US4959245A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of modifying a surface of a body using electromagnetic radiation
Assignee: US Philips Corp
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Filing: 1988-09-16
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Granted: 1990-09-25
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Expires: 2008-09-16
Abstract
Abstract A method of modifying a surface of a body such as a semiconductor body is described in which a beam of electromagnetic radiation is directed towards the surface so that the electromagnetic radiation is incident on the surface at or near the Brewster angle, the electromagnetic radiation incident on the surface preferably being so polarised that the electric vector of the electromagnetic radiation lies in the plane of incidence of the electromagnetic radiation at the surface.
Inventors
- 👤 Peter J. Dobson
- 👤 James H. Neave
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 22:33
CPC Classifications
H; H10; H10P; H10P34/00; H10P34/40; H10P34/42
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
82 words
A method of modifying a surface of a body comprising the steps of (a) providing a body having a surface, (b) supplying gaseous material onto said surface to form at least one layer of said material on said surface, and (c) treating said at least one layer by directing a beam of electromagnetic radiation to said layer within ±5° of Brewsters angle for said at least one layer to grow at least one smoothed epitaxial layer of said material on said surface.
Claim 2
Independent Claim
82 words
A method of modifying a surface of a body comprising the steps of (a) providing a body having a surface, (b) supplying gaseous material onto said surface to form at least one layer of said material on said surface, and (c) treating said at least one layer by directing a beam of electromagnetic radiation to said layer within ±5° of Brewsters angle for said at least one layer to grow at least one smoothed epitaxial layer of said material on said surface.
Claim 3
Dependent Claim
45 words
A method according to claim 1, wherein said step (c) is carried out by polarizing said electromagnetic radiation to form an electric vector of said electromagnetic radiation in the plane of incidence of said electromagnetic radiation on a surface of said at least one layer.
Claim 4
Dependent Claim
47 words
A method according to claim 2, further comprising a step (d) of directing at least one further beam of electromagnetic radiation toward said at least one layer on said surface, wherein said beam of electromagnetic radiation and said at least one further beam of electromagnetic radiation interfere.
Claim 5
Dependent Claim
57 words
A method according to claim 3, wherein said at least one further beam of electromagnetic radiation is polarized to form the electric vector in the plane of incidence of said at least one further beam, and wherein said step (d) is carried out by forming at least one layer at or near Brewsters angle for said layer.
Claim 6
Dependent Claim
30 words
A method according to claim 3 or claim 4, wherein said beam of electromagnetic radiation and said at least one further beam of electromagnetic radiation are formed from laser sources.
Claim 7
Dependent Claim
45 words
A method according to claim 5, wherein said step (a) is carried out by providing said body in a reaction chamber, and wherein said step (b) is carried out by using a supply source to direct at least one gaseous component into said reaction chamber.
Claim 8
Dependent Claim
18 words
A method according to claim 6, wherein a pressure below atmospheric pressure is maintained in said reaction chamber.
Claim 9
Dependent Claim
39 words
A method according to claim 7, wherein said pressure is an ultra high vacuum, and wherein said step (b) is carried out by directing at least a beam of one of molecules, atoms, and ions into said reaction chamber.
Claim 10
Dependent Claim
44 words
A method according to claim 6, wherein said step (b) is carried out by using a switching structure to alter the supply of gaseous material in at least one predetermined period such that growth of one material stops and growth of another material begins.
Claim 11
Dependent Claim
27 words
A method according to claim 9, wherein said step (c) is carried out to radiantly heat said at least one layer during said growth of said material.
Claim 12
Dependent Claim
44 words
A method according to claim 9, wherein said step (c) is carried out by activating at least one of said beam of electromagnetic radiation and said further beam to radiantly heat only a given material during growth of a layer of said given material.
Claim 13
Dependent Claim
75 words
A method according to claim 9, wherein said step (c) is carried out by activating at least one of said beam of electromagnetic radiation and said further beam only during said predetermined period such that said gaseous material is altered by radiantly heating an already grown layer of one material prior to beginning growth of another layer of different material in order to modify an interface between said already grown layer and said another layer.
Claim 14
Dependent Claim
48 words
A method according to claim 9, wherein said step (c) is carried out by varying angle of incidence of said beam of electromagnetic radiation between within ±5° of Brewsters angle for growth of one layer and an angle different from said Brewsters angle for growth of another layer.
Claim 15
Dependent Claim
69 words
A method according to claim 13, wherein said step (c) is carried out by altering polarization of said beam of electromagnetic radiation from polarization with the electric vector in the plane of incidence during growth of at least one layer of a first material to polarization with the electric vector having a component outside said plane of incidence during growth of at least one layer of a second material.
Claim 16
Dependent Claim
32 words
A method according to claim 9, wherein at least one of said beam of electromagnetic radiation and said further beam are directed to cause dissociation of gaseous material from said supply source.
Claim 17
Dependent Claim
27 words
A method according to claim 6, wherein said step (c) is carried out to radiantly heat said at least one layer during said growth of said material.
Claim 18
Dependent Claim
32 words
A method according to claim 6, wherein at least one of said beam of electromagnetic radiation and said further beam are directed to cause dissociation of gaseous material from said supply source.
Claim 19
Dependent Claim
21 words
A method according to claim 1 or claim 2, wherein said beam of electromagnetic radiation is formed from a laser source.
Claim 20
Dependent Claim
48 words
A method according to claim 1 or claim 2, wherein said step (a) is carried out by providing said body in a reaction chamber, and wherein said step (b) is carried out by using a supply source to direct at least one gaseous component into said reaction chamber.
Claim 21
Dependent Claim
18 words
A method according to claim 19, wherein a pressure below atmospheric pressure is maintained in said reaction chamber.
Claim 22
Dependent Claim
39 words
A method according to claim 20, wherein said pressure is an ultra high vacuum, and wherein said step (b) is carried out by directing at least a beam of one of molecules, atoms, and ions into said reaction chamber.
Claim 23
Dependent Claim
44 words
A method according to claim 19, wherein said step (b) is carried out by using a switching structure to alter the supply of gaseous material in at least one predetermined period such that growth of one material stops and growth of another material begins.
Claim 24
Dependent Claim
27 words
A method according to claim 22, wherein said step (c) is carried out to radiantly heat said at least one layer during said growth of said material.
Claim 25
Dependent Claim
48 words
A method according to claim 22, wherein said step (c) is carried out by varying angle of incidence of said beam of electromagnetic radiation between within ±5° of Brewsters angle for growth of one layer and an angle different from said Brewsters angle for growth of another layer.
Claim 26
Dependent Claim
68 words
A method according to claim 24, wherein said step (c) is carried out by altering polarization of said beam of electromagnetic radiation from polarization with the electric vector in the plane of incidence during growth of at least one layer of a first material to polarization with the electric vector having a component outside plane of incidence during growth of at least one layer of a second material.
Claim 27
Dependent Claim
27 words
A method according to claim 19, wherein said step (c) is carried out to radiantly heat said at least one layer during said growth of said material.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1993-09-24 | 1994-03-26 | 1994-09-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-09-24 | 1998-03-26 | 1998-09-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-09-24 | 2002-03-26 | 2002-09-25 | $7700.00 | Window Closed / Lapsed |