US4914305A
Expired / Lapsed
US
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Uniform cross section ion beam system
Assignee: Axcelis Technologies Inc
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Filing: 1989-01-04
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Granted: 1990-04-03
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Expires: 2009-01-04
Abstract
Abstract An ion beam implant system having a source for producing multiple beamlets. The beamlets are emitted from the source and their intensity is controlled by an electrode array under control of a control apparatus. Downstream from the electrode array a resolving magnet shapes the beamlets and directs them to a region where they undergo further acceleration before impinging upon a workpiece. In a preferred technique, the workpiece is typically a silicon wafer and the ions are utilized for controlled doping of that wafer without need for ion beam scanning to selected portions of the workpiece or wafer movement through the ion beam during implantation.
Inventors
- 👤 Victor M. Benveniste
- 👤 Raymond P. Boisseau
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 17:51
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/317; H01J37/3171; H01J37/3172
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
156 words
An ion implantation system having apparatus for defining an ion beam used in treating a wafer comprising: (a) an ion source for providing a plurality of relatively small cross section ion beams which combine to form a larger beam having a cross section on the order of a wafer surface to be treated; (b) an ion distribution control including a plurality of spaced beam electrodes that selectively deflect ions in the small cross section ion beams; (c) a magnet for analyzing ions leaving the intensity control and for directing certain ions to follow a wafer treatment trajectory; (d) a wafer treatment station for placing wafers in a position to intercept said certain ions after said ions exit the mass analyzer; and (e) switching means coupled to the ion distribution control for individually controlling biasing potentials of the beam electrodes to provide a controlled ion distribution of ions impacting a wafer surface at the wafer treatment station.
Claim 2
Dependent Claim
156 words
An ion implantation system having apparatus for defining an ion beam used in treating a wafer comprising: (a) an ion source for providing a plurality of relatively small cross section ion beams which combine to form a larger beam having a cross section on the order of a wafer surface to be treated; (b) an ion distribution control including a plurality of spaced beam electrodes that selectively deflect ions in the small cross section ion beams; (c) a magnet for analyzing ions leaving the intensity control and for directing certain ions to follow a wafer treatment trajectory; (d) a wafer treatment station for placing wafers in a position to intercept said certain ions after said ions exit the mass analyzer; and (e) switching means coupled to the ion distribution control for individually controlling biasing potentials of the beam electrodes to provide a controlled ion distribution of ions impacting a wafer surface at the wafer treatment station.
Claim 3
Dependent Claim
43 words
The ion implantation system of claim 1 wherein the ion distribution control comprises two electrodes spaced on either side of each small cross section ion beam and said switching means comprises an energy source to apply a potential different across said two electrodes.
Claim 4
Dependent Claim
38 words
The ion implantation system of claim 1 where the ion distribution control comprises an array of interleaved quadruple triplet electrodes wherein one set of quadruple triplet electrodes adjusts ion beam strength of each small cross section ion beam.
Claim 5
Dependent Claim
24 words
The apparatus of claim 1 further comprising means for accelerating ions exiting the magnet to a specified energy before the ions strike the wafer.
Claim 6
Independent Claim
129 words
A method for treating a workpiece with an ion beam comprising the steps of: emitting ions from a plurality of apertures to form a plurality of small cross section ion beams that move along generally parallel trajectories and in combination form a larger cross section workpiece treatment beam; controllably deflecting ions in selected ones of the small cross section ion beams; intercepting the ions from the small cross section ion beams with a resolving magnet which bends the ions along a trajectory to cause the controllably deflected ions to be lost from the workpiece treatment beam; and accelerating ions exiting the resolving magnet that remain in the large cross section workpiece treatment beam to a controlled energy before those ions impact a stationary workpiece at a workpiece implantation station.
Claim 7
Independent Claim
129 words
A method for treating a workpiece with an ion beam comprising the steps of: emitting ions from a plurality of apertures to form a plurality of small cross section ion beams that move along generally parallel trajectories and in combination form a larger cross section workpiece treatment beam; controllably deflecting ions in selected ones of the small cross section ion beams; intercepting the ions from the small cross section ion beams with a resolving magnet which bends the ions along a trajectory to cause the controllably deflected ions to be lost from the workpiece treatment beam; and accelerating ions exiting the resolving magnet that remain in the large cross section workpiece treatment beam to a controlled energy before those ions impact a stationary workpiece at a workpiece implantation station.
Claim 8
Dependent Claim
23 words
The method of claim 5 wherein the deflecting step is accomplished by selectively energizing electrodes positioned adjacent a small cross section ion beam.
Claim 9
Dependent Claim
28 words
The method of claim 5 wherein the accelerating step is accomplished in stages along a travel path of the large cross section beam subsequent to the resolving magnet.
Claim 10
Dependent Claim
50 words
The method of claim 6 wherein the step of energizing the electrodes is repeatedly performed for electrodes associated with all small cross section beams and a duty cycle of each electrode is adjusted to achieve a desired large cross section ion beam distribution across an implant surface of said workpiece.
References Cited (Backward Citations)
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-04-02 | 1993-10-02 | 1994-04-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-04-02 | 1997-10-02 | 1998-04-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-04-02 | 2001-10-02 | 2002-04-03 | $7700.00 | Window Closed / Lapsed |