US4970565A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Sealed charge storage structure
Assignee: Atmel Corp
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Filing: 1990-05-10
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Granted: 1990-11-13
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Expires: 2010-05-10
Abstract
Abstract A memory cell in an EPROM device which is totally sealed from ultraviolet light by a conductive cover without openings therein for leads to the cell's drain, source and gate. Electrical communication with the source is provided by direct contact with the conductive cover. Access to the drain and floating gate is provided by buried N+ implants, buried N+ layers or N-wells crossing underneath the sides of the cover. The memory cell has a single poly floating gate rather than a stacked floating gate/control gate combination. The buried N+ implant or N-well serves as the control gate and is capacitvely coupled to the floating gate via a thin oxide layer in a coupling area.
Inventors
- 👤 Tsung-Ching Wu
- 👤 James C. Hu
- 👤 John Y. Huang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 07:45
CPC Classifications
G; G11; G11C; G11C16/00; G11C16/02; G11C16/06; G11C16/10; G11C16/18; H; H10; H10B; H10B41/00; H10B41/30; H10B41/60; H10B69/00
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
193 words
A sealed memory cell in a nonvolatile memory chip, the chip containing a plurality of memory cells, at least one of said memory cells being sealed from exposure to radian energy, the sealed memory cell comprising, a chip substrate, a source, drain and control gate defined within the chip substrate in a memory cell area and a floating gate disposed above the substrate in said memory cell area, said floating gate extending over and capacitively coupling to said control gate in a coupling area of said memory cell area, a radiant energy shielding cover in contact with said substrate in a ring completely enclosing said memory cell area, said memory cell area being totally sealed over and around all sides of said memory cell area from radiant energy by said cover, means defined within said chip substrate for electrically connecting said source, drain and control gate with corresponding connection terminals outside of said memory cell area, wherein said connecting means includes an electrically conductive channel within said substrate extending from said control gate in said coupling area, under said shielding cover, to a corresponding gate connection terminal outside of said memory cell area.
Claim 2
Dependent Claim
193 words
A sealed memory cell in a nonvolatile memory chip, the chip containing a plurality of memory cells, at least one of said memory cells being sealed from exposure to radian energy, the sealed memory cell comprising, a chip substrate, a source, drain and control gate defined within the chip substrate in a memory cell area and a floating gate disposed above the substrate in said memory cell area, said floating gate extending over and capacitively coupling to said control gate in a coupling area of said memory cell area, a radiant energy shielding cover in contact with said substrate in a ring completely enclosing said memory cell area, said memory cell area being totally sealed over and around all sides of said memory cell area from radiant energy by said cover, means defined within said chip substrate for electrically connecting said source, drain and control gate with corresponding connection terminals outside of said memory cell area, wherein said connecting means includes an electrically conductive channel within said substrate extending from said control gate in said coupling area, under said shielding cover, to a corresponding gate connection terminal outside of said memory cell area.
Claim 3
Dependent Claim
61 words
The sealed memory cell of claim 1 wherein said connecting means further comprises, a second electrically conductive channel within said substrate extending from said drain in said memory cell area, under said shielding cover, to a corresponding drain connection terminal outside of said memory cell area, a conductive line electrically contacting said source and said cover, said cover being electrically conductive.
Claim 4
Dependent Claim
221 words
A sealed memory cell in a nonvolatile chip, the chip containing a plurality of memory cells at least one memory cell being sealed from exposure to radiant energy, the sealed memory cell comprising, a chip substrate, a source, drain and control gate defined within the chip substrate in a memory cell area and a floating gate disposed above the substrate in a memory cell area, said floating gate extending over and capacitively coupled to said control gate in a coupling area of said memory cell area. a radiant energy shielding cover in contact with said substrate in a ring completely enclosing said memory cell area, said memory cell area being totally sealed from radiant energy over and around all sides of said memory cell area by said cover, and means defined within said chip substrate for electrically connecting said source, drain and control gate with corresponding connection terminals outside of said memory cell area, said connecting means including an electrically conductive channel within said substrate extending from said control gate in said coupling area, under said shielding cover, to a corresponding gate connection terminal outside of said memory cell area, wherein said control gate, conductive channel and gate connection terminal are collectively formed by a structure which is an N-well, said N-well extending in said coupling area under said floating gate.
Claim 5
Dependent Claim
221 words
A sealed memory cell in a nonvolatile chip, the chip containing a plurality of memory cells at least one memory cell being sealed from exposure to radiant energy, the sealed memory cell comprising, a chip substrate, a source, drain and control gate defined within the chip substrate in a memory cell area and a floating gate disposed above the substrate in a memory cell area, said floating gate extending over and capacitively coupled to said control gate in a coupling area of said memory cell area. a radiant energy shielding cover in contact with said substrate in a ring completely enclosing said memory cell area, said memory cell area being totally sealed from radiant energy over and around all sides of said memory cell area by said cover, and means defined within said chip substrate for electrically connecting said source, drain and control gate with corresponding connection terminals outside of said memory cell area, said connecting means including an electrically conductive channel within said substrate extending from said control gate in said coupling area, under said shielding cover, to a corresponding gate connection terminal outside of said memory cell area, wherein said control gate, conductive channel and gate connection terminal are collectively formed by a structure which is an N-well, said N-well extending in said coupling area under said floating gate.
Claim 6
Dependent Claim
21 words
The sealed memory cell of claim 1 wherein said floating gate extension above said capacitive coupling area has a polygonal shape.
Claim 7
Dependent Claim
28 words
The sealed memory cell of claim 1 wherein said floating gate extension above said capacitive coupling area has a forked shape with a plurality of spaced apart fingers.
Claim 8
Dependent Claim
23 words
The sealed memory cell of claim 1 wherein said cover is composed of material selected from the group consisting of metal and polysilicon.
Claim 9
Dependent Claim
290 words
A sealed memory cell in an EPROM device, the EPROM device having a substrate with a plurality of floating gate memory cells, at least one of said memory cells being sealed from erasure by ultraviolet light, said sealed memory cell comprising, spaced apart implants in a memory cell area of the substrate, said implants defining a source and a drain, a thin gate oxide layer disposed over said substrate between said source and drain implants, a polysilicon layer defining a floating gate, said polysilicon layer disposed over said thin gate oxide layer and extending therefrom to a coupling area, an ultraviolet-shielding electrically conductive cover disposed on top of said substrate with top and sides thereof respectively spaced over and around said source, drain and floating gate, said cover contacting said substrate in a ring completely surrounding said source, drain and floating gate, whereby said memory cell is completely surrounded on top and sides by said cover, electrically conductive channels defined in said substrate extending under said sides of said cover, a first of said channels extending from said drain implant in said memory cell area to a drain connection implant outside of said memory cell area, a second of said channels extending from said coupling area in said memory cell area to a gate connection implant outside of said memory cell area, said coupling area having an oxide layer between said polysilicon layer and said second channel whereby said second channel is capacitively coupled to said floating gate, and means for electrically connecting said source implant to said conductive cover, conductive lines of said EPROM device electrically communicating with said source, drain and gate via respective conductive cover, drain connection implant and gate connection implant outside said memory cell area.
Claim 10
Dependent Claim
290 words
A sealed memory cell in an EPROM device, the EPROM device having a substrate with a plurality of floating gate memory cells, at least one of said memory cells being sealed from erasure by ultraviolet light, said sealed memory cell comprising, spaced apart implants in a memory cell area of the substrate, said implants defining a source and a drain, a thin gate oxide layer disposed over said substrate between said source and drain implants, a polysilicon layer defining a floating gate, said polysilicon layer disposed over said thin gate oxide layer and extending therefrom to a coupling area, an ultraviolet-shielding electrically conductive cover disposed on top of said substrate with top and sides thereof respectively spaced over and around said source, drain and floating gate, said cover contacting said substrate in a ring completely surrounding said source, drain and floating gate, whereby said memory cell is completely surrounded on top and sides by said cover, electrically conductive channels defined in said substrate extending under said sides of said cover, a first of said channels extending from said drain implant in said memory cell area to a drain connection implant outside of said memory cell area, a second of said channels extending from said coupling area in said memory cell area to a gate connection implant outside of said memory cell area, said coupling area having an oxide layer between said polysilicon layer and said second channel whereby said second channel is capacitively coupled to said floating gate, and means for electrically connecting said source implant to said conductive cover, conductive lines of said EPROM device electrically communicating with said source, drain and gate via respective conductive cover, drain connection implant and gate connection implant outside said memory cell area.
Claim 11
Dependent Claim
29 words
The sealed memory cell of claim 7 wherein said electrically conductive channels are selected from the group of structures consisting of N-wells, buried N+ implants and buried N+ layers.
Claim 12
Dependent Claim
19 words
The sealed memory cell of claim 7 wherein said polysilicon layer over said coupling area has a polygonal shape.
Claim 13
Dependent Claim
31 words
The sealed memory cell of claim 7 wherein said polysilicon layer over said coupling area has a forked shape with a plurality of spaced apart fingers disposed over said second channel.
Claim 14
Dependent Claim
23 words
The sealed memory cell of claim 7 wherein said cover is composed of material selected from the group consisting of metal and polysilicon.
Claim 15
Dependent Claim
33 words
The sealed memory cell of claim 7 wherein said connecting means comprises a conductive layer disposed over and contacting said source implant, said conductive layer also contacting a side of said conductive cover.
Claim 16
Dependent Claim
18 words
The sealed memory cell of claim 7 wherein said source and drain are defined by arsenic N+ implants.
Claim 17
Dependent Claim
45 words
The sealed memory cell of claim 7 wherein a ring implant is disposed in said substrate beneath said sides of said cover, said channels crossing under said ring implant in crossing regions, said ring implant being a P+ implant at least in said crossing regions.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-11-12 | 1994-05-14 | 1994-11-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-11-12 | 1998-05-14 | 1998-11-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-11-12 | 2002-05-14 | 2002-11-13 | $7700.00 | Window Closed / Lapsed |