US4944645A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for loading objects into evacuated treating chamber
Assignee: Shibaura Machine Co Ltd
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Filing: 1989-01-11
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Granted: 1990-07-31
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Expires: 2009-01-11
Abstract
Abstract In a method and apparatus for depicting a circuit pattern on an article such as a semiconductor wafer, glass mask or a reticle supported by a stage in an evacuated casing with an electron beam, the article is disposed in a magazine contained in a sealable chamber communicated with the evacuated chamber. The article is contacted with a heat adjusting member to adjust the temperature thereof. After matching the level of the article with that of the stage, the article is loaded on the stage.
Inventors
- 👤 Akira Suzuki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 16:57
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/30; H10P72/33; H10P72/3306; H10P72/04; H10P72/0431; H10P72/0432; H10P72/3308; H10P95/00
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
178 words
Apparatus for loading an article to be treated into an evacuated treating casing, said article being depicted with a circuit pattern in said treating casing with an electron beam at a predetermined temperature, comprising: a sealable chamber communicating with said evacuated treating casing; a magazine disposed in said sealable chamber for supporting said article which has been preadjusted to a temperature substantially equal to said predetermined temperature; temperature adjusting means disposed in said sealable chamber such that said temperature adjusting means can contact directly with a surface of a holder supporting said article for adjusting temperature of said article to said predetermined temperature in order to compensate for a temperature variation of said article caused by adiabatic expansion of gas exhausted from said sealable chamber; means for loading said article whose temperature has been adjusted to said a predetermined temperature by said temperature adjusting means into said treating casing; and a plurality of holders contained in said magazine, each holder supporting an article, and an elevator means for successively bringing one of said holders to a predetermined level.
Claim 2
Dependent Claim
178 words
Apparatus for loading an article to be treated into an evacuated treating casing, said article being depicted with a circuit pattern in said treating casing with an electron beam at a predetermined temperature, comprising: a sealable chamber communicating with said evacuated treating casing; a magazine disposed in said sealable chamber for supporting said article which has been preadjusted to a temperature substantially equal to said predetermined temperature; temperature adjusting means disposed in said sealable chamber such that said temperature adjusting means can contact directly with a surface of a holder supporting said article for adjusting temperature of said article to said predetermined temperature in order to compensate for a temperature variation of said article caused by adiabatic expansion of gas exhausted from said sealable chamber; means for loading said article whose temperature has been adjusted to said a predetermined temperature by said temperature adjusting means into said treating casing; and a plurality of holders contained in said magazine, each holder supporting an article, and an elevator means for successively bringing one of said holders to a predetermined level.
Claim 3
Dependent Claim
17 words
The apparatus according to claim 1 wherein dimensions of said article are measured with an electron beam.
Claim 4
Dependent Claim
42 words
The apparatus according to claim 1 wherein said chamber is connected to another chamber having a door through vacuum tight valve means, so that said first chamber can be maintained in an evacuated state when said article is exchanged through said door.
Claim 5
Dependent Claim
30 words
The apparatus according to claim 1 which further comprises temperature measuring means for measuring a temperature of said article when the holder is in contact with said temperature adjusting means.
Claim 6
Dependent Claim
22 words
The apparatus according to claim 1 further comprising a heat insulating supporting member for supporting said temperature adjusting means in said chamber.
Claim 7
Dependent Claim
24 words
The apparatus according to claim 1 further comprising means for passing fluid heated or cooled at a constant temperature through said temperature adjusting means.
Claim 8
Dependent Claim
32 words
The apparatus according to claim 6 wherein said insulating supporting member is provided with an internal passage for passing fluid heated or cooled to a predetermined temperature through said temperature adjusting means.
Claim 9
Dependent Claim
19 words
The apparatus according to claim 1 further comprising means for resiliently supporting said heat adjusting means in said chamber.
Claim 10
Dependent Claim
14 words
The apparatus according to claim 8 wherein said resiliently supporting means comprises a bellows.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-07-30 | 1994-01-29 | 1994-07-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-07-30 | 1998-01-29 | 1998-07-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-07-30 | 2002-01-29 | 2002-07-31 | $7700.00 | Window Closed / Lapsed |