US4948962A
Expired / Lapsed
US
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Plasma ion source mass spectrometer
Assignee: Hitachi Ltd
•
Filing: 1989-06-06
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Granted: 1990-08-14
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Expires: 2009-06-06
Abstract
Abstract Disclosed is a plasma ion source mass spectrometer comprising an ion source in which a sample to be detected is ionized in plasma and a mass spectrometer which mass-separates and detects the ionized sample supplied from the ion source, characterized in that there is provided a gas introduction means for introducing into a region before the mass spectrometer a gas containing particles which can bring about a charge transfer reaction with background ions contained in particles supplied from the ion source or a gas containing particles which can bring about an energy transfer reaction with excited molecule contained in the particles supplied from the ion source. By providing such gas introduction means, background ions or excited molecule can be efficiently quenched and enhancement of sensitivity of plasma ion source mass spectrometer can be attained.
Inventors
- 👤 Yasuhiro Mitsui
- 👤 Satoshi Shimura
- 👤 Tsutomu Komoda
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 07:30
CPC Classifications
H; H01; H01J; H01J49/00; H01J49/02; H01J49/10; H01J49/12
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
76 words
A plasma ion source mass spectrometer comprising an ion source in which a sample to be detected is ionized with plasma and a mass spectrometer which mass-separates and detects the ionized sample supplied from the ion source wherein a gas introduction means is provided for introducing into a region before the mass spectrometer a gas containing particles which can bring about a charge transfer reaction with background ions contained in particles supplied from the ion source.
Claim 2
Dependent Claim
76 words
A plasma ion source mass spectrometer comprising an ion source in which a sample to be detected is ionized with plasma and a mass spectrometer which mass-separates and detects the ionized sample supplied from the ion source wherein a gas introduction means is provided for introducing into a region before the mass spectrometer a gas containing particles which can bring about a charge transfer reaction with background ions contained in particles supplied from the ion source.
Claim 3
Dependent Claim
34 words
A plasma ion source mass spectrometer according to claim 1, wherein the gas introduction means is constructed so that the gas is introduced into a part connecting the ion source and the mass spectrometer.
Claim 4
Dependent Claim
27 words
A plasma ion source mass spectrometer according to claim 1, wherein the gas introduction means is constructed so that the gas is introduced into the ion source.
Claim 5
Dependent Claim
44 words
A plasma ion source mass spectrometer according to claim 2, wherein a region is provided where gas particles introduced into the a part connecting the ion source and the mass spectrometer by the gas introduction means collide with the particles from the ion source.
Claim 6
Dependent Claim
26 words
A plasma ion source mass spectrometer according to claim 1, wherein a means to prevent release of electron is provided at exit of the ion source.
Claim 7
Dependent Claim
26 words
A plasma ion source mass spectrometer according to claim 1, wherein the gas introduction means has a means to control the introduction amount of the gas.
Claim 8
Dependent Claim
27 words
A plasma ion source mass spectrometer according to claim 6, wherein an evacuation amount controlling means is provided in a differential pumping region of the mass spectrometer.
Claim 9
Dependent Claim
41 words
A plasma ion source mass spectrometer according to claim 7, wherein the introduction amount controlling means and the evacuation amount controlling means are automatically controlled to control collision of the particles of the gas with the gas from said ion source.
Claim 10
Dependent Claim
52 words
A plasma ion source mass spectrometer according to claim 1, wherein gas introduction mechanism used for the gas introduction means comprises nozzles for introducing the gas which are provided at a plurality of positions in the circumferential direction of the flow of particles introduced into the mass spectrometer from the ion source.
Claim 11
Dependent Claim
76 words
A plasma ion source mass spectrometer comprising an ion source in which a sample to be detected is ionized with plasma and a mass spectrometer which mass-separates and detects the ionized sample supplied from the ion source wherein a gas introduction means is provided for introducing into a region before the mass spectrometer a gas containing particles which can bring about an energy transfer reaction with excited molecule contained in particles supplied from the ion source.
Claim 12
Dependent Claim
76 words
A plasma ion source mass spectrometer comprising an ion source in which a sample to be detected is ionized with plasma and a mass spectrometer which mass-separates and detects the ionized sample supplied from the ion source wherein a gas introduction means is provided for introducing into a region before the mass spectrometer a gas containing particles which can bring about an energy transfer reaction with excited molecule contained in particles supplied from the ion source.
Claim 13
Dependent Claim
34 words
A plasma ion source mass spectrometer according to claim 10, wherein the gas introduction means is constructed so that the gas is introduced into a part connecting the ion source and the mass spectrometer.
Claim 14
Dependent Claim
27 words
A plasma ion source mass spectrometer according to claim 10, wherein the gas introduction means is constructed so that the gas is introduced into the ion source.
Claim 15
Dependent Claim
43 words
A plasma ion source mass spectrometer according to claim 11, wherein a region is provided where gas particles introduced into a part connecting the ion source and the mass spectrometer by the gas introduction means collide with the particles from the ion source.
Claim 16
Dependent Claim
26 words
A plasma ion source mass spectrometer according to claim 10, wherein a means to prevent escape of electron is provided at exit of the ion source.
Claim 17
Dependent Claim
26 words
A plasma ion source mass spectrometer according to claim 10, wherein the gas introduction means has a means to control the introduction amount of the gas.
Claim 18
Dependent Claim
27 words
A plasma ion source mass spectrometer according to claim 15, wherein an evacuation amount controlling means is provided in a differential pumping region of the mass spectrometer.
Claim 19
Dependent Claim
41 words
A plasma ion source mass spectrometer according to claim 16, wherein the introduction amount controlling means and the evacuation amount controlling means are automatically controlled to control collision of the particles of the gas with the gas from said ion source.
Claim 20
Dependent Claim
52 words
A plasma ion source mass spectrometer according to claim 10, wherein gas introduction mechanism used for the gas introduction means comprises nozzles for introducing the gas which are provided at a plurality of positions in the circumferential direction of the flow of particles introduced into the mass spectrometer from the ion source.
Claim 21
Dependent Claim
73 words
A plasma ion source mass spectrometer comprising an ion source in which a sample is ionized with plasma and a mass spectrometer which mass-separates and detects particles supplied from the ion source in which is provided a means to allow the particles supplied from the ion source to collide with particles which can remove charge from background ions other than the ions to be detected among the particles supplied from the ion source.
Claim 22
Dependent Claim
73 words
A plasma ion source mass spectrometer comprising an ion source in which a sample is ionized with plasma and a mass spectrometer which mass-separates and detects particles supplied from the ion source in which is provided a means to allow the particles supplied from the ion source to collide with particles which can remove charge from background ions other than the ions to be detected among the particles supplied from the ion source.
Claim 23
Dependent Claim
39 words
A plasma ion source mass spectrometer according to claim 19, wherein the particles which can remove charge are those which have an intermediate ionization potential between that of the ions to be detected and that of the background ions.
Claim 24
Dependent Claim
73 words
A plasma ion source mass spectrometer comprising an ion source in which a sample is ionized with plasma and a mass spectrometer which mass-separates and detects particles supplied from the ion source in which is provided a means to allow the particles supplied from the ion source to collide with particles which can remove energy from excited particles other than the ions to be detected among the particles supplied from the ion source.
Claim 25
Dependent Claim
73 words
A plasma ion source mass spectrometer comprising an ion source in which a sample is ionized with plasma and a mass spectrometer which mass-separates and detects particles supplied from the ion source in which is provided a means to allow the particles supplied from the ion source to collide with particles which can remove energy from excited particles other than the ions to be detected among the particles supplied from the ion source.
Claim 26
Dependent Claim
40 words
A plasma ion source mass spectrometer according to claim 21, wherein the particles which can remove energy are those which have an intermediate ionization potential between energy of the excited particles and ionization potential of the ions to be detected.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-08-13 | 1994-02-12 | 1994-08-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-08-13 | 1998-02-12 | 1998-08-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-08-13 | 2002-02-12 | 2002-08-14 | $7700.00 | Window Closed / Lapsed |