US4916319A
Expired / Lapsed
US
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Beam intensity profilometer
Assignee: AMO Manufacturing USA LLC
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Filing: 1988-04-22
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Granted: 1990-04-10
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Expires: 2008-04-22
Abstract
Abstract A beam intensity profilometer produces a fluorescent emission distribution having a spatial distribution linearly proportional to the local intensity of an incident UV beam shined into the profilometer. The spatial distribution of the UV beam is analyzed and displayed as a function of the fluorescent emission.
Inventors
- 👤 William B. Telfair
- 👤 Clifford A. Martin
- 👤 Paul R. Yoder
- 👤 Eugene I. Gordon
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 00:55
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G01; G01J; G01J1/00; G01J1/42; G01J1/4257; G01J1/58
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
85 words
A beam intensity profilometer, comprising: means to produce a fluorescent emission distribution having a spatial distribution linearly proportional to the local intensity of an incident UV beam aimed on the emission distribution means, said means to produce the emission distribution comprising a plate constructed of fluorescent material optically transparent to fluorescent wavelengths; and means being operatively connected to the fluorescent emission distribution means for displaying and analyzing the spatial distribution of the UV beam as a function of the spatial distribution of the fluorescent emission.
Claim 2
Dependent Claim
85 words
A beam intensity profilometer, comprising: means to produce a fluorescent emission distribution having a spatial distribution linearly proportional to the local intensity of an incident UV beam aimed on the emission distribution means, said means to produce the emission distribution comprising a plate constructed of fluorescent material optically transparent to fluorescent wavelengths; and means being operatively connected to the fluorescent emission distribution means for displaying and analyzing the spatial distribution of the UV beam as a function of the spatial distribution of the fluorescent emission.
Claim 3
Dependent Claim
22 words
The beam intensity profilometer of claim 1 wherein the fluorescent emission of said plate is linearly proportional to the incident UV radiation.
Claim 4
Dependent Claim
35 words
The beam intensity profilometer of claim 2 wherein said fluorescent material is selected from the group consisting essentially of rare earth doped crystals, rare earth doped glasses, undoped crystals and fluorescent mediums suspended in plastic.
Claim 5
Dependent Claim
24 words
The beam intensity profilometer of claim 3 wherein said rare earths are selected from the group consisting essentially of Ce, La, Eu, and Nd.
Claim 6
Dependent Claim
19 words
The beam intensity profilometer of claim 4 wherein said rear earth doped crystals comprise a Ce 3+ : YAG.
Claim 7
Dependent Claim
17 words
The beam intensity profilometer of claim 3 wherein said displaying and analyzing means comprises a camera system.
Claim 8
Dependent Claim
34 words
The beam intensity profilometer of claim 6 further including means between said camera system and said plate for reimaging the fluorescent emission distribution from the plate onto a photosensitive surface of the camera system.
Claim 9
Dependent Claim
41 words
The beam intensity profilometer of claim 7 wherein said reimaging means is selected from the group consisting essentially of a single lens, a group of multiple lenses, multiple lenses, a multiplicity of groups of lenses, a mirrior and plurality of mirrors.
Claim 10
Dependent Claim
16 words
The beam intensity profilometer of claim 7 further including a computer connected to said camera system.
Claim 11
Dependent Claim
21 words
The beam intensity profilometer of claim 6 wherein said fluorescent material is affixed to the face plate of said camera system.
Claim 12
Dependent Claim
17 words
The beam intensity profilometer of claim 10 wherein said face plate is a fiber optic face plate.
Claim 13
Dependent Claim
21 words
The beam intensity profilometer of claim 11 wherein the means to display and analyze the power and energy includes a photodetector.
Claim 14
Dependent Claim
55 words
The beam intensity profilometer of claim 12 further including a substantially light tight enclosure containing a plate constructed of a material which produces fluorescence in response to an incident UV beam; and a detector to convert emitted fluorescence from the plate to an optical signal for measuring the energy and power of the UV beam.
Claim 15
Dependent Claim
20 words
The beam intensity profilometer of claim 7 wherein said plate is joined to the face plate of the camera system.
Claim 16
Dependent Claim
19 words
The beam intensity profilometer of claim 14 further including UV filter coatings between said face plate and said plate.
Claim 17
Dependent Claim
16 words
The beam intensity profilometer of claim 13 further including a UV wave trap within the enclosure.
Claim 18
Independent Claim
58 words
The method of determining the intensity of a UV beam, comprising the steps of: producing a fluorescent emission having a spatial distribution proportional to the local intensity of an incident UV beam; displaying and analyzing the UV beam as a function of the fluorescent emission distribution; and measuring and displaying the power and energy of the UV beam.
Claim 19
Independent Claim
58 words
The method of determining the intensity of a UV beam, comprising the steps of: producing a fluorescent emission having a spatial distribution proportional to the local intensity of an incident UV beam; displaying and analyzing the UV beam as a function of the fluorescent emission distribution; and measuring and displaying the power and energy of the UV beam.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-04-09 | 1993-10-09 | 1994-04-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-04-09 | 1997-10-09 | 1998-04-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-04-09 | 2001-10-09 | 2002-04-10 | $7700.00 | Window Closed / Lapsed |