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Surface acoustic wave element

Assignee: Faurecia Clarion Electronics Co Ltd
•
Filing: 1989-06-20
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Granted: 1990-07-24
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Expires: 2009-06-20
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Abstract

Abstract In a surface acoustic wave element comprising a semiconductor substrate, a piezoelectric layer formed thereon and at least one interdigital electrode disposed on the surface thereof, a semiconductor region having a conductivity type different from that of the semiconductor substrate is disposed on the outer side of the interdigital electrode just below the piezoelectric layer.

Inventors

  • 👤 Syuichi Mitsutsuka

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-06 13:15
CPC Classifications
H; H03; H03H; H03H9/00; H03H9/02; H03H9/02535; H03H9/0296; H03H9/02976; G; G06; G06G; G06G7/00; G06G7/12; G06G7/19; G06G7/195

Claims Analysis

Total Claims: 7
Claim 1
Independent Claim 66 words
A surface acoustic wave element comprising: a first conductivity type semiconductor substrate; a piezoelectric layer formed on said semiconductor substrate; at least one interdigital electrode disposed on said piezoelectric layer; and a second conductivity type semiconductor region disposed at a position on the side of the end surface of said substrate, viewed from said interdigital electrode, in the upper surface portion just below said piezoelectric layer.
Claim 2
Dependent Claim 66 words
A surface acoustic wave element comprising: a first conductivity type semiconductor substrate; a piezoelectric layer formed on said semiconductor substrate; at least one interdigital electrode disposed on said piezoelectric layer; and a second conductivity type semiconductor region disposed at a position on the side of the end surface of said substrate, viewed from said interdigital electrode, in the upper surface portion just below said piezoelectric layer.
Claim 3
Dependent Claim 74 words
A surface acoustic wave element comprising: a first conductivity type semiconductor substrate; an insulating layer formed on said semiconductor substrate; a piezoelectric layer formed on said semiconductor substrate; at least one interdigital electrode disposed on said piezoelectric layer; and a second conductivity type semiconductor region disposed at a position on the side of the end surface of said substrate, viewed from said interdigital electrode, in the upper surface portion just below said piezoelectric layer.
Claim 4
Dependent Claim 74 words
A surface acoustic wave element comprising: a first conductivity type semiconductor substrate; an insulating layer formed on said semiconductor substrate; a piezoelectric layer formed on said semiconductor substrate; at least one interdigital electrode disposed on said piezoelectric layer; and a second conductivity type semiconductor region disposed at a position on the side of the end surface of said substrate, viewed from said interdigital electrode, in the upper surface portion just below said piezoelectric layer.
Claim 5
Dependent Claim 20 words
A surface acoustic wave element according to claim 1 wherein said semiconductor substrate has a semiconductor/high impurity concentration semiconductor structure.
Claim 6
Dependent Claim 39 words
A surface acoustic wave element according to claim 1 or 2 wherein the mode of the surface acoustic wave is Sezawa wave; the semiconductor is Si; the face orientation of Si is (110); and the propagation direction is [100].
Claim 7
Dependent Claim 39 words
A surface acoustic wave element according to claim 1 or 2 wherein the mode of the surface acoustic wave is Sezawa wave; the semiconductor is Si; the face orientation of Si is (100); and the propagation direction is [110].

References Cited (Backward Citations)

US3805195A Cited
US4013983A Cited
US3946338A Cited
DE3048817A1 Cited
US4773138A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1993-07-23 1994-01-22 1994-07-24 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1997-07-23 1998-01-22 1998-07-24 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2001-07-23 2002-01-22 2002-07-24 $7700.00 Window Closed / Lapsed

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