US4970563A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor quantum well electron and hole waveguides
Assignee: Georgia Tech Research Corp
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Filing: 1989-06-30
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Granted: 1990-11-13
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Expires: 2009-06-30
Abstract
Abstract Semiconductor, quantum well, electron and hole slab waveguides include a substrate semiconductor layer, a film semiconductor layer, and a cover semiconductor layer, wherein the semiconductor layers provide substantially ballistic transport for electrons and wherein the thicknesses and compositions of the semiconductor layers are determined in accordance with the inventive method to provide a waveguide.
Inventors
- 👤 Thomas K. Gaylord
- 👤 Kevin F. Brennan
- 👤 Elias N. Glytsis
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 01:34
CPC Classifications
B; B82; B82Y; B82Y10/00; H; H10; H10D; H10D1/00; H10D1/40; H10D62/00; H10D62/80; H10D62/81; H10D62/812; H10D62/815; H10D62/8161; H10D62/8162; H10D62/8164
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
149 words
An electron waveguide which comprises: a substrate layer comprised of semiconductor material having a potential energy barrier and an electron effective mass; a film layer comprised of semiconductor material having a potential energy barrier and an electron effective mass adjacent to the substrate layer; and a cover layer comprised of semiconductor material having a potential energy barrier and an electron effective mass adjacent to the film layer; wherein at least a portion of the substrate layer which is adjacent to the film layer, the film layer, and at least a portion of the cover layer adjacent to the film layer provide substantially ballistic transport for electrons; and wherein a thickness of the film layer and the potential energy barriers and electron effective masses of the substrate, film, and cover layers are predetermined to provide a potential well so that electron waveguide modes exist for electron energies in the well.
Claim 2
Dependent Claim
149 words
An electron waveguide which comprises: a substrate layer comprised of semiconductor material having a potential energy barrier and an electron effective mass; a film layer comprised of semiconductor material having a potential energy barrier and an electron effective mass adjacent to the substrate layer; and a cover layer comprised of semiconductor material having a potential energy barrier and an electron effective mass adjacent to the film layer; wherein at least a portion of the substrate layer which is adjacent to the film layer, the film layer, and at least a portion of the cover layer adjacent to the film layer provide substantially ballistic transport for electrons; and wherein a thickness of the film layer and the potential energy barriers and electron effective masses of the substrate, film, and cover layers are predetermined to provide a potential well so that electron waveguide modes exist for electron energies in the well.
Claim 3
Dependent Claim
25 words
The electron waveguide of claim 1 wherein the electron potential energy barrier for the cover layer and the substrate layer are substantially the same height.
Claim 4
Dependent Claim
20 words
The electron waveguide of claim 2 wherein the cover layer and the substrate layer are comprised of the same material.
Claim 5
Dependent Claim
30 words
The electron waveguide of claim 1 wherein the cover layer, the film layer, and the substrate layer are fabricated from semiconductor compositions of the form Ga 1-x Al x As.
Claim 6
Dependent Claim
14 words
The electron waveguide of claim 4 wherein the film layer is comprised of GaAs.
Claim 7
Dependent Claim
124 words
The electron waveguide of claim 1 wherein: (a) the heights of the electron potential energy barrier of the cover layer, the film layer and the substrate layer of the electron waveguide are V c , V f and V s , respectively; and (b) the thickness d of the film layer is predetermined so that at least the v th electron waveguide mode propagates, where v is an integer; d being substantially equal to or greater than: d={h/2m.sup.*.sub.f (V.sub.s -V.sub.f)].sup.1/2 }*{tan .sup.-1 [m.sup.*.sub.f (V.sub.c -V.sub.s)/m.sup.*.sub.c (V.sub.s -V.sub.f)].sup.1/2+ vπ} wherein m * c , m * f and m * s are the electron effective masses in the cover layer, the film layer, and the substrate layer, respectively, and is Planck's constant divided by 2π.
Claim 8
Dependent Claim
38 words
The electron waveguide of claim 6 wherein the waveguide only supports modes no higher than the v th mode wherein: K.sub.1 *[K.sub.2 +vπ]<d<K.sub.1 *[K.sub.2 +(v+1)π] where: K.sub.1 =h/[2m.sup.*.sub.f (V.sub.s -V.sub.f)].sup.1/2 K.sub.2 =tan .sup.-1 [m.sup.*.sub.f (V.sub.c -V.sub.s)/m.sup.*.sub.c (V.sub.s -V.sub.f)].sup.1/2.
Claim 9
Dependent Claim
113 words
The electron waveguide of claim 2 wherein: (a) the heights of the electron potential energy barrier of the cover layer, the film layer and the substrate layer are V c , V f and V s , respectively; and (b) the thickness d of the film layer is predetermined so that at least the v th electron waveguide mode propagates, where v is an integer; d being substantially equal to or greater than: d=vhπ/[2m.sup.*.sub.f (V.sub.s -V.sub.f)].sup.1/2 wherein m * c , m * f and m * s are the electron effective masses in the cover layer, the film layer, and the substrate layer, respectively, and h is Planck's constant divided by 2π.
Claim 10
Dependent Claim
21 words
The electron waveguide of claim 8 wherein the waveguide only supports the lowest order mode, i.e., v=0, wherein: 0<d<hπ/[2m.sup.*.sub.f (V.sub.s -V.sub.f)].sup.1/2.
Claim 11
Dependent Claim
32 words
The electron waveguide of claim 1 wherein the semiconductor materials which comprise at least one of the substrate, film, and cover layers are binary, ternary or quaternary semiconductor compositions of III-V elements.
Claim 12
Dependent Claim
121 words
An electron waveguide which comprises: a substrate layer comprised of a semiconductor material having a potential energy barrier and an electron effective mass; a film layer comprised of a semiconductor material having a potential energy barrier and an electron effective mass adjacent the substrate layer; and a cover layer comprised of a semiconductor material having a potential energy barrier and an electron effective mass adjacent the film layer; wherein the film layer provides substantially ballistic transport for electrons; and wherein a thickness of the film layer and the potential energy barriers and electron effective masses of the substrate, film, and cover layers are predetermined to provide a potential well so that electron waveguide modes exist for electron energies in the well.
Claim 13
Dependent Claim
121 words
An electron waveguide which comprises: a substrate layer comprised of a semiconductor material having a potential energy barrier and an electron effective mass; a film layer comprised of a semiconductor material having a potential energy barrier and an electron effective mass adjacent the substrate layer; and a cover layer comprised of a semiconductor material having a potential energy barrier and an electron effective mass adjacent the film layer; wherein the film layer provides substantially ballistic transport for electrons; and wherein a thickness of the film layer and the potential energy barriers and electron effective masses of the substrate, film, and cover layers are predetermined to provide a potential well so that electron waveguide modes exist for electron energies in the well.
Claim 14
Dependent Claim
148 words
A hole waveguide which comprises: a substrate layer comprised of a semiconductor material having a potential energy barrier and a hole effective mass; a film layer comprised of a semiconductor material having a potential energy barrier and a hole effective mass adjacent the substrate layer; and a cover layer comprised of a semiconductor material having a potential energy barrier and a hole effective mass adjacent the film layer; wherein at least a portion of the substrate layer which is adjacent the film layer, the film layer, and at least a portion of the cover layer adjacent the film layer provide substantially ballistic transport for holes; and wherein a thickness of the film layer and the potential energy barriers and hole effective masses of the substrate, film, and cover layers are predetermined to provide a potential well so that hole waveguide modes exist for hole energies in the well
Claim 15
Dependent Claim
148 words
A hole waveguide which comprises: a substrate layer comprised of a semiconductor material having a potential energy barrier and a hole effective mass; a film layer comprised of a semiconductor material having a potential energy barrier and a hole effective mass adjacent the substrate layer; and a cover layer comprised of a semiconductor material having a potential energy barrier and a hole effective mass adjacent the film layer; wherein at least a portion of the substrate layer which is adjacent the film layer, the film layer, and at least a portion of the cover layer adjacent the film layer provide substantially ballistic transport for holes; and wherein a thickness of the film layer and the potential energy barriers and hole effective masses of the substrate, film, and cover layers are predetermined to provide a potential well so that hole waveguide modes exist for hole energies in the well
Claim 16
Dependent Claim
161 words
An electron waveguide which comprises: a substrate layer comprised of semiconductor material having a potential energy barrier and an electron effective mass; a film layer comprised of semiconductor material having a potential energy barrier and an electron effective mass adjacent to the substrate layer; and a cover layer comprised of semiconductor material having a potential energy barrier and an electron effective mass adjacent to the film layer; wherein at least a portion of the substrate layer which is adjacent to the film layer, the film layer, and at least a portion of the cover layer adjacent to the film layer provide substantially ballistic transport for electrons; and wherein a thickness of the film layer and the potential energy barriers and electron effective masses of the substrate, film, and cover layers are predetermined to provide a potential well so that electron waveguide modes exist for electron energies above the potential energy barrier of at least one of the substrate and cover layers.
Claim 17
Dependent Claim
161 words
An electron waveguide which comprises: a substrate layer comprised of semiconductor material having a potential energy barrier and an electron effective mass; a film layer comprised of semiconductor material having a potential energy barrier and an electron effective mass adjacent to the substrate layer; and a cover layer comprised of semiconductor material having a potential energy barrier and an electron effective mass adjacent to the film layer; wherein at least a portion of the substrate layer which is adjacent to the film layer, the film layer, and at least a portion of the cover layer adjacent to the film layer provide substantially ballistic transport for electrons; and wherein a thickness of the film layer and the potential energy barriers and electron effective masses of the substrate, film, and cover layers are predetermined to provide a potential well so that electron waveguide modes exist for electron energies above the potential energy barrier of at least one of the substrate and cover layers.
Claim 18
Dependent Claim
34 words
The electron waveguide of claim 1, wherein the semiconductor materials which comprise at least one of the substrate, film, and cover layers are one of binary, ternary an quaternary semiconductor compositions of II-VI elements.
Claim 19
Dependent Claim
133 words
An electron waveguide which comprises: a substrate layer comprised of a semiconductor material having a potential energy barrier and an electron effective mass; a film layer comprised of a semiconductor material having a potential energy barrier and an electron effective mass adjacent the substrate layer; and a cover layer comprised of a semiconductor material having a potential energy barrier and an electron effective mass adjacent the film layer; wherein the film layer provides substantially ballistic transport for electrons; and wherein a thickness of the film layer and the potential energy barriers and electron effective masses of the substrate, film, and cover layers are predetermined to provide a potential well so that electron waveguide modes exist for electron energies above the potential energy barrier of at least one of the substrate and cover layers.
Claim 20
Dependent Claim
133 words
An electron waveguide which comprises: a substrate layer comprised of a semiconductor material having a potential energy barrier and an electron effective mass; a film layer comprised of a semiconductor material having a potential energy barrier and an electron effective mass adjacent the substrate layer; and a cover layer comprised of a semiconductor material having a potential energy barrier and an electron effective mass adjacent the film layer; wherein the film layer provides substantially ballistic transport for electrons; and wherein a thickness of the film layer and the potential energy barriers and electron effective masses of the substrate, film, and cover layers are predetermined to provide a potential well so that electron waveguide modes exist for electron energies above the potential energy barrier of at least one of the substrate and cover layers.
Claim 21
Dependent Claim
160 words
A hole waveguide which comprises: a substrate layer comprised of a semiconductor material having a potential energy barrier and a hole effective mass; a film layer comprised of a semiconductor material having a potential energy barrier and a hole effective mass adjacent the substrate layer; and a cover layer comprised of a semiconductor material having a potential energy barrier and a hole effective mass adjacent the film layer; wherein at least a portion of the substrate layer which is adjacent the film layer, the film layer, and at least a portion of the cover layer adjacent the film layer provide substantially ballistic transport for holes; and wherein a thickness of the film layer and the potential energy barriers and hole effective masses of the substrate, film, and cover layers are predetermined to provide a potential well so that hole waveguide modes exist for hole energies above the potential energy barrier of at least one of the substrate and cover layers.
Claim 22
Dependent Claim
160 words
A hole waveguide which comprises: a substrate layer comprised of a semiconductor material having a potential energy barrier and a hole effective mass; a film layer comprised of a semiconductor material having a potential energy barrier and a hole effective mass adjacent the substrate layer; and a cover layer comprised of a semiconductor material having a potential energy barrier and a hole effective mass adjacent the film layer; wherein at least a portion of the substrate layer which is adjacent the film layer, the film layer, and at least a portion of the cover layer adjacent the film layer provide substantially ballistic transport for holes; and wherein a thickness of the film layer and the potential energy barriers and hole effective masses of the substrate, film, and cover layers are predetermined to provide a potential well so that hole waveguide modes exist for hole energies above the potential energy barrier of at least one of the substrate and cover layers.
Claim 23
Dependent Claim
25 words
The electron waveguide of claim 13 wherein the electron potential energy barrier for the cover layer and the substrate layer are substantially the same height.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-11-12 | 1994-05-14 | 1994-11-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-11-12 | 1998-05-14 | 1998-11-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-11-12 | 2002-05-14 | 2002-11-13 | $7700.00 | Window Closed / Lapsed |