US4916114A
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Method for producing a layer-like composition of oxide-ceramic superconducting material
Assignee: Siemens AG
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Filing: 1988-08-02
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Granted: 1990-04-10
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Expires: 2008-08-02
Abstract
Abstract With the method a layer-like composition of an oxide-ceramic superconducting material with a high transition temperature and great current carrying capacity on the basis of a materials system containing metallic components and oxygen can be prepared. The method is to be improved in the direction that layers with great current-carrying capacity can be formed also on non-monocrystalline substrates. It is provided for this purpose that a multi-layer layer of the superconductive material is applied on a fine-crystalline substrate by first making successive layers of individual films with a respective film thickness under 10 nm, and then this multilayer structure is converted into the desired superconducting phase by means of supplying oxygen and at a temperature below 400° C. For developing each individual film, the metallic components of the system are applied to the substrate that may be available, by means of a physical deposition process and while oxygen is being supplied, at a temperature below 400° C., and by means of short thermal pulses a column structure is generated which comprises columns tightly packed with c-axes at least approximately perpendicular to the respective underlayer.
Inventors
- 👤 Eckhardt Hoenig
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:09
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/06; C23C14/08; C23C14/087; C23C14/22; C23C14/58; C23C14/5806; C23C14/5846; C23C14/5853; H; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0296; H10N60/0548; H10N60/0576; H10N60/0661; H10N60/0688; Y; Y10; Y10S; Y10S505/00; Y10S505/725; Y10S505/729; Y10S505/73; Y10S505/732; Y10S505/742
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
246 words
A method for manufacturing a layer-like composition of an oxide-ceramic superconductive material with a high transition temperature and large current-carrying capacity on the basis of a material system containing metallic components and oxygen, in which method the metallic components of the system are applied in a physical deposition process and while oxygen is supplied on a predetermined substrate as a preliminary product with a structure which still is disordered with respect to the superconducting metal oxide phase to be formed, which structure is converted, using a heat treatment and while oxygen continues to be supplied, into the desired superconducting oxide phase, the method comprising the steps of applying a multilayer layer of the superconducting material on a fine-crystalline substrate the steps of applying comprising first, forming successive layers of individual films with a respective film thickness under 10 nm, the step of forming each of these films comprising the steps of: applying the metallic components of the system to the respectively provided underlayer by means of the physical deposition process and while supplying oxygen at a temperature below 400° C. and converting the so obtained preliminary product by means of short thermal pulses into an intermediate product with a columnar structure which exhibits columns densely packed and c-axes standing at least approximately perpendicularly to the respective underlayer, an then forming the desired superconducting metal oxide phase in the intermediate products of all films by means of further oxygen supply and at a temperature below 400° C.
Claim 2
Independent Claim
246 words
A method for manufacturing a layer-like composition of an oxide-ceramic superconductive material with a high transition temperature and large current-carrying capacity on the basis of a material system containing metallic components and oxygen, in which method the metallic components of the system are applied in a physical deposition process and while oxygen is supplied on a predetermined substrate as a preliminary product with a structure which still is disordered with respect to the superconducting metal oxide phase to be formed, which structure is converted, using a heat treatment and while oxygen continues to be supplied, into the desired superconducting oxide phase, the method comprising the steps of applying a multilayer layer of the superconducting material on a fine-crystalline substrate the steps of applying comprising first, forming successive layers of individual films with a respective film thickness under 10 nm, the step of forming each of these films comprising the steps of: applying the metallic components of the system to the respectively provided underlayer by means of the physical deposition process and while supplying oxygen at a temperature below 400° C. and converting the so obtained preliminary product by means of short thermal pulses into an intermediate product with a columnar structure which exhibits columns densely packed and c-axes standing at least approximately perpendicularly to the respective underlayer, an then forming the desired superconducting metal oxide phase in the intermediate products of all films by means of further oxygen supply and at a temperature below 400° C.
Claim 3
Dependent Claim
22 words
The method recited in claim 1, wherein the oxygen treatment of the intermediate products is performed at a temperature near room temperature.
Claim 4
Dependent Claim
28 words
The method recited in claim 1, wherein the oxygen is provided as a gas stream and/or as an ion stream, for the oxygen treatment of the intermediate product.
Claim 5
Dependent Claim
25 words
The method recited in claim 1 wherein the multilayer layer of superconducting films is prepared with a respective thickness under 1 nm of said films.
Claim 6
Dependent Claim
20 words
The method recited in claim 1 wherein at least one thin layer on a carrier is provided as the substrate.
Claim 7
Dependent Claim
29 words
The method recited in claim 5, wherein a multilayer layer of the superconductive material is applied to a substrate film for which a semiconductor structure serves as the carrier.
Claim 8
Dependent Claim
14 words
The method recited in claim 1, wherein a substrate with tubular shape is provided.
Claim 9
Dependent Claim
47 words
The method recited in claim 1, wherein a material is chosen as the substrate material having a lattice constant which has dimensions which amount to about one or several times the corresponding dimensions of the a and/or b-axes of the crystals of the columns formed on it.
Claim 10
Dependent Claim
28 words
The method recited in claim 1, wherein a substrate is provided which contains at least Al 2 O 3 or ZrO 2 or MgO or SrTiO 3 .
Claim 11
Dependent Claim
27 words
The method recited in claim 1, wherein the preliminary product is subjected during the thermal pulse to a well-dosed directional oxygen-gas-pulse and/or to a low-energy oxygen-ion pulse.
Claim 12
Dependent Claim
17 words
The method recited in claim 1 wherein the thermal pulses are generated during the physical deposition process.
Claim 13
Dependent Claim
32 words
The method recited in claim 1, wherein an RF-aided laser evaporation of the separated metallic components of the system is provided while supplying oxygen as a gas and/or as an ion stream.
Claim 14
Dependent Claim
38 words
The method recited in claim 1, wherein the physical deposition process comprises evaporation of the separate metallic components by means of suitable electron beam sources and while oxygen is provided as a gas and/or as an ion stream.
Claim 15
Dependent Claim
57 words
The method recited in claim 1, wherein a multilayer layer with subsections extending over a step-like region of a substrate which subsections overlap over a large surface area and extends on both sides of the step-like region is prepared, where layers of films are formed in the subsections lying in common planes extending beyond the step-like region.
Claim 16
Dependent Claim
29 words
The method recited in claim 1, wherein two multilayer layers are connected to each other in a contact zone by an overlap of the layers over a large surface.
Claim 17
Dependent Claim
39 words
The method recited in claim 1, wherein, from the multilayer layer, a conductor run is formed having a total thickness which is at least one order of magnitude smaller than the width measured perpendicularly to the current conduction direction.
Claim 18
Dependent Claim
17 words
The method recited in claim 16, wherein the conductor runs are structured by means of ion-beam etching.
Claim 19
Dependent Claim
25 words
The method recited in claim 1, wherein at least one of the metallic components of the material system is substituted partially by a further metal.
Claim 20
Dependent Claim
47 words
The method recited in claim 1, wherein, for the layered composition, the oxide-ceramic superconducting material on the basis of a material system Me1-Me2-Cu-0 is provided where the metallic component Me1 comprises a rare earth metal (including yttrium) and the metallic component Me2 comprises an alkaline earth metal.
Claim 21
Dependent Claim
28 words
The method recited in claim 19, wherein the first metallic component Me1 is partially substituted by a rare earth metal (including yttrium) or is substituted partially by Al.
Claim 22
Dependent Claim
28 words
The method recited in claim 19, wherein the second metallic component Me2 is substituted partially by another metal in the group of the metals provided for this component.
Claim 23
Dependent Claim
13 words
The method recited in claim 19, wherein oxygen is partially substituted by F.
References Cited (Backward Citations)
US4316785A
Cited
JPS61168530A
Cited
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