US4960298A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor wafer pick-up device
Assignee: Texas Instruments Inc
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Filing: 1988-12-20
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Granted: 1990-10-02
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Expires: 2008-12-20
Abstract
Abstract The invention is a device for picking-up a semiconductor wafer without using the edges of the wafer thereby eliminating stress to the wafer. The picker moves up and down within a robotic arm and comes to rest in the same location each time through the use of tapered posts.
Inventors
- 👤 Masayuki Moroi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 22:42
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/78; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/136; Y10S414/137; Y10S414/138; Y10T; Y10T29/00; Y10T29/53; Y10T29/5313; Y10T29/53191
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
168 words
A pick-up device for moving a semiconductor wafer, the pick-up device being mounted on a mechanical or robotic arm having an extension, the pick-up device comprising: an upper plate; a lower pick-up head; two mounting posts having upper and lower ends, the upper ends being conical shaped; and a vacuum cavity in the pick-up head; the upper plate being attached to the upper ends of the two mounting posts, the lower pick-up head being attached to the lower ends of the two mounting posts, the two mounting posts resting within two holes in the robotic arm, but not fixedly attached to the robotic arm extension, such that when the robotic arm is lowered, the lower pick-up head remains parallel to the robotic arm extension until the lower pick-up head engages a semiconductor wafer, at which time the lower pick-up head moves in direction to position the pick-up head parallel to the semiconductor wafer independent of the orientation of the robotic arm extension with respect to the semiconductor wafer.
Claim 2
Dependent Claim
168 words
A pick-up device for moving a semiconductor wafer, the pick-up device being mounted on a mechanical or robotic arm having an extension, the pick-up device comprising: an upper plate; a lower pick-up head; two mounting posts having upper and lower ends, the upper ends being conical shaped; and a vacuum cavity in the pick-up head; the upper plate being attached to the upper ends of the two mounting posts, the lower pick-up head being attached to the lower ends of the two mounting posts, the two mounting posts resting within two holes in the robotic arm, but not fixedly attached to the robotic arm extension, such that when the robotic arm is lowered, the lower pick-up head remains parallel to the robotic arm extension until the lower pick-up head engages a semiconductor wafer, at which time the lower pick-up head moves in direction to position the pick-up head parallel to the semiconductor wafer independent of the orientation of the robotic arm extension with respect to the semiconductor wafer.
Claim 3
Dependent Claim
34 words
The pick-up device according to claim 1, wherein the lower pick-up head is of a high molecular weight material to prevent scratching the semiconductor wafer when the semiconductor wafer is held thereagainst during movement.
Claim 4
Dependent Claim
53 words
The pick-up device according to claim 1, wherein the pick-up head has a top surface and a bottom surface parallel to each other, and the vacuum cavity is formed in the bottom surface of the pick-up head, and opens into the top surface of the pick-up head through which a vacuum is pulled.
Claim 5
Dependent Claim
54 words
The pick-up device according to claim 3, wherein the vacuum cavity opening comprises the greatest part of the bottom surface of the pick-up head, the remaining part of the bottom of the pick-up head extending in an arc from the edge of the vacuum cavity opening to the top surface of the pick-up head.
Claim 6
Dependent Claim
42 words
The pick-up device according to claim 1, wherein the robotic arm extension includes a positioning block having two tapered holes therein in which the conical parts of the two posts reside, and are movable therefrom during the picking-up of a semiconductor wafer.
Claim 7
Dependent Claim
173 words
A pick-up device for moving a semiconductor wafer, the pick-up device being mounted on a mechanical or robotic arm having an extension, the pick-up device comprising, an upper plate, a lower pick-up head, two mounting posts having upper and lower ends, the upper ends being conical shaped, and a vacuum cavity in the pick-up head, the upper plate being attached to the upper ends of the two mounting posts, the lower pick-up head being attached to the lower ends of the two mounting posts, the two mounting posts resting within two round tapered holes in the robotic arm extension and removable therefrom during the picking-up of a semiconductor wafer, such that when the robotic arm is lowered the lower pick-up head remains parallel to the robotic arm extension until the lower pick-up head engages a semiconductor wafer at which time the lower pick-up head moves in a direction to position the pick-up head parallel to the semiconductor wafer independent of the orientation of the robotic arm extension with respect to the semiconductor wafer.
Claim 8
Dependent Claim
173 words
A pick-up device for moving a semiconductor wafer, the pick-up device being mounted on a mechanical or robotic arm having an extension, the pick-up device comprising, an upper plate, a lower pick-up head, two mounting posts having upper and lower ends, the upper ends being conical shaped, and a vacuum cavity in the pick-up head, the upper plate being attached to the upper ends of the two mounting posts, the lower pick-up head being attached to the lower ends of the two mounting posts, the two mounting posts resting within two round tapered holes in the robotic arm extension and removable therefrom during the picking-up of a semiconductor wafer, such that when the robotic arm is lowered the lower pick-up head remains parallel to the robotic arm extension until the lower pick-up head engages a semiconductor wafer at which time the lower pick-up head moves in a direction to position the pick-up head parallel to the semiconductor wafer independent of the orientation of the robotic arm extension with respect to the semiconductor wafer.
Claim 9
Dependent Claim
43 words
The pick-up device according to claim 6, wherein the robotic arm extension includes a positioning block having the two tapered holes therein in which the conical parts of the two posts reside, and are movable therefrom during the picking-up of a semiconductor wafer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-10-01 | 1994-04-02 | 1994-10-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-10-01 | 1998-04-02 | 1998-10-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-10-01 | 2002-04-02 | 2002-10-02 | $7700.00 | Window Closed / Lapsed |