US4918510A
Expired / Lapsed
US
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Compact CMOS device structure
Assignee: Motorola Solutions Inc
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Filing: 1988-10-31
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Granted: 1990-04-17
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Expires: 2008-10-31
Abstract
Abstract A compact CMOS structure and method for fabricating the structure are disclosed. In one embodiment of the invention the structure includes a P-type surface region in a silicon substrate surrounded by a field oxide which extends, at least in part, above the surface of the substrate. A polycrystalline silicon sidewall frame is formed at the sidewall of the field oxide and a gate insulator is formed over both the polycrystalline silicon frame and the silicon surface region. A common gate electrode is formed which traverses the frame and the surface region. P-type source and drain regions are formed in the polycrystalline silicon frame on opposite sides of the gate electrode and N-type source and drain regions are formed in the surface region on opposite sides of the gate electrode.
Inventors
- 👤 James R. Pfiester
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 15:39
CPC Classifications
H; H10; H10D; H10D84/00; H10D84/80; H10D84/82; H10D84/83; H10D84/85; Y; Y10; Y10S; Y10S257/00; Y10S257/903
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
155 words
A CMOS structure comprising: a semiconductor substrate having a surface and a surface region of P-type conductivity at said surface; field isolation at said surface, extending, at least in part, above said surface and having a peripheral edge surrounding said surface region; a first layer of polycrystalline silicon forming a frame abutting and interior to said peripheral edge and overlying said surface region; a first layer of insulating material overlying said surface region; a second layer of patterned polycrystalline silicon overlying said first layer of insulating material, traversing said surface region, and insulatively separated from said first layer of polycrystalline silicon by a second layer of insulating material; N-type source and drain regions formed in portions of said surface region not overlaid by said second layer of patterned polycrystalline silicon; and P-type source and drain regions formed in said first layer of polycrystalline silicon on opposite sides of said first layer of patterned polycrystalline silicon.
Claim 2
Dependent Claim
155 words
A CMOS structure comprising: a semiconductor substrate having a surface and a surface region of P-type conductivity at said surface; field isolation at said surface, extending, at least in part, above said surface and having a peripheral edge surrounding said surface region; a first layer of polycrystalline silicon forming a frame abutting and interior to said peripheral edge and overlying said surface region; a first layer of insulating material overlying said surface region; a second layer of patterned polycrystalline silicon overlying said first layer of insulating material, traversing said surface region, and insulatively separated from said first layer of polycrystalline silicon by a second layer of insulating material; N-type source and drain regions formed in portions of said surface region not overlaid by said second layer of patterned polycrystalline silicon; and P-type source and drain regions formed in said first layer of polycrystalline silicon on opposite sides of said first layer of patterned polycrystalline silicon.
Claim 3
Dependent Claim
29 words
The CMOS structure of claim 1 wherein said second layer of patterned polycrystalline silicon comprises a gate electrode of a first N-channel transistor and of a second P-channel transistor.
Claim 4
Dependent Claim
48 words
The CMOS structure of claim 1 wherein said second layer of patterned polycrystalline silicon comprises first and second strips of polycrystalline silicon traversing said surface region and wherein said N-type source and drain regions comprise first, second and third N-type regions separated by said first and second strips.
Claim 5
Dependent Claim
53 words
The CMOS structure of claim 3 further comprising means for coupling one of said P-type source and drain regions to said first N-type region and to said second strip; and means for coupling the other of said P type source and drain regions to said third N-type region and to said first strip.
Claim 6
Dependent Claim
24 words
The CMOS structure of claim 1 further comprising: a p-type region underlying said field isolation and spaced from said N-type source and drain regions.
Claim 7
Dependent Claim
116 words
A CMOS structure comprising: a silicon substrate of first conductivity type; a field oxide surrounding a portion of said substrate at the surface thereof; a strip of polycrystalline silicon abutting said field oxide and spaced above said substrate; a first gate oxide overlying said substrate; a second gate oxide overlying said strip of polycrystalline silicon; a second layer of polycrystalline silicon selectively overlying said first and second gate oxides; source and drain regions of first conductivity type formed in said strip of polycrystalline silicon on each side of said second layer of polycrystalline silicon; and source and drain regions of second conductivity type formed in substrate at opposite sides of said second layer of polycrystalline silicon.
Claim 8
Dependent Claim
116 words
A CMOS structure comprising: a silicon substrate of first conductivity type; a field oxide surrounding a portion of said substrate at the surface thereof; a strip of polycrystalline silicon abutting said field oxide and spaced above said substrate; a first gate oxide overlying said substrate; a second gate oxide overlying said strip of polycrystalline silicon; a second layer of polycrystalline silicon selectively overlying said first and second gate oxides; source and drain regions of first conductivity type formed in said strip of polycrystalline silicon on each side of said second layer of polycrystalline silicon; and source and drain regions of second conductivity type formed in substrate at opposite sides of said second layer of polycrystalline silicon.
Claim 9
Dependent Claim
18 words
The CMOS structure of claim 6 wherein said strip of polycrystalline silicon surrounds said portion of said substrate.
Claim 10
Dependent Claim
32 words
The CMOS structure of claim 6 wherein said second layer of polycrystalline silicon comprises an elongate pattern of polycrystalline silicon traversing said portion of said substrate and said strip of polycrystalline silicon.
Claim 11
Dependent Claim
34 words
The CMOS structure of claim 6 wherein said second layer of polycrystalline silicon comprises two electrically unconnected elongate patterns of polycrystalline silicon traversing said portion of said substrate and said strip of polycrystalline silicon.
Claim 12
Dependent Claim
125 words
A CMOS device comprising: a silicon substrate having a P-type surface region; field oxide surrounding and extending above said surface region; a polycrystalline silicon frame formed on the sidewall of said field oxide and insulatively separated from said surface region; a polycrystalline silicon gate electrode traversing said surface region and said frame and spaced from said surface region by a first gate insulator and from said frame by a second gate insulator; N-type source and drain regions formed in said surface region at opposite sides of said gate electrode; P-type source and drain regions formed in said frame at opposite sides of said gate electrode; means for coupling one of said N-type source and drain regions to one of said P-type source and drain regions.
Claim 13
Dependent Claim
125 words
A CMOS device comprising: a silicon substrate having a P-type surface region; field oxide surrounding and extending above said surface region; a polycrystalline silicon frame formed on the sidewall of said field oxide and insulatively separated from said surface region; a polycrystalline silicon gate electrode traversing said surface region and said frame and spaced from said surface region by a first gate insulator and from said frame by a second gate insulator; N-type source and drain regions formed in said surface region at opposite sides of said gate electrode; P-type source and drain regions formed in said frame at opposite sides of said gate electrode; means for coupling one of said N-type source and drain regions to one of said P-type source and drain regions.
Claim 14
Dependent Claim
33 words
The CMOS device of claim 10 further comprising a P-doped region of higher doping concentration than said surface region underlying said field oxide and spaced away from said N-type source and drain regions.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-04-16 | 1993-10-16 | 1994-04-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-04-16 | 1997-10-16 | 1998-04-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-04-16 | 2001-10-16 | 2002-04-17 | $7700.00 | Window Closed / Lapsed |