US4934774A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Optical waveguide and method for its manufacture
Assignee: Nortel Networks UK Ltd
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Filing: 1989-06-08
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Granted: 1990-06-19
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Expires: 2009-06-08
Abstract
Abstract An optical waveguide is made by forming a layer of SiO 2 on a substrate and implanting a region of the SiO 2 layer with Si ions to define a region containing a stoichiometric excess of Si which defines a region having an elevated refractive index surrounded by a region having a lower refractive index. The resulting optical waveguide is stable at the high temperatures required for many semiconductor processing methods, and is useful for optical interconnection in integrated optical and optoelectronic devices.
Inventors
- 👤 Alexander Kalnitsky
- 👤 Joseph P. Ellul
- 👤 Albert R. Boothroyd
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 12:23
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/13; G02B6/134; G02B6/1347
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
47 words
An optical waveguide, comprising: a substrate; and a layer of SiO 2 on the substrate, the layer of SiO 2 comprising a region containing a stoichiometric excess of Si which defines a region having an elevated refractive index surrounded by a region having a lower refractive index.
Claim 2
Dependent Claim
47 words
An optical waveguide, comprising: a substrate; and a layer of SiO 2 on the substrate, the layer of SiO 2 comprising a region containing a stoichiometric excess of Si which defines a region having an elevated refractive index surrounded by a region having a lower refractive index.
Claim 3
Dependent Claim
20 words
An optical waveguide as defined in claim 1, wherein the stoichiometric excess of Si defines a graded refractive index profile.
Claim 4
Dependent Claim
24 words
An optical waveguide as defined in claim 2, wherein the stoichiometric excess of Si as a function of depth approximates a Gaussian distribution function.
References Cited (Backward Citations)
US4582299A
Cited
US4715672A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-06-18 | 1993-12-18 | 1994-06-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-06-18 | 1997-12-18 | 1998-06-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-06-18 | 2001-12-18 | 2002-06-19 | $7700.00 | Window Closed / Lapsed |