US4925308A
Expired / Lapsed
US
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Calibration of three-dimensional space
Assignee: Rudolph Technologies Inc
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Filing: 1988-08-09
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Granted: 1990-05-15
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Expires: 2008-08-09
Abstract
Abstract A method and apparatus is provided for calibrating distance measuring instruments, in particular, optical three dimensional measurement sensors. The method is not restricted to aligning the motion of the calibrating surface to be parallel to the sensor centerline. Accordingly more than one sensor can be present during the calibration procedure. This leads to the practicality of aligning multiple sensor systems using a common translation stage for all sensors or using translation stages that are a part of the system. The joint calibration of sensors embedded in a system guarantees proper registration without additional steps. A method for calibrating optical sensors to accuracies approaching the wavelength of light is given.
Inventors
- 👤 Howard K. Stern
- 👤 William Yonescu
- 👤 Daniel A. Briceno
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 21:22
CPC Classifications
G; G01; G01B; G01B11/00; G01B11/002; G01B11/005
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
109 words
A method for calibrating one dimension of an optical three-dimensional measurement sensor comprising the steps of aligning a flat plate perpendicular to a direction of controlled linear motion, said linear motion having a defined length of travel; aligning a sensor with a measurement center line located at a non-zero angle relative to said linear motion such that the surface of said plate is measurable by said sensor along said defined length of travel; recording measurements obtained from said sensor for specific locations of said plate along said length of travel; determining deviations from orthogonality of said plate from said direction of linear motion; and correcting the recorded measurements accordingly.
Claim 2
Independent Claim
109 words
A method for calibrating one dimension of an optical three-dimensional measurement sensor comprising the steps of aligning a flat plate perpendicular to a direction of controlled linear motion, said linear motion having a defined length of travel; aligning a sensor with a measurement center line located at a non-zero angle relative to said linear motion such that the surface of said plate is measurable by said sensor along said defined length of travel; recording measurements obtained from said sensor for specific locations of said plate along said length of travel; determining deviations from orthogonality of said plate from said direction of linear motion; and correcting the recorded measurements accordingly.
Claim 3
Dependent Claim
17 words
A method as defined in claim 1, wherein said sensor is moved and said plate remains stationary.
Claim 4
Independent Claim
191 words
A method for calibrating the three dimensions of an optical three-dimensional measurement sensor comprising the steps of: aligning a flat plate perpendicular to a direction of controlled linear motion, said linear motion having a defined length of travel; aligning a sensor with a measurement center line located at a non-zero angle relative to said linear motion such that the surface of said plate in measurable by said sensor along said defined length of travel; recording measurements obtained from said sensor for specific locations of said plate along said length of travel; determinating deviations from orthogonality of said plate from said direction of linear motion; and correcting the recorded measurements accordingly; providing two additional plates, each said plate being orthogonal to a direction of controlled linear motion with defined length of travel; said linear motion directions forming an orthogonal set of axes along which said sensor is calibrated; recording measurements obtained from said sensor for specific locations of said additional plates along respective, lengths of travel of said additional plates; determining deviations from orthogonality of said additional plates from directions of said respective lengths of travel; and correcting said recorded measurements accordingly.
Claim 5
Independent Claim
191 words
A method for calibrating the three dimensions of an optical three-dimensional measurement sensor comprising the steps of: aligning a flat plate perpendicular to a direction of controlled linear motion, said linear motion having a defined length of travel; aligning a sensor with a measurement center line located at a non-zero angle relative to said linear motion such that the surface of said plate in measurable by said sensor along said defined length of travel; recording measurements obtained from said sensor for specific locations of said plate along said length of travel; determinating deviations from orthogonality of said plate from said direction of linear motion; and correcting the recorded measurements accordingly; providing two additional plates, each said plate being orthogonal to a direction of controlled linear motion with defined length of travel; said linear motion directions forming an orthogonal set of axes along which said sensor is calibrated; recording measurements obtained from said sensor for specific locations of said additional plates along respective, lengths of travel of said additional plates; determining deviations from orthogonality of said additional plates from directions of said respective lengths of travel; and correcting said recorded measurements accordingly.
Claim 6
Independent Claim
125 words
A method for calibrating more than one direction of measurement made by an optical three-dimensional measurement sensor comprising the steps of: aligning a flat plate perpendicular to a direction of controlled linear motion, said linear motion having a defined length of travel; aligning a sensor with a measurement center line located at a non-zero angle relative to said linear motion such that the surface of said plate is measurable by said sensor along said defined length of travel; recording measurements obtained from said sensor for specific locations of said plate along said length of travel; determining deviations from orthogonality of said plate from said direction of linear motion; and correcting the recorded measurements accordingly and carrying out said steps for each direction to be calibrated.
Claim 7
Independent Claim
125 words
A method for calibrating more than one direction of measurement made by an optical three-dimensional measurement sensor comprising the steps of: aligning a flat plate perpendicular to a direction of controlled linear motion, said linear motion having a defined length of travel; aligning a sensor with a measurement center line located at a non-zero angle relative to said linear motion such that the surface of said plate is measurable by said sensor along said defined length of travel; recording measurements obtained from said sensor for specific locations of said plate along said length of travel; determining deviations from orthogonality of said plate from said direction of linear motion; and correcting the recorded measurements accordingly and carrying out said steps for each direction to be calibrated.
Claim 8
Independent Claim
121 words
A method for calibrating three orthogonal axes of an optical three-dimensional measurement sensor comprising the steps of: aligning a flat plate perpendicular to a direction of controlled linear motion, said linear motion having a defined length of travel; aligning a sensor with a measurement center line located at a non-zero angle relative to said linear motion such that the surface of said plate is measurable by said sensor along said defined length of travel; recording measurements obtained from said sensor for specific locations of said plate along said length of travel; determining deviations from orthogonality of said plate from said direction of linear motion; and correcting the recorded measurements accordingly and carrying out said steps for each direction to be calibrated.
Claim 9
Independent Claim
121 words
A method for calibrating three orthogonal axes of an optical three-dimensional measurement sensor comprising the steps of: aligning a flat plate perpendicular to a direction of controlled linear motion, said linear motion having a defined length of travel; aligning a sensor with a measurement center line located at a non-zero angle relative to said linear motion such that the surface of said plate is measurable by said sensor along said defined length of travel; recording measurements obtained from said sensor for specific locations of said plate along said length of travel; determining deviations from orthogonality of said plate from said direction of linear motion; and correcting the recorded measurements accordingly and carrying out said steps for each direction to be calibrated.
Claim 10
Independent Claim
146 words
A method for improving the accuracy of calibration of an optical three-dimensional measurement sensor by calibrating the measurements indicated by a sensor according to the steps of: aligning a flat plate perpendicular to a direction of controlled linear motion, said linear motion having a defined length of travel; aligning a sensor with a measurement center line located at a non-zero angle relative to said linear motion such that the surface of said plate is measurable by said sensor along said defined length of travel; recording measurements obtained from said sensor for specific locations of said plate along said length of travel; determining deviations from orthogonality of said plate from said direction of linear motion; and correcting the recorded measurements accordingly; repeating said calibrating steps at least a second time; and averaging the calibration values recorded at each location to provide an improved value for each location.
Claim 11
Independent Claim
146 words
A method for improving the accuracy of calibration of an optical three-dimensional measurement sensor by calibrating the measurements indicated by a sensor according to the steps of: aligning a flat plate perpendicular to a direction of controlled linear motion, said linear motion having a defined length of travel; aligning a sensor with a measurement center line located at a non-zero angle relative to said linear motion such that the surface of said plate is measurable by said sensor along said defined length of travel; recording measurements obtained from said sensor for specific locations of said plate along said length of travel; determining deviations from orthogonality of said plate from said direction of linear motion; and correcting the recorded measurements accordingly; repeating said calibrating steps at least a second time; and averaging the calibration values recorded at each location to provide an improved value for each location.
Claim 12
Dependent Claim
21 words
A method as defined in claim 6, wherein a different portion of said plate is used for each repeat calibration step.
Claim 13
Independent Claim
139 words
A method for improving the accuracy of calibration of and optical three-dimensional measurement sensor by calibrating a dimension of a sensor according to the steps of: aligning a flat plate perpendicular to a direction of controlled linear motion, said linear motion having a defined length of travel; aligning a sensor with a measurement center line located at a non-zero angle relative to said linear motion such that the surface of said plate is measurable by said sensor along said defined length of travel; recording measurement obtained from said sensor for specific locations of said plate along said length of travel; determining deviations from orthogonality of said plate from said direction of linear motion; and correcting the recorded measurements accordingly and applying moving window averaging on calibration values recorded at each location to provide an improved value for each location.
Claim 14
Independent Claim
139 words
A method for improving the accuracy of calibration of and optical three-dimensional measurement sensor by calibrating a dimension of a sensor according to the steps of: aligning a flat plate perpendicular to a direction of controlled linear motion, said linear motion having a defined length of travel; aligning a sensor with a measurement center line located at a non-zero angle relative to said linear motion such that the surface of said plate is measurable by said sensor along said defined length of travel; recording measurement obtained from said sensor for specific locations of said plate along said length of travel; determining deviations from orthogonality of said plate from said direction of linear motion; and correcting the recorded measurements accordingly and applying moving window averaging on calibration values recorded at each location to provide an improved value for each location.
Claim 15
Dependent Claim
72 words
Apparatus for calibrating three-dimensional measurement sensors comprisng: a sensor with an axis; at least one plate with surface flatness corresponding to a predetermined accuracy means for moving said plate through a sensor measurement volume; said plate being orthogonal to the direction of motion and skew to said axis of said sensor; means for recording the measurements made by said sensor; and means for recording the locations at which said measurements are made.
Claim 16
Dependent Claim
72 words
Apparatus for calibrating three-dimensional measurement sensors comprisng: a sensor with an axis; at least one plate with surface flatness corresponding to a predetermined accuracy means for moving said plate through a sensor measurement volume; said plate being orthogonal to the direction of motion and skew to said axis of said sensor; means for recording the measurements made by said sensor; and means for recording the locations at which said measurements are made.
Claim 17
Dependent Claim
19 words
Apparatus as defined in claim 9, comprising at least two plates, each plate being transported in a different direction.
Claim 18
Dependent Claim
14 words
Apparatus as defined in claim 9, comprising three plates transported along mutually orthogonal axes.
Claim 19
Dependent Claim
16 words
Apparatus as defined in claim 9, wherein said sensor is moved and said plate remains stationary.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-05-14 | 1993-11-13 | 1994-05-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-05-14 | 1997-11-13 | 1998-05-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-05-14 | 2001-11-13 | 2002-05-15 | $7700.00 | Window Closed / Lapsed |