US4963238A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for removal of electrical shorts in a sputtering system
Assignee: Advanced Energy Industries Inc
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Filing: 1989-01-13
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Granted: 1990-10-16
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Expires: 2009-01-13
Abstract
Abstract Techniques for removing an electrical short caused by a flake in a thin film sputtering system are disclosed. The flake typically bridges the dark space between target and anode or shield and is removed through manipulation of the power supply utilized for normal operations. Sensing of the flake and discrimination between recoverable arcs is accomplished by timing the duration of an over-current condition. Removal involves switching between power mode or some other initial mode of regulation and current modes and progressively increasing current to melt the flake. Circuitry automatically removes the flake and is easily adapted to power supplies particularly more sophisticated, high frequency, lower energy storage DC supplies.
Inventors
- 👤 Jerry D. Siefkes
- 👤 John G. Harpold
- 👤 Douglas S. Schatz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 13:05
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; C; C23; C23C; C23C14/00; C23C14/22; C23C14/56; C23C14/564; H01J2237/00; H01J2237/02; H01J2237/0203; H01J2237/0206; H01J2237/022
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
64 words
A method of removing electrical shorts caused by a flake in a sputter system, comprising the steps of: a. driving the sputter system in normal operation by a power supply; b. detecting the presence of an electrical short caused by a flake across said power supply; and c. manipulating said power supply in a manner which melts said flake to remove the electrical short.
Claim 2
Independent Claim
64 words
A method of removing electrical shorts caused by a flake in a sputter system, comprising the steps of: a. driving the sputter system in normal operation by a power supply; b. detecting the presence of an electrical short caused by a flake across said power supply; and c. manipulating said power supply in a manner which melts said flake to remove the electrical short.
Claim 3
Dependent Claim
25 words
A method of removing electrical shorts in a sputter system as described in claim 1 wherein said step of manipulating the power supply is automatic.
Claim 4
Dependent Claim
51 words
A method of removing electrical shorts in a sputter system as described in claim 2 wherein said step of manipulating the power supply comprises the steps of: a. substantially stopping the application of power by the power supply; and then b. progressively increasing the application of current by the power supply.
Claim 5
Dependent Claim
93 words
A method of removing electrical shorts in a sputter system as described in claim 2 wherein said step of driving the sputter system by a power supply comprises the step of regulating said power supply in a first mode and wherein said step of manipulating the power supply comprises the steps of sequentially: a. switching to regulate the current of said power supply upon detecting the presence of an electrical short; b. substantially stopping the application of current through the power supply; and c. progressively increasing the current output by the power supply.
Claim 6
Dependent Claim
49 words
A method of removing electrical shorts in a sputter system as described in claim 4 and further comprising the step of returning to regulate said power supply in said first mode after progressively increasing the current output by said power supply and upon the removal of the electrical short.
Claim 7
Dependent Claim
34 words
A method of removing electrical shorts in a sputter system as described in claim 4 and further comprising the step of holding the progressive increase of said current output upon reaching a set level.
Claim 8
Dependent Claim
49 words
A method of removing electrical shorts in a sputter system as described in claim 5 and further comprising the step of holding the progressive increase of said current output upon reaching a set level prior to said step of returning to regulating said power supply in said first mode.
Claim 9
Dependent Claim
46 words
A method of removing electrical shorts in a sputter system as described in claim 7 and further comprising the step of monitoring the criteria of said first mode of said power supply while accomplishing the step of manipulating said power supply to remove the electrical short.
Claim 10
Dependent Claim
39 words
A method of removing electrical shorts in a sputter system as described in claim 5 wherein said step of returning to said first mode of regulation is accomplished when the criteria of said first mode reaches a particular value.
Claim 11
Dependent Claim
53 words
A method of removing electrical shorts in a sputter system as described in claim 8 wherein said step of returning to said first mode of regulation is accomplished when the criteria of said first mode equals 100% of the set value of that criteria prior to detecting the presence of the electrical short.
Claim 12
Dependent Claim
21 words
A method of removing electrical shorts in a sputter system as described in claim 4 wherein said progressive increase is linear.
Claim 13
Dependent Claim
21 words
A method of removing electrical shorts in a sputter system as described in claim 10 wherein said progressive increase is linear.
Claim 14
Dependent Claim
24 words
A method of removing electrical shorts in a sputter system as described in claim 12 wherein the time of said linear increase is adjustable.
Claim 15
Dependent Claim
29 words
A method of removing electrical shorts in a sputter system as described in claim 10 wherein the time of said linear increase is from 50 ms to 550 ms.
Claim 16
Dependent Claim
29 words
A method of removing electrical shorts in a sputter system as described in claim 4 wherein the time of said progressive increase is from 50 ms to 550 ms.
Claim 17
Dependent Claim
41 words
A method of removing electrical shorts in a sputter system as described in claim 1 wherein said step of detecting the electrical short comprises the step of sensing an over-current condition in said power supply for a prescribed period of time.
Claim 18
Dependent Claim
25 words
A method of removing electrical shorts in a sputter system as described in claim 16 wherein said time for sensing the over-current condition is adjustable.
Claim 19
Dependent Claim
37 words
A method of removing electrical shorts in a sputter system as described in claim 16 wherein said electrical short is detected by sensing the over-current condition for a period of time from 10 ms to 5 seconds.
Claim 20
Dependent Claim
29 words
A method of removing electrical shorts in a sputter system as described in claim 16 wherein said electrical short is detected by sensing the over-current condition for 50 ms.
Claim 21
Dependent Claim
41 words
A method of removing electrical shorts in a sputter system as described in claim 5 wherein said step of detecting the electrical short comprises the step of sensing an over-current condition in said power supply for a prescribed period of time.
Claim 22
Dependent Claim
25 words
A method of removing electrical shorts in a sputter system as described in claim 20 wherein said time for sensing the over-current condition is adjustable.
Claim 23
Dependent Claim
37 words
A method of removing electrical shorts in a sputter system as described in claim 20 wherein said electrical short is detected by sensing the over-current condition for a period of time from 10 ms to 5 seconds.
Claim 24
Dependent Claim
29 words
A method of removing electrical shorts in a sputter system as described in claim 20 wherein said electrical short is detected by sensing the over-current condition for 50 ms.
Claim 25
Dependent Claim
41 words
A method of removing electrical shorts in a sputter system as described in claim 13 wherein said step of detecting the electrical short comprises the step of sensing an overcurrent condition in said power supply for a prescribed period of time.
Claim 26
Dependent Claim
25 words
A method of removing electrical shorts in a sputter system as described in claim 24 wherein said time for sensing the over-current condition is adjustable.
Claim 27
Dependent Claim
37 words
A method of removing electrical shorts in a sputter system as described in claim 24 wherein said electrical short is detected by sensing the over-current condition for a period of time from 10 ms to 5 seconds.
Claim 28
Dependent Claim
29 words
A method of removing electrical shorts in a sputter system as described in claim 24 wherein said electrical short is detected by sensing the over-current condition for 50 ms.
Claim 29
Independent Claim
56 words
A method of removing electrical shorts in a sputter system as described in claims 2, 3, 4, 6, 8, 9, 13, 17, 21, or 25 and further comprising the steps of: a. controlling said power supply through a programmable processor; and b. programming said processor to automatically execute the sequence of steps involving the power supply.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-10-15 | 1994-04-16 | 1994-10-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-10-15 | 1998-04-16 | 1998-10-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-10-15 | 2002-04-16 | 2002-10-16 | $7700.00 | Window Closed / Lapsed |