Computerized multi-zone crystal growth furnace

Claim 2

A temperature control system for heating an article at an elevated steady state temperature and controlling said steady state temperature within precise, given limits, said system comprising heating means for receiving power to heat an article, said heating means comprising a substantially cylindrical hollow muffle formed of alumina ceramic in which the article to be heated is disposed, a number of heat generating windings wound upon the muffle, said windings being thermally coupled to said muffle to provide a quick heating response to power received by said heating means; light-actuated power control means connected to said heating means for passing power to said heating means in response to a light signal; light signal generating means for generating a light signal to actuate said power control means; a source of power connected to said power control means for providing power to said heating means when said power control means is actuated; temperature monitoring means associated with said article being heated for measuring the temperature of said article; and computer means operatively connected to said light signal generating means and said temperature monitoring means for providing commands to said light signal generating means in the form of a train of equidistantly spaced electrical pulses in response to a temperature measurement provided by said monitoring means, said temperature monitoring means comprising a plurality of thermocouples, at least one thermocouple for each said heating zone, each of said thermocouples being disposed approximately 0.03 to 0.375 inch radially outward from an outer surface of its respective winding.

Claim 3

The temperature control system of claim 1, wherein said windings are helically wound on said muffle and each of said windings defines a respective heating zone of a heating profile.

Claim 4

The temperature control system of claim 2, wherein each thermocouple is disposed approximately in a mid-portion of the length of its respective winding.

Claim 5

The temperature control system of claim 3, further comprising amplifying and digitizing means for amplifying and digitizing the output of each of said thermocouples prior to transmittal to said computer means.

Claim 6

The temperature control system of claim 4, wherein each of said thermocouples has leads encased in segmented ceramic tubing to provide flexibility for thermal expansion of said muffle.

Claim 7

The temperature control system of claim 1, further comprising layers of insulation surrounding said muffle.

Claim 8

The temperature control system of claim 6, wherein said layers of insulation comprise materials selected from a group consisting of a zircar felt paper; a safil blanket; ceramic fiber board and ceramic fiber blanket.

Claim 9

The temperature control system of claim 7, further comprising a liquid cooled outer shell surrounding said insulation layers.

Claim 10

The temperature control system of claim 1, wherein said windings are each encased in a castable alumina ceramic.

Claim 11

The temperature control system of claim 1, wherein said internal diameter of said muffle is approximately 2.5 inches and said muffle has an external diameter approximately 2.75 inches.

Claim 12

A temperature control system as claimed in claim 1, wherein said muffle has an internal diameter of 0.5 to 10.0 inches and a thickness of approximately 0.060 to 0.500 inch and wherein said electrical pulses range from at least zero to 100 pulses per 100 milliseconds.

Claim 13

A computerized temperature control system comprising a computer for calculating a heat cycle and issuing a series of command signals to a power supply in the form of equidistantly spaced electrical pulses in response to an incremental temperature measurement; a substantially cylindrical hollow muffle; a plurality of heating windings for heating an article at an elevated temperature, said heating windings being wound on said muffle, each winding defining a heating zone, and a number of zones forming a heating profile for an article being heated, said windings being thermally coupled to said muffle to provide a quick heating response to power received by said heating windings; a power supply operatively connected to said heating windings for supplying a series of power pulses thereto in response to command signals from said computer; isolation means for electrically isolating said computer from said power supply; and temperature monitoring means operatively connected to said computer and disposed adjacent said article for obtaining temperature measurements from said heated article, said computer being operative to incrementally interrogate said temperature monitoring means, and in response to a temperature measurement signal, calculate a duty cycle comprising a series of command pulses for actuating said power supply, said temperature monitoring means comprising a plurality of thermocouples, at least one thermocouple for each said heating zone, each of said thermocouples being disposed approximately 0.03 to 0.375 inch radially outward from an outer surface of its respective winding.

Claim 14

A computerized temperature control system comprising a computer for calculating a heat cycle and issuing a series of command signals to a power supply in the form of equidistantly spaced electrical pulses in response to an incremental temperature measurement; a substantially cylindrical hollow muffle; a plurality of heating windings for heating an article at an elevated temperature, said heating windings being wound on said muffle, each winding defining a heating zone, and a number of zones forming a heating profile for an article being heated, said windings being thermally coupled to said muffle to provide a quick heating response to power received by said heating windings; a power supply operatively connected to said heating windings for supplying a series of power pulses thereto in response to command signals from said computer; isolation means for electrically isolating said computer from said power supply; and temperature monitoring means operatively connected to said computer and disposed adjacent said article for obtaining temperature measurements from said heated article, said computer being operative to incrementally interrogate said temperature monitoring means, and in response to a temperature measurement signal, calculate a duty cycle comprising a series of command pulses for actuating said power supply, said temperature monitoring means comprising a plurality of thermocouples, at least one thermocouple for each said heating zone, each of said thermocouples being disposed approximately 0.03 to 0.375 inch radially outward from an outer surface of its respective winding.

Claim 15

The computerized temperature control system of claim 12, wherein each thermocouple is disposed approximately in a mid-portion of the length of its respective winding.

Claim 16

The computerized temperature control system of claim 13, further comprising amplifying and digitizing means for amplifying and digitizing the output of each of said thermocouples prior to transmittal to said computer means.

Claim 17

The computerized temperature control system of claim 14, wherein each of said thermocouples has leads encased in segmented ceramic tubing to provide flexibility for thermal expansion of said muffle.

Claim 18

The computerized temperature control system of claim 12, further comprising layers of insulation surrounding said muffle.

Claim 19

The computerized temperature control system of claim 16, wherein said layers of insulation comprise materials selected from a group consisting of a zircar felt paper; a safil blanket; ceramic fiber board and ceramic fiber blanket.

Claim 20

The computerized temperature control system of claim 17, further comprising a liquid cooled outer shell surrounding said insulation layers.

Claim 21

The computerized temperature control system of claim 12, wherein each of said heating element windings is encased in a castable alumina ceramic.

Claim 22

The computerized temperature control system of claim 12, wherein said muffle has an internal diameter of approximately 2.5 inches and said muffle has an external diameter of approximately 2.75 inches.

Claim 23

The computerized temperature control system of claim 20, wherein said muffle has spaced opposite ends and is anchored at one end as a reference for thermal expansion.

Claim 24

A computerized temperature control system as claimed in claim 12, wherein said electrical pulses range from at least zero to 100 pulses per 100 milliseconds and wherein said muffle is formed of alumina ceramic in which the article to be heated is disposed, said muffle having an internal diameter in a range of 0.5 to 10 inches and a thickness of approximately 0.060 to 0.500 inch.

Claim 25

A heating system for heating an article at an elevated steady state temperature and controlling said steady state temperature within precise, given limits, said heating system comprising heating means for receiving power to heat an article; light-actuated power control means connected to said heating means for passing power to said heating means in response to a light signal; light signal generating means for generating a light signal to actuate said power control means; a source of power connected to said power control means for providing power to said heating means when said power control means is actuated; temperature monitoring means associated with said article being heated for measuring the temperature of said article, said temperature monitoring means being approximately 0.03 to 0.375 inch radially outward from an outer surface of its respective heating means; and computer means operatively connected to said light signal generating means and said temperature monitoring means for providing commands to said light signal generating means in the form of a train of equidistantly spaced electrical pulses in response to a temperature measurement provided by said monitoring means.

Claim 26

A heating system for heating an article at an elevated steady state temperature and controlling said steady state temperature within precise, given limits, said heating system comprising heating means for receiving power to heat an article; light-actuated power control means connected to said heating means for passing power to said heating means in response to a light signal; light signal generating means for generating a light signal to actuate said power control means; a source of power connected to said power control means for providing power to said heating means when said power control means is actuated; temperature monitoring means associated with said article being heated for measuring the temperature of said article, said temperature monitoring means being approximately 0.03 to 0.375 inch radially outward from an outer surface of its respective heating means; and computer means operatively connected to said light signal generating means and said temperature monitoring means for providing commands to said light signal generating means in the form of a train of equidistantly spaced electrical pulses in response to a temperature measurement provided by said monitoring means.

Claim 27

The heating system of claim 23, wherein said light signal generating means comprises a light emitting diode.

Claim 28

The heating system of claim 23, wherein said power control means comprises a photosensitive transistor.

Claim 29

The heating system of claim 23, wherein said temperature monitoring means comprises a thermocouple.

Claim 30

The heating system of claim 23, wherein said computer means causes a series of pulses to be fed to said light generating means, whereby said power is passed to said heating means in a series of pulses.

Claim 31

The heating system of claim 23, wherein said temperature monitoring means comprises a thermocouple disposed adjacent said heated article.

Claim 32

The heating system of claim 28, wherein said computer means interrogates said thermocouple incrementally.

Claim 33

The heating system of claim 29, wherein said thermocouple has a plurality of outputs and said incremental interrogation comprises scanning all of said thermocouple outputs approximately at least once every 2.4 seconds.

Claim 34

The heating system of claim 23, wherein said computing means calculates a duty cycle of pulsed commands provided to said light signal generating means in response to a measurement of said temperature monitoring means.

Claim 35

The heating system of claim 23, wherein said train of equidistantly spaced electrical pulses range from at least zero to 100 pulses per 100 milliseconds.

Claim 36

A computerized temperature control system, comprising a computer for calculating a heat cycle and issuing a series of command signals to a power supply in the form of equidistantly spaced electrical pulses in a response to an incremental temperature measurement; a plurality of heating elements for heating an article at an elevated temperature; a power supply operatively connected to said heating elements for supplying a series of power pulses thereto in response to said computer commands; isolation means electrically isolating said computer from said power supply; and temperature monitoring means operatively connected to said computer and disposed adjacent to said article for obtaining temperature measurements from said heated article, said computer operative to incrementally interrogate said temperature monitoring means, and in response to a temperature measurement signal, calculate a duty cycle comprising a series of command pulses for actuating said power supply, said temperature monitoring means being approximately 0.03 to 0.375 inch radially outward from an outer surface of its respective heating element.

Claim 37

A computerized temperature control system, comprising a computer for calculating a heat cycle and issuing a series of command signals to a power supply in the form of equidistantly spaced electrical pulses in a response to an incremental temperature measurement; a plurality of heating elements for heating an article at an elevated temperature; a power supply operatively connected to said heating elements for supplying a series of power pulses thereto in response to said computer commands; isolation means electrically isolating said computer from said power supply; and temperature monitoring means operatively connected to said computer and disposed adjacent to said article for obtaining temperature measurements from said heated article, said computer operative to incrementally interrogate said temperature monitoring means, and in response to a temperature measurement signal, calculate a duty cycle comprising a series of command pulses for actuating said power supply, said temperature monitoring means being approximately 0.03 to 0.375 inch radially outward from an outer surface of its respective heating element.

Claim 38

The computerized temperature control system of claim 33, wherein said temperature monitoring means comprises a plurality of thermocouples whose respective response times are less than the time said computer takes to incrementally interrogate said thermocouples.

Claim 39

The computerized temperature control system of claim 33, wherein said isolation means comprises light generating means operatively connected to said computer and in response to said computer commands providing a series of light pulses, and a plurality of light-sensitive switching means, each operatively disposed between said power supply and a corresponding one of said heating elements for passing power to said heating elements in response to said light pulses.

Claim 40

The computerized temperature control system of claim 35, wherein each of said switching means comprises a phototransistor.

Claim 41

The computerized temperature control system of claim 35, wherein said light generating means comprises a plurality of light-emitting diodes, each associated with a respective one of said switching means.

Claim 42

The computerized temperature control system of claim 33, wherein said uniformly spaced electrical pulses range from at least zero to 100 pulses per 100 milliseconds.

Claim 43

A temperature control system for heating an article at an elevated steady state temperature and controlling said steady state temperature within precise, given limits, said temperature control system comprising heating means for receiving power to heat an article, said heating means comprising a substantially cylindrical hollow muffle formed of alumina ceramic in which the article to be heated is disposed, a number of heat generating windings wound upon the muffle, whose internal diameter is in a range between 0.5 to 10.0 inches, and whose thickness is approximately between 0.060 and 0.500 inch, said windings being helically wound on said muffle and thermally coupled to said muffle to provide a quick heating response to power received by said heating means, each of said windings defining a respective heating zone of a heating profile; light-actuated power control means connected to said heating means for passing power to said heating means in response to a light signal; light signal generating means for generating a light signal to actuated said power control means; a source of power connected to said power control means for providing power to said heating means when said power control means is actuated; temperature monitoring means associated with said article being heated for measuring the temperature of said article, said temperature monitoring means comprising a plurality of thermocouples, at least one theremocouple for each said heating zone, each of said thermocouples being disposed approximately in a mid-portion of the length its respective winding and being approximately 0.03 to 0.375 inch radially outward from an outer surface of its respective winding; computer means operatively connected to said light signal generating means and said temperature monitoring means for providing commands to said light signal generating means in the form of a train of equidistantly spaced electrical pulses ranging from at least zero to 100 pulses per 100 milliseconds, in response to a temperature measurement provided by said monitoring means; and amplifying and digitizing means for amplifying and digitizing the output of each of said thermocouples prior to transmittal to said computer means.

Claim 44

A temperature control system for heating an article at an elevated steady state temperature and controlling said steady state temperature within precise, given limits, said temperature control system comprising heating means for receiving power to heat an article, said heating means comprising a substantially cylindrical hollow muffle formed of alumina ceramic in which the article to be heated is disposed, a number of heat generating windings wound upon the muffle, whose internal diameter is in a range between 0.5 to 10.0 inches, and whose thickness is approximately between 0.060 and 0.500 inch, said windings being helically wound on said muffle and thermally coupled to said muffle to provide a quick heating response to power received by said heating means, each of said windings defining a respective heating zone of a heating profile; light-actuated power control means connected to said heating means for passing power to said heating means in response to a light signal; light signal generating means for generating a light signal to actuated said power control means; a source of power connected to said power control means for providing power to said heating means when said power control means is actuated; temperature monitoring means associated with said article being heated for measuring the temperature of said article, said temperature monitoring means comprising a plurality of thermocouples, at least one theremocouple for each said heating zone, each of said thermocouples being disposed approximately in a mid-portion of the length its respective winding and being approximately 0.03 to 0.375 inch radially outward from an outer surface of its respective winding; computer means operatively connected to said light signal generating means and said temperature monitoring means for providing commands to said light signal generating means in the form of a train of equidistantly spaced electrical pulses ranging from at least zero to 100 pulses per 100 milliseconds, in response to a temperature measurement provided by said monitoring means; and amplifying and digitizing means for amplifying and digitizing the output of each of said thermocouples prior to transmittal to said computer means.

Claim 45

The temperature control system of claim 39, wherein each of said thermocouples has leads encased in segmented ceramic tubing to provide flexibility for thermal expansion of said muffle.

Claim 46

A computerized temperature control system comprising a computer for calculating a heat cycle and issuing a series of command signals to a power supply in the form of equidistantly spaced electrical pulses ranging from at least zero to 100 pulses per 100 milliseconds in response to an incremental temperature measurement; a substantially cylindrical hollow muffle formed of alumina ceramic in which an article to be heated is disposed, said muffle having an internal diameter in a range of 0.5 to 10 inches and a thickness of approximately 0.060 and 0.500 inch; a plurality of heating windings for heating an article at an elevated temperature, said heating windings being wound on said muffle, each winding defining a heating zone, and a number of zones forming a heating profile for said article being heated, said windings being thermally coupled to said muffle to provide a quick heating response to power received by said heating windings; a power supply operatively connected to said heating windings for supplying a series of power pulses thereto is response to command signals from said computer; isolation means for electrically isolating said computer from said power supply; and temperature monitoring means operatively connected to said computer and disposed adjacent said article for obtaining temperature measurements from said heated article, said computer being operative to incrementally interrogate said temperature monitoring means, and in response to a temperature measurement signal, calculate a duty cycle comprising a series of command pulses for actuating said power supply, said temperature monitoring means comprising a plurality of thermocouples, at least one thermocouple for each said heating zone, each of said thermocouples being disposed approximately in a mid-portion of the length of its respective winding and being approximately 0.03 to 0.375 inch radially outward from an outer surface of its respective winding; and amplifying and digitizing means for amplifying and digitizing the output of each of said thermocouples prior to transmittal to said computer means.

Claim 47

A computerized temperature control system comprising a computer for calculating a heat cycle and issuing a series of command signals to a power supply in the form of equidistantly spaced electrical pulses ranging from at least zero to 100 pulses per 100 milliseconds in response to an incremental temperature measurement; a substantially cylindrical hollow muffle formed of alumina ceramic in which an article to be heated is disposed, said muffle having an internal diameter in a range of 0.5 to 10 inches and a thickness of approximately 0.060 and 0.500 inch; a plurality of heating windings for heating an article at an elevated temperature, said heating windings being wound on said muffle, each winding defining a heating zone, and a number of zones forming a heating profile for said article being heated, said windings being thermally coupled to said muffle to provide a quick heating response to power received by said heating windings; a power supply operatively connected to said heating windings for supplying a series of power pulses thereto is response to command signals from said computer; isolation means for electrically isolating said computer from said power supply; and temperature monitoring means operatively connected to said computer and disposed adjacent said article for obtaining temperature measurements from said heated article, said computer being operative to incrementally interrogate said temperature monitoring means, and in response to a temperature measurement signal, calculate a duty cycle comprising a series of command pulses for actuating said power supply, said temperature monitoring means comprising a plurality of thermocouples, at least one thermocouple for each said heating zone, each of said thermocouples being disposed approximately in a mid-portion of the length of its respective winding and being approximately 0.03 to 0.375 inch radially outward from an outer surface of its respective winding; and amplifying and digitizing means for amplifying and digitizing the output of each of said thermocouples prior to transmittal to said computer means.

Claim 48

The computerized temperature control system of claim 40, wherein each of said thermocouples has leads encased in segmented ceramic tubing to provide flexibility for thermal expansion of said muffle.