US4936967A
Expired / Lapsed
US
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Method of detecting an end point of plasma treatment
Assignee: Hitachi Ltd
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Filing: 1987-01-05
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Granted: 1990-06-26
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Expires: 2007-01-05
Abstract
Abstract The present invention relates to a method of and apparatus for detecting an end point of plasma treatment of a specimen. There is included selecting plasma spectrum having a characteristic wavelength from the plasma spectrum generating at the time of reaction in the plasma treatment of a specimen, setting a disregarding time for the plasma treatment end point detection, assuming, at the stage when the disregarding time for treatment end point detection has elapsed, a quantity of the selected plasma spectrum up to the time of said stage based on a quantity of same plasma spectrum at the time of said stage and a variation with the time in the last said quantity of plasma spectrum, and detecting the reaction time end point from the assumed quantity of plasma spectrum and an actual quantity of the same plasma spectrum after the time of said stage thereby making it possible to prevent erroneous detection of the end point of reaction in the plasma treatment and detect accurately the same even when the reaction time of the plasma treatment is short.
Inventors
- 👤 Shoji Ikuhara
- 👤 Keiji Tada
- 👤 Yoshinao Kawasaki
- 👤 Katsuyoshi Kudo
- 👤 Minoru Soraoka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 04:09
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32917; H01J37/32935
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
251 words
A method for detecting an end point of a plasma treatment of a specimen comprising the steps of: selecting a characteristic wavelength from a plasma spectrum generated during the reaction time when the specimen is being treated with the plasma and measuring a quantity of the plasma spectrum having the selected characteristic wavelength; differentiating the measured quantity of the selected plasma spectrum having said characteristic wavelength as a function of plasma treatment reaction time to obtain a differential value; setting a disregarding time period defining a portion of the reaction time which is not considered in determining said end point, said disregarding time period beginning at the start of the plasma treatment reaction time; assuming a linear relationship between the quantity of the selected plasma spectrum having said characteristic wavelength and the plasma treatment reaction time up to the end of the disregarding time period based on the measured quantity of the selected plasma spectrum having said characteristic wavelength and its slope at the point in time when the disregarding time period elapses; at the point in time when the disregarding time period elapses initiating the differential value of the measured quantity of plasma spectrum having said characteristic wavelength as a function of time at the value obtained by differentiating the assumed linear relationship; and after the end of the disregarding time period detecting the end point of the plasma treatment reaction of the specimen when the differential value or the derivative of the differential value reaches a predetermined reference value.
Claim 2
Independent Claim
251 words
A method for detecting an end point of a plasma treatment of a specimen comprising the steps of: selecting a characteristic wavelength from a plasma spectrum generated during the reaction time when the specimen is being treated with the plasma and measuring a quantity of the plasma spectrum having the selected characteristic wavelength; differentiating the measured quantity of the selected plasma spectrum having said characteristic wavelength as a function of plasma treatment reaction time to obtain a differential value; setting a disregarding time period defining a portion of the reaction time which is not considered in determining said end point, said disregarding time period beginning at the start of the plasma treatment reaction time; assuming a linear relationship between the quantity of the selected plasma spectrum having said characteristic wavelength and the plasma treatment reaction time up to the end of the disregarding time period based on the measured quantity of the selected plasma spectrum having said characteristic wavelength and its slope at the point in time when the disregarding time period elapses; at the point in time when the disregarding time period elapses initiating the differential value of the measured quantity of plasma spectrum having said characteristic wavelength as a function of time at the value obtained by differentiating the assumed linear relationship; and after the end of the disregarding time period detecting the end point of the plasma treatment reaction of the specimen when the differential value or the derivative of the differential value reaches a predetermined reference value.
Claim 3
Dependent Claim
30 words
A method of detecting an end point of plasma treatment as defined in claim 1, wherein the end point is detected when the differential value reaches a predetermined reference value.
Claim 4
Dependent Claim
33 words
A method of detecting an end point of plasma treatment as defined in claim 1, wherein the end point is detected when the derivative of the differential value reaches a predetermined reference value.
Claim 5
Independent Claim
249 words
A method for detecting an end point of a plasma treatment of a specimen comprising the steps of: selecting a characteristic wavelength from a radiation generated as a reaction product during the reaction time when the specimen is being etched by plasma treatment and measuring a quantity of the radiation having the selected characteristic wavelength; differentiating the measured quantity of the selected radiation having said characteristic wavelength as a function of plasma treatment reaction time to obtain a differential value; setting a disregarding time period defining a portion of the reaction time which is not considered in determining said end point, said disregarding time period beginning at the start of the plasma treatment reaction time; assuming a linear relationship between the quantity of the selected radiation having said characteristic wavelength and the plasma treatment reaction time up to the end of the disregarding time period based on the measured quantity of the selected radiation having said characteristic wavelength and its slope at the point in time when the disregarding time period elapses; at the point in time when the disregarding time period elapses initiating the differential value of the measured quantity of radiation having the characteristic wavelength as a function of time at the value obtained by differentiating the assumed linear relationship; and after the end of the disregarding time period detecting the end point of the plasma treatment reaction of the specimen when the differential value or the derivative of the differential value reaches a predetermined reference value.
Claim 6
Independent Claim
249 words
A method for detecting an end point of a plasma treatment of a specimen comprising the steps of: selecting a characteristic wavelength from a radiation generated as a reaction product during the reaction time when the specimen is being etched by plasma treatment and measuring a quantity of the radiation having the selected characteristic wavelength; differentiating the measured quantity of the selected radiation having said characteristic wavelength as a function of plasma treatment reaction time to obtain a differential value; setting a disregarding time period defining a portion of the reaction time which is not considered in determining said end point, said disregarding time period beginning at the start of the plasma treatment reaction time; assuming a linear relationship between the quantity of the selected radiation having said characteristic wavelength and the plasma treatment reaction time up to the end of the disregarding time period based on the measured quantity of the selected radiation having said characteristic wavelength and its slope at the point in time when the disregarding time period elapses; at the point in time when the disregarding time period elapses initiating the differential value of the measured quantity of radiation having the characteristic wavelength as a function of time at the value obtained by differentiating the assumed linear relationship; and after the end of the disregarding time period detecting the end point of the plasma treatment reaction of the specimen when the differential value or the derivative of the differential value reaches a predetermined reference value.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-06-25 | 1993-12-25 | 1994-06-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-06-25 | 1997-12-25 | 1998-06-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-06-25 | 2001-12-25 | 2002-06-26 | $7700.00 | Window Closed / Lapsed |