US4929838A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Magnetic object lens for an electron beam exposure apparatus which processes a wafer carried on a continuously moving stage
Assignee: Fujitsu Semiconductor Ltd
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Filing: 1989-02-14
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Granted: 1990-05-29
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Expires: 2009-02-14
Abstract
Abstract An electron beam exposure apparatus scans an electron beam in a limited space for electron beam lithography. A magnetic object lens of the apparatus has a lower pole piece facing an object to be processed, which is placed on a continuously moving stage to be exposed to the electron beam. A bore is opened in the lower pole piece which faces the object, and has a stripe-like cross-section to allow the passage of the electron beam. The shape of the opening inhibits the passage of undesirable leakage magnetic flux issued from the magnetic lens toward the object, and guides the electron beam to land on the object perpendicularly. With this configuration, deflection aberration of the deflection apparatus which is caused by an eddy current induced in the moving stage due to the magnetic flux reaching the stage is substantially prevented, and normal landing of the electron beam on the object is realized.
Inventors
- 👤 Hiroshi Yasuda
- 👤 Masahiko Suzuki, deceased
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:29
CPC Classifications
H; H01; H01J; H01J3/00; H01J3/14; H01J3/20; B; B82; B82Y; B82Y10/00; B82Y40/00; H01J37/00; H01J37/02; H01J37/04; H01J37/10; H01J37/14; H01J37/141; H01J37/30; H01J37/317; H01J37/3174; H01J2237/00; H01J2237/02; H01J2237/0203; H01J2237/0209; H01J2237/10; H01J2237/14; H01J2237/1405; H01J2237/1415
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
169 words
An electron beam exposure apparatus for projecting an electron beam onto an object which is continuously moving in a moving direction, by scanning the electron beam in a predetermined scanning space extending in a scanning direction, comprising: a movable stage having a surface for supporting the object, said stage being substantially continuously movable in the moving direction; a magnetic lens system including: means for emitting electrons; means for focusing the electrons into an electron beam, said focusing means having a magnetic object lens comprising: a coil for generating magnetic flux; an upper pole piece made of magnetic material and positioned adjacent said coil; and a lower pole piece made of magnetic material, positioned adjacent said coil and disposed to face the object, said lower pole piece having an opening coincident with the predetermined scanning space of the electron beam, the electron beam passing through said opening, said lower pole piece substantially preventing magnetic flux generated by said lens from reaching said stage; and means for deflecting the electron beam.
Claim 2
Dependent Claim
169 words
An electron beam exposure apparatus for projecting an electron beam onto an object which is continuously moving in a moving direction, by scanning the electron beam in a predetermined scanning space extending in a scanning direction, comprising: a movable stage having a surface for supporting the object, said stage being substantially continuously movable in the moving direction; a magnetic lens system including: means for emitting electrons; means for focusing the electrons into an electron beam, said focusing means having a magnetic object lens comprising: a coil for generating magnetic flux; an upper pole piece made of magnetic material and positioned adjacent said coil; and a lower pole piece made of magnetic material, positioned adjacent said coil and disposed to face the object, said lower pole piece having an opening coincident with the predetermined scanning space of the electron beam, the electron beam passing through said opening, said lower pole piece substantially preventing magnetic flux generated by said lens from reaching said stage; and means for deflecting the electron beam.
Claim 3
Dependent Claim
22 words
An electron beam exposure apparatus as set forth in claim 1, wherein said magnetic material of said lower pole piece is ferrite.
Claim 4
Dependent Claim
18 words
An electron beam exposure apparatus as set forth in claim 1, wherein said surface supports a semiconductor wafer.
Claim 5
Dependent Claim
29 words
An electron beam exposure apparatus as set forth in claim 1, wherein the scanning direction of the electron beam is substantially perpendicular to the moving direction of said stage.
Claim 6
Dependent Claim
46 words
An electron beam exposure apparatus as set forth in claim 1, wherein the shape of said opening in said lower pole piece is a stripe longitudinally extending in the scanning direction of the electron beam, having a length substantially longer than the width of the stripe.
Claim 7
Dependent Claim
32 words
An electron beam exposure apparatus as set forth in claim 5, wherein a side wall of said opening is formed to be substantially perpendicular to the surface of said lower pole piece.
Claim 8
Dependent Claim
21 words
An electron beam exposure apparatus as set forth in claim 5, further comprising coils positioned on opposite sides of said opening.
Claim 9
Dependent Claim
91 words
An electron beam exposure apparatus for scanning an electron beam in a predetermined scanning space extending in a scanning direction and irradiating an object mounted on a stage which is substantially continuously moving in a predetermined moving direction, comprising a magnetic object lens for focusing the electron beam, said magnetic object lens comprising a lower pole piece of magnetic material facing the object, said lower pole piece having an opening having a shape corresponding to the predetermined scanning space of the electron beam, the electron beam passing through the limited opening.
Claim 10
Dependent Claim
91 words
An electron beam exposure apparatus for scanning an electron beam in a predetermined scanning space extending in a scanning direction and irradiating an object mounted on a stage which is substantially continuously moving in a predetermined moving direction, comprising a magnetic object lens for focusing the electron beam, said magnetic object lens comprising a lower pole piece of magnetic material facing the object, said lower pole piece having an opening having a shape corresponding to the predetermined scanning space of the electron beam, the electron beam passing through the limited opening.
Claim 11
Dependent Claim
131 words
An electron beam exposure apparatus for projecting an electron beam onto an object, comprising: a movable stage having a surface for supporting the object, said stage being movable in a moving direction; means for forming an electron beam and for scanning the electron beam in a predetermined scanning pattern; and a magnetic object lens for focusing the electron beam, said magnetic object lens being positioned in the path of the electron beam and opposite said stage, said magnetic object lens including a pole piece disposed to face said stage, said pole piece having an opening with shape corresponding to the predetermined scanning pattern of the electron beam, the electron beam passing through said opening, said pole piece substantially preventing magnetic flux generated by said magnetic object lens from reaching said stage.
Claim 12
Dependent Claim
131 words
An electron beam exposure apparatus for projecting an electron beam onto an object, comprising: a movable stage having a surface for supporting the object, said stage being movable in a moving direction; means for forming an electron beam and for scanning the electron beam in a predetermined scanning pattern; and a magnetic object lens for focusing the electron beam, said magnetic object lens being positioned in the path of the electron beam and opposite said stage, said magnetic object lens including a pole piece disposed to face said stage, said pole piece having an opening with shape corresponding to the predetermined scanning pattern of the electron beam, the electron beam passing through said opening, said pole piece substantially preventing magnetic flux generated by said magnetic object lens from reaching said stage.
Claim 13
Dependent Claim
18 words
An electron beam exposure apparatus according to claim 9, wherein said opening of said pole piece is rectangular.
Claim 14
Dependent Claim
37 words
An electron beam exposure apparatus according to claim 10, wherein the rectangular opening has a length within a range from 20 mm to 40 mm and a width within a range from 4 mm to 6 mm.
Claim 15
Dependent Claim
18 words
An electron beam exposure apparatus according to claim 10, wherein said pole piece is formed of magnetic material.
Claim 16
Dependent Claim
27 words
An electron beam exposure apparatus according to claim 12, wherein the scanning direction of the electron beam is substantially perpendicular to the moving direction of said stage.
Claim 17
Dependent Claim
30 words
An electron beam exposure apparatus according to claim 13, wherein said opening has a side wall which is formed to be substantially perpendicular to the surface of said pole piece.
Claim 18
Dependent Claim
70 words
An electron beam exposure apparatus according to claim 10, wherein said opening has a side wall which is formed to be substantially perpendicular to the surface of said pole piece, said electron beam exposure apparatus further comprising first and second coils coupled to the side walls of said opening along the length of said side walls, so that said first and second coils oppose each other inside said rectangular opening.
Claim 19
Dependent Claim
37 words
An electron beam exposure apparatus according to claim 9, wherein said opening of said pole piece has a length of a first dimension and a width of a second dimension which is less than the first dimension.
Claim 20
Dependent Claim
108 words
A magnetic object lens for an electron beam exposure apparatus which projects an electron beam onto an object supported by a stage movable in a moving direction, the electron beam having a predetermined scanning pattern, comprising: a coil for generating magnetic flux; a first pole piece positioned adjacent said coil; and a second pole piece positioned adjacent said coil and disposed to face the object, said second pole piece having an opening with a shape corresponding to the predetermined scanning pattern of the electron beam, the electron beam passing through said opening, said second pole piece substantially preventing magnetic flux generated by said coil from reaching the stage.
Claim 21
Dependent Claim
108 words
A magnetic object lens for an electron beam exposure apparatus which projects an electron beam onto an object supported by a stage movable in a moving direction, the electron beam having a predetermined scanning pattern, comprising: a coil for generating magnetic flux; a first pole piece positioned adjacent said coil; and a second pole piece positioned adjacent said coil and disposed to face the object, said second pole piece having an opening with a shape corresponding to the predetermined scanning pattern of the electron beam, the electron beam passing through said opening, said second pole piece substantially preventing magnetic flux generated by said coil from reaching the stage.
Claim 22
Dependent Claim
13 words
A magnetic object lens according to claim 17, wherein said opening is rectangular.
Claim 23
Dependent Claim
36 words
A magnetic object lens according to claim 18, wherein said rectangular opening has a length within a range of 20 mm to 40 mm and a width within a range from 4 mm to 6 mm.
Claim 24
Dependent Claim
20 words
A magnetic object lens according to claim 17, wherein said first and second pole pieces are made of magnetic material.
Claim 25
Dependent Claim
19 words
A magnetic object lens according to claim 20, wherein said first and second pole pieces are made of ferrite.
Claim 26
Dependent Claim
68 words
A magnetic object lens according to claim 18, wherein said opening has side walls which are formed to be substantially perpendicular to the surface of said second pole piece, said magnetic object lens further comprising first and second coils coupled to the side walls of said opening along the length of said side walls, so that said first and second coils oppose each other inside said rectangular opening.
Claim 27
Dependent Claim
32 words
A magnetic object lens according to claim 17, wherein said opening has a length of a first dimension and a width of a second dimension which is less than a first dimension.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-05-28 | 1993-11-27 | 1994-05-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-05-28 | 1997-11-27 | 1998-05-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-05-28 | 2001-11-27 | 2002-05-29 | $7700.00 | Window Closed / Lapsed |