US4941734A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Beam allocation and delivery system for excimer laser
Assignee: TE Connectivity Corp
•
Filing: 1988-11-18
•
Granted: 1990-07-17
•
Expires: 2008-11-18
Abstract
Abstract The present invention is directed to a beam allocation and delivery system for an excimer laser in which substantially the full energy from such laser is delivered to a precise area or areas of a workpiece. This efficient system is achieved by the use of one or more elongated light-guides to direct the laser beam. Included therewith are means to shape and focus said beam to a reduced image on the workpiece. Preferably, the shaping and focussing is achieved by changing the cross-section of the light-guide from a first configuration to a second configuration, and by an imaging lens.
Inventors
- 👤 Richard T. Williams
- 👤 Jeff C. Wu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 10:39
CPC Classifications
G; G02; G02B; G02B27/00; G02B27/09; G02B27/0938; G02B27/0988; G02B6/00; G02B6/02
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
148 words
An efficient system for reshaping a fixed, generally rectangular excimer laser beam and focussing such reshaped beam onto a workpiece remote from a source of said excimer laser beam, the system comprising an excimer laser emitting a generally rectangular beam, a first end of at least one elongated fibrous or solid light-guide disposed adjacent the beam source, where the cross-section of said first end of said elongated fibrous of solid light-guide is of a first size sufficient to fully accept said rectangular beam, and a remote end of said elongated fibrous or solid light-guide is of a second size, smaller than the first size of "diamond" shaped cross-section whereby to direct said laser beam onto a workpiece disposed a distance therefrom, said beam being transmitted through said elongated fibrous or solid light-guide and reshaped from rectangular to "diamond" shaped, and focused onto said workpiece by an imaging lens.
Claim 2
Dependent Claim
148 words
An efficient system for reshaping a fixed, generally rectangular excimer laser beam and focussing such reshaped beam onto a workpiece remote from a source of said excimer laser beam, the system comprising an excimer laser emitting a generally rectangular beam, a first end of at least one elongated fibrous or solid light-guide disposed adjacent the beam source, where the cross-section of said first end of said elongated fibrous of solid light-guide is of a first size sufficient to fully accept said rectangular beam, and a remote end of said elongated fibrous or solid light-guide is of a second size, smaller than the first size of "diamond" shaped cross-section whereby to direct said laser beam onto a workpiece disposed a distance therefrom, said beam being transmitted through said elongated fibrous or solid light-guide and reshaped from rectangular to "diamond" shaped, and focused onto said workpiece by an imaging lens.
Claim 3
Dependent Claim
25 words
The laser beam reshaping system according to claim 6, wherein said imaging lens is located between said elongated fibrous or solid light-guide and said workpiece.
Claim 4
Dependent Claim
31 words
The laser beam reshaping system according to claim 1, wherein said system is a component of a laser assisted plating operation, and that said workpiece is the product to be plated.
Claim 5
Dependent Claim
25 words
The laser beam reshaping system according to claim 1, wherein the length of said elongated fibrous or solid light-guide is less than about 10 cm.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-07-16 | 1994-01-15 | 1994-07-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-07-16 | 1998-01-15 | 1998-07-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-07-16 | 2002-01-15 | 2002-07-17 | $7700.00 | Window Closed / Lapsed |