US4954212A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Endpoint detection system and method for plasma etching
Assignee: Philips Semiconductors Inc
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Filing: 1989-09-26
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Granted: 1990-09-04
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Expires: 2009-09-26
Abstract
Abstract A plasma etching endpoint detection system and method for plasma etching systems generates an endpoint signal when the etching system completes the etching of a designated layer on a semiconductor wafer and begins etching the layer below the designated layer. An impedance transformation circuit is tuned so that the selected tuning point has a predefined relationship to the point at which minimum power reflection occurs. As a result, when the etching system completes the etching of a designated layer, the amount of power reflected by the plasma etcher will change in a predefined fashion so as to facilitate the generation of an endpoint signal. In one embodiment, a tuning capacitor in the etcher's impedance transformation circuit is set at a level at which it is known that the amount of reflected power will increase when the designated layer has been completely etched. As a result, the intensity of light generated in the plasma will decrease at the endpoint of etching the designated layer. An optical sensor, which is tuned to a frequency at which light is generated while the designated layer is being etched, generates an endpoint signal when the emission intensity decreases below a specified level, and that endpoint signal is used to turn off the etcher's plasma power supply. In another embodiment, the plasma etcher's controller detects when the reflected power increases above a specified level, at which point it generates an endpoint signal that is used to turn off the etcher's plasma power supply.
Inventors
- 👤 Calvin T. Gabriel
- 👤 James E. Nulty
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 17:59
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32917; H01J37/32935
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
182 words
A plasma etching system, comprising: plasma etching means for etching a target having a designated layer to be etched and a underlying layer below said designated layer; power supply means coupled to said plasma etching means for providing power to said plasma etching means; impedance transformation means coupling said power supply means to said plasma etching means, said impedance transformation means including adjustment means for adjusting the impedance of said impedance transformation means; reflected power monitoring means for monitoring the amount of power from said power supply means reflected by said plasma etching means; control means, coupled to reflected power monitoring means and said adjustment means of said impedance transformation means, for adjusting the impedance of said impedance transformation means so that the amount of reflected power reflected by said plasma etching means increases when said plasma etching means completes the etching of said designated layer and begins etching said underlying layer; and endpoint detection means, coupled to said plasma etching means, for detecting when said plasma etching means completes the etching of said designated layer and begins etching said underlying layer.
Claim 2
Dependent Claim
182 words
A plasma etching system, comprising: plasma etching means for etching a target having a designated layer to be etched and a underlying layer below said designated layer; power supply means coupled to said plasma etching means for providing power to said plasma etching means; impedance transformation means coupling said power supply means to said plasma etching means, said impedance transformation means including adjustment means for adjusting the impedance of said impedance transformation means; reflected power monitoring means for monitoring the amount of power from said power supply means reflected by said plasma etching means; control means, coupled to reflected power monitoring means and said adjustment means of said impedance transformation means, for adjusting the impedance of said impedance transformation means so that the amount of reflected power reflected by said plasma etching means increases when said plasma etching means completes the etching of said designated layer and begins etching said underlying layer; and endpoint detection means, coupled to said plasma etching means, for detecting when said plasma etching means completes the etching of said designated layer and begins etching said underlying layer.
Claim 3
Dependent Claim
76 words
The plasma etching system set forth in claim 1, said endpoint detection means comprising optical sensor means for monitoring the intensity of light in said plasma etching means at a specified frequency and for generating an endpoint signal when said monitored intensity falls below a threshold level; said control means including means, coupled to said endpoint detection means and said power supply means, for turning off said power supply means when said endpoint signal is generated.
Claim 4
Dependent Claim
86 words
The plasma etching system set forth in claim 1, said endpoint detection means comprising comparator means, coupled to said reflected power monitoring means, for comparing the amount of power reflected by said plasma etching means with a threshold value and for generating an endpoint signal when said monitored amount of reflected power rises above said threshold value; said control means including means, coupled to said endpoint detection means and said power supply means, for turning off said power supply means when said endpoint signal is generated.
Claim 5
Dependent Claim
58 words
The plasma etching system set forth in claim 1, said endpoint detection means comprising means, coupled to said reflected power monitoring means, for comparing the amount of power reflected by said plasma etching means with a threshold value and for turning off said power supply means when said monitored amount of reflected power rises above said threshold value.
Claim 6
Dependent Claim
182 words
A plasma etching system, comprising: plasma etching means for etching a target having a designated layer to be etched and a underlying layer below said designated layer; power supply means coupled to said plasma etching means for providing power to said plasma etching means; impedance transformation means coupling said power supply means to said plasma etching means, said impedance transformation means including adjustment means for adjusting the impedance of said impedance transformation means; reflected power monitoring means for monitoring the amount of power from said power supply means reflected by said plasma etching means; control means, coupled to reflected power monitoring means and said adjustment means of said impedance transformation means, for adjusting the impedance of said impedance transformation means so that the amount of reflected power reflected by said plasma etching means decreases when said plasma etching means completes the etching of said designated layer and begins etching said underlying layer; and endpoint detection means, coupled to said plasma etching means, for detecting when said plasma etching means completes the etching of said designated layer and begins etching said underlying layer.
Claim 7
Dependent Claim
182 words
A plasma etching system, comprising: plasma etching means for etching a target having a designated layer to be etched and a underlying layer below said designated layer; power supply means coupled to said plasma etching means for providing power to said plasma etching means; impedance transformation means coupling said power supply means to said plasma etching means, said impedance transformation means including adjustment means for adjusting the impedance of said impedance transformation means; reflected power monitoring means for monitoring the amount of power from said power supply means reflected by said plasma etching means; control means, coupled to reflected power monitoring means and said adjustment means of said impedance transformation means, for adjusting the impedance of said impedance transformation means so that the amount of reflected power reflected by said plasma etching means decreases when said plasma etching means completes the etching of said designated layer and begins etching said underlying layer; and endpoint detection means, coupled to said plasma etching means, for detecting when said plasma etching means completes the etching of said designated layer and begins etching said underlying layer.
Claim 8
Dependent Claim
82 words
The plasma etching system set forth in claim 5, said endpoint detection means comprising optical sensor means for monitoring the intensity of light in said plasma etching means at a specified frequency, corresponding to etching said underlying layer, and for generating an endpoint signal when said monitored intensity rises above a threshold level; said control means including means, coupled to said endpoint detection means and said power supply means, for turning off said power supply means when said endpoint signal is generated.
Claim 9
Independent Claim
152 words
A method of detecting the completion of etching of a designated layer of material in a plasma etching system, the steps of the method comprising: placing a target having a designated layer to be etched and a underlying layer below said designated layer in a plasma etching chamber; coupling a power supply means to said plasma etching chamber with an adjustable impedance circuit, enabling said power supply to provide power to said plasma etching chamber; monitoring the amount of power from said power supply means reflected by said plasma etching chamber; adjusting the impedance of said adjustable impedance circuit so that the amount of reflected power reflected by said plasma etching chamber will increase when said plasma etching chamber completes the etching of said designated layer and begins etching said underlying layer; and detecting when said plasma etching chamber completes the etching of said designated layer and begins etching said underlying layer.
Claim 10
Independent Claim
152 words
A method of detecting the completion of etching of a designated layer of material in a plasma etching system, the steps of the method comprising: placing a target having a designated layer to be etched and a underlying layer below said designated layer in a plasma etching chamber; coupling a power supply means to said plasma etching chamber with an adjustable impedance circuit, enabling said power supply to provide power to said plasma etching chamber; monitoring the amount of power from said power supply means reflected by said plasma etching chamber; adjusting the impedance of said adjustable impedance circuit so that the amount of reflected power reflected by said plasma etching chamber will increase when said plasma etching chamber completes the etching of said designated layer and begins etching said underlying layer; and detecting when said plasma etching chamber completes the etching of said designated layer and begins etching said underlying layer.
Claim 11
Dependent Claim
73 words
The plasma etching method set forth in claim 7, said detecting step including the steps of: monitoring the intensity of light in said plasma etching chamber at a specified frequency; generating an endpoint signal when said monitored intensity falls below a threshold level; and turning off said power supply when said endpoint signal is generated; wherein said specified frequency corresponds to light generated by said plasma etching chamber while etching said designated layer.
Claim 12
Dependent Claim
48 words
The plasma etching method set forth in claim 7, said detecting step including the steps of: comparing the amount of power reflected by said plasma etching chamber with a threshold value; turning off said power supply when said monitored amount of reflected power rises above said threshold value.
Claim 13
Dependent Claim
58 words
The plasma etching method set forth in claim 7, said detecting step including the steps of: comparing the amount of power reflected by said plasma etching chamber with a threshold value; generating an endpoint signal when said monitored amount of reflected power rises above a threshold level; turning off said power supply when said endpoint signal is generated.
Claim 14
Independent Claim
152 words
A method of detecting the completion of etching of a designated layer of material in a plasma etching system, the steps of the method comprising: placing a target having a designated layer to be etched and a underlying layer below said designated layer in a plasma etching chamber; coupling a power supply means to said plasma etching chamber with an adjustable impedance circuit, enabling said power supply to provide power to said plasma etching chamber; monitoring the amount of power from said power supply means reflected by said plasma etching chamber; adjusting the impedance of said adjustable impedance circuit so that the amount of reflected power reflected by said plasma etching chamber will decrease when said plasma etching chamber completes the etching of said designated layer and begins etching said underlying layer; and detecting when said plasma etching chamber completes the etching of said designated layer and begins etching said underlying layer.
Claim 15
Independent Claim
152 words
A method of detecting the completion of etching of a designated layer of material in a plasma etching system, the steps of the method comprising: placing a target having a designated layer to be etched and a underlying layer below said designated layer in a plasma etching chamber; coupling a power supply means to said plasma etching chamber with an adjustable impedance circuit, enabling said power supply to provide power to said plasma etching chamber; monitoring the amount of power from said power supply means reflected by said plasma etching chamber; adjusting the impedance of said adjustable impedance circuit so that the amount of reflected power reflected by said plasma etching chamber will decrease when said plasma etching chamber completes the etching of said designated layer and begins etching said underlying layer; and detecting when said plasma etching chamber completes the etching of said designated layer and begins etching said underlying layer.
Claim 16
Dependent Claim
73 words
The plasma etching method set forth in claim 11, said detecting step including the steps of: monitoring the intensity of light in said plasma etching chamber at a specified frequency; generating an endpoint signal when said monitored intensity rises above a threshold level; and turning off said power supply when said endpoint signal is generated; wherein said specified frequency corresponds to light generated by said plasma etching chamber while etching said underlying layer.
References Cited (Backward Citations)
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Cited
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USPTO Annuity & Maintenance Windows
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| 3.5 Years (Year 4) | 1993-09-03 | 1994-03-05 | 1994-09-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-09-03 | 1998-03-05 | 1998-09-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-09-03 | 2002-03-05 | 2002-09-04 | $7700.00 | Window Closed / Lapsed |