US4933635A
Expired / Lapsed
US
⏱️ 0.0 years remaining
In-line process monitors for thin film wiring
Assignee: International Business Machines Corp
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Filing: 1988-12-22
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Granted: 1990-06-12
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Expires: 2008-12-22
Abstract
Abstract A thin film region 14 of a multichip carrier 10 is provided with at least one fabrication process or tooling monitor for monitoring the quality of the fabrication process during the sequential formation of the layers of the region 14. The process monitor is formed with a desired layer or layers of the thin film region, such as by a photolithographic process. A centrally disposed active wiring region 30 of a layer is surrounded by peripherally disposed fabrication monitor sites 32. The sites 32 can be located such that they do not occupy or interfere with the surface area required for the wiring region 30 while still being disposed near enough to the wiring region such that the electrical and physical characteristics of the thin film is substantially the same. Four different types of thin film fabrication process monitors are disclosed, including a line/via monitor, a dielectric monitor, a laser assisted repair monitor and a laser assisted engineering change monitor.
Inventors
- 👤 Alina Deutsch
- 👤 Modest M. Oprysko
- 👤 John J. Ritsko
- 👤 Laura B. Rothman
- 👤 Helen L. Yeh
- 👤 Atilio Zupicich
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 18:52
CPC Classifications
H; H10; H10P; H10P74/00; H10P74/27; H10P74/277; G; G01; G01R; G01R31/00; G01R31/28; G01R31/2801; G01R31/2818; H10W; H10W70/00; H10W70/60; H10W70/62; H10W70/63; H10W72/00; H10W72/071; H10W72/072; H10W72/07251; H10W72/20
Claims Analysis
Total Claims: 36
Claim 1
Independent Claim
99 words
A device for conductively coupling together a plurality of integrated circuit chips, the device including at least one layer of thin film material having an active wiring area comprised of electrical conductors and an electrical insulator, the active wiring area conductively coupling together, in a required manner, electrical terminals of at least some of the plurality of integrated circuit chips, the at least one layer further comprising at least one thin film fabrication process monitor integrally formed therewith at a position or positions which do not reduce the area of or otherwise significantly interfere with the active wiring area.
Claim 2
Independent Claim
99 words
A device for conductively coupling together a plurality of integrated circuit chips, the device including at least one layer of thin film material having an active wiring area comprised of electrical conductors and an electrical insulator, the active wiring area conductively coupling together, in a required manner, electrical terminals of at least some of the plurality of integrated circuit chips, the at least one layer further comprising at least one thin film fabrication process monitor integrally formed therewith at a position or positions which do not reduce the area of or otherwise significantly interfere with the active wiring area.
Claim 3
Dependent Claim
28 words
A device as set forth in claim 1 wherein the at least one thin film fabrication process monitor is disposed at a periphery of the active wiring area.
Claim 4
Dependent Claim
51 words
A device as set forth in claim 1 wherein one of the at least one thin film fabrication process monitor monitors the quality of fabrication of the electrical conductors within the active wiring area and includes a length of electrical conductor having at least one test pad coupled to each end.
Claim 5
Dependent Claim
33 words
A device as set forth in claim 3 wherein the length of electrical conductor has a width which is substantially equal to a width of the electrical conductors within the active wiring region.
Claim 6
Dependent Claim
44 words
A device as set forth in claim 4 wherein the device includes a plurality of layers of thin film material and wherein the length of electrical conductor is disposed such that it repetitively traverses through a plurality of layers of the thin film material.
Claim 7
Dependent Claim
17 words
A device as set forth in claim 5 wherein the width is approximately ten to thirty micrometers.
Claim 8
Independent Claim
122 words
A device for coupling together a plurality of integrated circuit chips, the device including at least one layer of thin film material having an active wiring area comprised of electrical conductors and an electrical insulator, the at least one layer further comprising at least one thin film fabrication process monitor integrally formed therewith at a position or positions which do not reduce the area of or otherwise significantly interfere with the active wiring area, and wherein one of the at least thin film fabrication process monitor monitors the quality of a dielectric constant associated with the electrical insulator and includes a first and a second electrically conductive plate means having at least one intervening layer comprised of the electrical insulator interposed therebetween.
Claim 9
Independent Claim
122 words
A device for coupling together a plurality of integrated circuit chips, the device including at least one layer of thin film material having an active wiring area comprised of electrical conductors and an electrical insulator, the at least one layer further comprising at least one thin film fabrication process monitor integrally formed therewith at a position or positions which do not reduce the area of or otherwise significantly interfere with the active wiring area, and wherein one of the at least thin film fabrication process monitor monitors the quality of a dielectric constant associated with the electrical insulator and includes a first and a second electrically conductive plate means having at least one intervening layer comprised of the electrical insulator interposed therebetween.
Claim 10
Dependent Claim
49 words
A device as set forth in claim 7 wherein the first plate means is disposed beneath the second plate means, the first plate means having at least one electrically conductive via coupled to an edge thereof and extending upwardly through the at least one intervening layer of electrical insulator.
Claim 11
Dependent Claim
23 words
A device as set forth in claim 8 wherein each of the plate means has a substantially circular shape having a predetermined diameter.
Claim 12
Dependent Claim
16 words
A device as set forth in claim 9 wherein the predetermined diameter is approximately 600 micrometers.
Claim 13
Independent Claim
131 words
A device including at least one layer of thin film material having an active wiring area comprised of electrical conductors and an electrical insulator, the at least one layer further comprising at least one thin film fabrication process monitor integrally formed therewith at a position or positions which do not reduce the area of or otherwise significantly interfere with the active wiring area, wherein one of the at least one thin film fabrication process monitor monitors the quality of a laser tool-assisted fabrication or repair of the electrical conductors within the active wiring area and includes at least two electrical conductors which are spaced apart from one another such that a laser tool conductively couples the two spaced apart conductors together by generating an electrically conductive region between the two conductors.
Claim 14
Independent Claim
131 words
A device including at least one layer of thin film material having an active wiring area comprised of electrical conductors and an electrical insulator, the at least one layer further comprising at least one thin film fabrication process monitor integrally formed therewith at a position or positions which do not reduce the area of or otherwise significantly interfere with the active wiring area, wherein one of the at least one thin film fabrication process monitor monitors the quality of a laser tool-assisted fabrication or repair of the electrical conductors within the active wiring area and includes at least two electrical conductors which are spaced apart from one another such that a laser tool conductively couples the two spaced apart conductors together by generating an electrically conductive region between the two conductors.
Claim 15
Independent Claim
122 words
A device including at least one layer of thin film material having an active wiring area comprised of electrical conductors and an electrical insulator, the at least one layer further comprising at least one thin film fabrication process monitor integrally formed therewith at a position or positions which do not reduce the area of or otherwise significantly interfere with the active wiring area, wherein one of the at least one thin film fabrication process monitor monitors the quality of a laser tool-assisted fabrication or repair of the electrical conductors within the active wiring area and includes at least one electrical conductor disposed such that a test conductor formed by a laser tool is readily compared to the electrical conductor by visual inspection.
Claim 16
Independent Claim
122 words
A device including at least one layer of thin film material having an active wiring area comprised of electrical conductors and an electrical insulator, the at least one layer further comprising at least one thin film fabrication process monitor integrally formed therewith at a position or positions which do not reduce the area of or otherwise significantly interfere with the active wiring area, wherein one of the at least one thin film fabrication process monitor monitors the quality of a laser tool-assisted fabrication or repair of the electrical conductors within the active wiring area and includes at least one electrical conductor disposed such that a test conductor formed by a laser tool is readily compared to the electrical conductor by visual inspection.
Claim 17
Dependent Claim
167 words
A multi-chip carrier comprising: a substrate; a region comprised of a plurality of thin film layers disposed one upon another to form a multilayered structure, at least one of the layers having an active wiring area comprised of a plurality of electrically conductive pathways insulated one from another by electrically insulating material, the region having a bottom surface which overlies a top surface of the substrate; and a plurality of electrically conductive terminals, the terminals being disposed upon a top surface of the region, conductively coupled to certain of the pathways, and for connecting to electrical terminals of at least a plurality of integrated circuit chip means for interconnecting together, in a predetermined manner, the chip means, and wherein at least one of the thin film layers includes at least one thin film fabrication process monitor integrally formed therewith and determining a predetermined characteristic of the associated thin film layer either alone or in combination with a predetermined characteristic of one or more underlying thin film layers.
Claim 18
Dependent Claim
167 words
A multi-chip carrier comprising: a substrate; a region comprised of a plurality of thin film layers disposed one upon another to form a multilayered structure, at least one of the layers having an active wiring area comprised of a plurality of electrically conductive pathways insulated one from another by electrically insulating material, the region having a bottom surface which overlies a top surface of the substrate; and a plurality of electrically conductive terminals, the terminals being disposed upon a top surface of the region, conductively coupled to certain of the pathways, and for connecting to electrical terminals of at least a plurality of integrated circuit chip means for interconnecting together, in a predetermined manner, the chip means, and wherein at least one of the thin film layers includes at least one thin film fabrication process monitor integrally formed therewith and determining a predetermined characteristic of the associated thin film layer either alone or in combination with a predetermined characteristic of one or more underlying thin film layers.
Claim 19
Dependent Claim
31 words
A carrier as set forth in claim 13 wherein the at least one thin film fabrication process monitor is disposed outside of and at a periphery of the active wiring area.
Claim 20
Dependent Claim
25 words
A carrier as set forth in claim 13 wherein the at least one thin film fabrication process monitor is disposed within the active wiring area.
Claim 21
Dependent Claim
35 words
A carrier as set forth in claim 13 wherein one of the at least one thin film fabrication process monitor monitors the quality of fabrication of the electrically conductive pathways within the active wiring area.
Claim 22
Dependent Claim
153 words
A multi-chip carrier comprising: a substrate; a region comprised of a plurality of thin film layers, at least one of the layers having an active wiring area comprised of a plurality of electrically conductive pathways insulated one from another by electrically insulating material, the region having a bottom surface which overlies a top surface of the substrate; and a plurality of electrically conductive terminals, the terminals being disposed upon a top surface of the region, conductively coupled to certain of the pathways, and for connecting to electrical terminals of at least integrated circuit chip means for interconnecting together, in a predetermined manner, the chip means, and wherein at least one of the thin film layers includes at least one thin film fabrication process monitor integrally formed therewith, and wherein one of the at least one thin film fabrication process monitor monitors the value of a dielectric constant associated with the electrically insulating material.
Claim 23
Dependent Claim
153 words
A multi-chip carrier comprising: a substrate; a region comprised of a plurality of thin film layers, at least one of the layers having an active wiring area comprised of a plurality of electrically conductive pathways insulated one from another by electrically insulating material, the region having a bottom surface which overlies a top surface of the substrate; and a plurality of electrically conductive terminals, the terminals being disposed upon a top surface of the region, conductively coupled to certain of the pathways, and for connecting to electrical terminals of at least integrated circuit chip means for interconnecting together, in a predetermined manner, the chip means, and wherein at least one of the thin film layers includes at least one thin film fabrication process monitor integrally formed therewith, and wherein one of the at least one thin film fabrication process monitor monitors the value of a dielectric constant associated with the electrically insulating material.
Claim 24
Dependent Claim
154 words
A multi-chip carrier comprising: a substrate; a region comprised of a plurality of thin film layers, at least one of the layers having an active wiring area comprised of a plurality of electrically conductive pathways insulated one from another by electrically insulating material, the region having a bottom surface which overlies the top surface of the substrate; and a plurality of electrically conductive terminals, the terminals being disposed upon a top surface of the region, conductively coupled to certain of the pathways, and for connecting to electrical terminals of at least integrated circuit chip means for interconnecting together, in a predetermined manner, the chip means, and wherein at least one of the thin film layers includes at least one thin film fabrication process monitor integrally formed therewith, wherein one of the at least one thin film fabrication process monitor monitors the quality of a laser assisted fabrication or repair of the electrically conductive pathways.
Claim 25
Dependent Claim
154 words
A multi-chip carrier comprising: a substrate; a region comprised of a plurality of thin film layers, at least one of the layers having an active wiring area comprised of a plurality of electrically conductive pathways insulated one from another by electrically insulating material, the region having a bottom surface which overlies the top surface of the substrate; and a plurality of electrically conductive terminals, the terminals being disposed upon a top surface of the region, conductively coupled to certain of the pathways, and for connecting to electrical terminals of at least integrated circuit chip means for interconnecting together, in a predetermined manner, the chip means, and wherein at least one of the thin film layers includes at least one thin film fabrication process monitor integrally formed therewith, wherein one of the at least one thin film fabrication process monitor monitors the quality of a laser assisted fabrication or repair of the electrically conductive pathways.
Claim 26
Independent Claim
133 words
A method of fabricating a device having at least two thin film layers, a second one of the layers overlying a first one of the layers, comprising the steps of: forming the first thin film layer such that the layer includes an active wiring region including a plurality of electrically conductive pathways and an electrical insulator; providing, during the step of forming, at least one thin film fabrication process monitor upon the layer at a position or positions which do not reduce an area of or otherwise significantly interfere with the active wiring region; and detecting, by way of the at least one process monitor and before a subsequent step of forming the second thin film layer over the first thin film layer, at least one characteristic of the first thin film layer.
Claim 27
Independent Claim
133 words
A method of fabricating a device having at least two thin film layers, a second one of the layers overlying a first one of the layers, comprising the steps of: forming the first thin film layer such that the layer includes an active wiring region including a plurality of electrically conductive pathways and an electrical insulator; providing, during the step of forming, at least one thin film fabrication process monitor upon the layer at a position or positions which do not reduce an area of or otherwise significantly interfere with the active wiring region; and detecting, by way of the at least one process monitor and before a subsequent step of forming the second thin film layer over the first thin film layer, at least one characteristic of the first thin film layer.
Claim 28
Dependent Claim
49 words
A method as set forth in claim 19 wherein the step of providing provides at least one electrically conductive test pathway for monitoring the quality of fabrication of the electrically conductive pathways and wherein the step of detecting includes a step of measuring a resistance of the test pathway.
Claim 29
Independent Claim
166 words
A method of fabricating a device having at least one thin film layer comprising the steps of: forming the at least one thin film layer such that the at least one layer includes an active wiring region including a plurality of electrically conductive pathways and an electrical insulator; providing, during the step of forming, at least one thin film fabrication process monitor upon the at least one layer at a position or positions which do not reduce an area of or otherwise significantly interfere with the active wiring region; and detecting, by way of the at least one process monitor, at least one characteristic of the at least one thin film layer, wherein the step of providing provides a structure which includes two spaced apart conductive plates having the electrical insulator disposed therebetween and wherein the step of detecting includes a step of measuring a capacitance associated with the structure, the measured capacitance being indicative of at least the dielectric constant associated with the electrical insulator.
Claim 30
Independent Claim
166 words
A method of fabricating a device having at least one thin film layer comprising the steps of: forming the at least one thin film layer such that the at least one layer includes an active wiring region including a plurality of electrically conductive pathways and an electrical insulator; providing, during the step of forming, at least one thin film fabrication process monitor upon the at least one layer at a position or positions which do not reduce an area of or otherwise significantly interfere with the active wiring region; and detecting, by way of the at least one process monitor, at least one characteristic of the at least one thin film layer, wherein the step of providing provides a structure which includes two spaced apart conductive plates having the electrical insulator disposed therebetween and wherein the step of detecting includes a step of measuring a capacitance associated with the structure, the measured capacitance being indicative of at least the dielectric constant associated with the electrical insulator.
Claim 31
Independent Claim
146 words
A method of fabricating a device having at least one thin film layer comprising the steps of: forming the at least one thin film layer such that the at least one layer includes an active wiring region including a plurality of electrically conductive pathways and an electrical insulator; providing, during the step of forming, at least one thin film fabrication process monitor upon the at least one layer at a position or positions which do not reduce an area of or otherwise significantly interfere with the active wiring region; and detecting, by way of the at least one process monitor, at least one characteristic of the at least one thin film layer, and wherein the step of providing provides one of the at least one thin film fabrication process monitor for monitoring the quality of a laser assisted fabrication or repair of the electrically conductive pathways.
Claim 32
Independent Claim
146 words
A method of fabricating a device having at least one thin film layer comprising the steps of: forming the at least one thin film layer such that the at least one layer includes an active wiring region including a plurality of electrically conductive pathways and an electrical insulator; providing, during the step of forming, at least one thin film fabrication process monitor upon the at least one layer at a position or positions which do not reduce an area of or otherwise significantly interfere with the active wiring region; and detecting, by way of the at least one process monitor, at least one characteristic of the at least one thin film layer, and wherein the step of providing provides one of the at least one thin film fabrication process monitor for monitoring the quality of a laser assisted fabrication or repair of the electrically conductive pathways.
Claim 33
Independent Claim
110 words
A method of calibrating a laser tool for operation on a thin film layer comprising the steps of: providing the thin film layer including a plurality of electrically conductive pathways and an electrical insulator, the layer also being provided with a laser tool calibration region having at least one electrically conductive region; operating the laser tool within the laser tool calibration region to form a test conductor therein, the test conductor being closely adjacent to or in contact with the at least one conductive region; measuring a characteristic of the test conductor; and adjusting, if necessary, one or more operational parameters of the laser tool based upon the measured characteristic.
Claim 34
Independent Claim
110 words
A method of calibrating a laser tool for operation on a thin film layer comprising the steps of: providing the thin film layer including a plurality of electrically conductive pathways and an electrical insulator, the layer also being provided with a laser tool calibration region having at least one electrically conductive region; operating the laser tool within the laser tool calibration region to form a test conductor therein, the test conductor being closely adjacent to or in contact with the at least one conductive region; measuring a characteristic of the test conductor; and adjusting, if necessary, one or more operational parameters of the laser tool based upon the measured characteristic.
Claim 35
Dependent Claim
27 words
A method as set forth in claim 23 wherein the step of measuring includes a step of determining a value of electrical resistance of the test conductor.
Claim 36
Dependent Claim
22 words
A method as sat forth in claim 23 wherein the step of measuring includes a step of visually inspecting the test conductor.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-06-11 | 1993-12-11 | 1994-06-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-06-11 | 1997-12-11 | 1998-06-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-06-11 | 2001-12-11 | 2002-06-12 | $7700.00 | Window Closed / Lapsed |