other, among the infrared rays included in the reference light; detecting infrared rays having the same wavelengths as those of the selectively detected infrared rays, among the infrared rays included in the reference light reflected by the wafer substrate and among the infrared rays radiated by the wafer substrate itself; discriminating the infrared rays included in the reference light reflected by the wafer substrate from the infrared rays radiated by the wafer substrate itself; and calculating the surface temperature of the wafer substrate on the basis of the selectively detected infrared rays, the discriminated infrared rays included in the reflected reference light, and the discriminated infrared rays radiated by the wafer substrate.
Claim 3
Dependent Claim
16 words
A method according to claim 1, wherein the reference light is comprised of infrared rays alone.
Claim 4
Dependent Claim
27 words
A method according to claim 1, wherein the calculation of the surface temperature is performed on the basis of infrared rays of at least three different wavelengths.
Claim 5
Dependent Claim
29 words
A method according to claim 1, wherein the entirety of a predetermined surface region of the wafer substrate is scanned for detecting the infrared rays having the same wavelengths.
Claim 6
Dependent Claim
25 words
A method according to claim 1, wherein the selectively detecting step detects infrared rays of the plurality kinds whose wavelengths are shorter than 1 μm.
Claim 7
Independent Claim
175 words
An apparatus for heat-treating a semiconductor wafer substrate, comprising: means for heating the wafer substrate; means for intermittently emitting infrared rayincluding reference light toward the wafer substrate; means for selectively detecting infrared rays of a plurality of kinds whose wavelengths are differ from each other, among the infrared rays included in the reference light; means for detecting infrared rays having the same wavelengths as those of the selectively detected infrared rays, among the infrared rays included in the reference light reflected by the wafer substrate and the infrared rays radiated by the wafer substrate itself; means for discriminating the infrared rays included in the reference light reflected by the wafer substrate from the infrared rays radiated by the wafer substrate itself; means for calculating the surface temperature of the wafer substrate on the basis of the selectively detected infrared rays, the discriminated infrared rays included in the reflected reference light, and the discriminated infrared rays radiated by the wafer substrate; and means for controlling the heating means on the basis of the calculated surface temperature.
Claim 8
Independent Claim
175 words
An apparatus for heat-treating a semiconductor wafer substrate, comprising: means for heating the wafer substrate; means for intermittently emitting infrared rayincluding reference light toward the wafer substrate; means for selectively detecting infrared rays of a plurality of kinds whose wavelengths are differ from each other, among the infrared rays included in the reference light; means for detecting infrared rays having the same wavelengths as those of the selectively detected infrared rays, among the infrared rays included in the reference light reflected by the wafer substrate and the infrared rays radiated by the wafer substrate itself; means for discriminating the infrared rays included in the reference light reflected by the wafer substrate from the infrared rays radiated by the wafer substrate itself; means for calculating the surface temperature of the wafer substrate on the basis of the selectively detected infrared rays, the discriminated infrared rays included in the reflected reference light, and the discriminated infrared rays radiated by the wafer substrate; and means for controlling the heating means on the basis of the calculated surface temperature.
Claim 9
Dependent Claim
16 words
An apparatus according to claim 6, wherein the reference light is comprised of infrared rays alone.
Claim 10
Dependent Claim
27 words
An apparatus according to claim 6, wherein the calculation of the surface temperature is performed on the basis of infrared rays of at least three different wavelengths.
Claim 11
Dependent Claim
29 words
An apparatus according to claim 6, wherein the entirety of a predetermined surface region of the wafer substrate is scanned for detecting the infrared rays having the same wavelengths.
Claim 12
Dependent Claim
51 words
An apparatus according to claim 6, wherein temperature information used for controlling the heating means is derived by measuring the temperature of a minor surface of the wafer substrate, on the assumption that a major surface and the minor surface of the wafer substrate are heated under substantially the same condition.
Claim 13
Dependent Claim
25 words
An apparatus according to claim 6, wherein the selectively detecting means detects infrared rays of the plurality kinds whose wavelengths are shorter than 1 μm.
Claim 14
Independent Claim
64 words
An apparatus for heat-treating a semiconductor wafer substrate, comprising: means for emitting light toward the wafer substrate; means for measuring the temperature of the wafer substrate on the basis of light coming from the wafer substrate with taking change of emissivity of the wafer substrate into consideration; and means for controlling the heating means in accordance with the temperature measured by the measuring means.
Claim 15
Independent Claim
64 words
An apparatus for heat-treating a semiconductor wafer substrate, comprising: means for emitting light toward the wafer substrate; means for measuring the temperature of the wafer substrate on the basis of light coming from the wafer substrate with taking change of emissivity of the wafer substrate into consideration; and means for controlling the heating means in accordance with the temperature measured by the measuring means.
Claim 16
Dependent Claim
205 words
An apparatus according to claim 12, wherein, the emitting means includes means for intermittently emitting infrared ray-including reference light toward the wafer substrate; and the measuring means includes: first means for selectively detecting infrared rays of a plurality of kinds whose wavelengths are shorter than 1 μm and differ from each other among the infrared ray-including reference light emitted by the emitting means; second means for detecting infrared rays having the same wavelengths as those of the selectively detected infrared rays among light coming from the wafer substrate, said light coming from the wafer substrate including both of the infrared ray-including reference light reflected by the wafer substrate and light radiated by the wafer substrate itself; means for discriminating the infrared rays included in the infrared ray-including reference light reflected by the wafer substrate from the infrared rays radiated by the wafer substrate itself; and means for calculating the surface temperature of the wafer substrate on the basis of the infrared rays detected by the first detecting means, the reflected infrared rays which is detected by the second detecting means and discriminated by the discriminating means, and the radiated infrared rays which is detected by the second detecting means and discriminated by the discriminating means.
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