US4910041A
Expired / Lapsed
US
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Film formation process
Assignee: JSR Corp
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Filing: 1988-09-09
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Granted: 1990-03-20
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Expires: 2008-09-09
Abstract
Abstract A process of forming a film on a substrate, which comprises bringing a substrate into contact with a plasma zone formed by generating, by use of a discharge electrode or discharge electrodes, high temperature or quasi-high temperature plasma of a gas containing at least one carbon containing compound, wherein said electrode comprises a sheet-like electrode provided with a slit having a linear portion and connected to a microwave electric source; or wherein said plasma zone is formed by forcing a high temperature or quasi-high temperature plasma generated in an arc between said electrodes by DC discharge, to move by applying a magnetic field. The process enables formation of films on substrate surfaces in a high energy efficiency.
Inventors
- 👤 Kenji Yanagihara
- 👤 Mituo Kimura
- 👤 Hitoshi Chawanya
- 👤 Koshi Numata
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 15:47
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; C; C23; C23C; C23C16/00; C23C16/44; C23C16/50; C23C16/511
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
72 words
A process of forming a film on a substrate, which comprises bringing a substrate into contact with a plasma zone formed by generating, by use of a discharge electrode, a high temperature or quasi-high temperature plasma of a gas containing at least carbon-containing compound, said process including the steps of: providing a sheet-like electrode with a slit having a linear portion; and connecting said electrode to a source of microwave electric energy.
Claim 2
Dependent Claim
72 words
A process of forming a film on a substrate, which comprises bringing a substrate into contact with a plasma zone formed by generating, by use of a discharge electrode, a high temperature or quasi-high temperature plasma of a gas containing at least carbon-containing compound, said process including the steps of: providing a sheet-like electrode with a slit having a linear portion; and connecting said electrode to a source of microwave electric energy.
Claim 3
Dependent Claim
65 words
The process of claim 1, wherein said plasma zone is one in the form of mat covering the surfaces of the sheet-like electrode with a relation of: S/L>200, wherein S represents the area of the plasma zone in mm 2 and L represents the average thickness of the plasma zone in mm, and has an average energy density of at least 10 W/cm 3 .
Claim 4
Dependent Claim
49 words
The process of claim 1, wherein said linear portion satisfies the condition expressed by the equation: l=n×λ/2 wherein l represents the length of said linear portion and λ represents the wavelength of a microwave supplied from said microwave electric source and n is an integer of at least one.
Claim 5
Dependent Claim
20 words
The process of claim 3, said slit has a width of not less than 1 mm and less than λ/2.
Claim 6
Dependent Claim
44 words
The process of claim 1, wherein the whole length of said linear portions is from 0.1 to 6 cm/cm 2 with respect to the area of the substrate surface on which a film is to be formed or the area of the sheet-like electrode.
Claim 7
Dependent Claim
20 words
The process of claim 1, wherein said sheet-like electrode is connected to a termination through a coaxial tube or waveguide.
Claim 8
Dependent Claim
19 words
The process of claim 1, wherein a magnetic field is applied to said sheet-like electrode, thereby forming stabler plasma.
Claim 9
Dependent Claim
31 words
The process of claim 7, wherein said magnetic field is applied such that the magnetic flux density in the vicinity of the sheet like electrode is from 500 to 2,000 gauss.
Claim 10
Dependent Claim
25 words
The process of claim 1 for formation of a film comprising a diamond-like substance, wherein said gas comprises hydrogen and a carbon containing organic compound.
Claim 11
Dependent Claim
26 words
The process of claim 9, wherein said gas comprises the carbon-containing organic compound in an amount of 0.1 to 5 mol per 100 mol of hydrogen.
Claim 12
Dependent Claim
20 words
The process of claim 9, wherein said carbon-containing organic compound is an organic compound having 1 to 4 carbon atoms.
Claim 13
Dependent Claim
44 words
The process of claim 11, wherein said organic compound is at least one member selected from the group consisting of methane, ethane, propane, butane, ethylene, propylene, butadiene, allylamine, methylamine, ethylamine, carbon disulfide, methanol, ethanol, formaldehyde, acetaldehyde, methyl ethyl ketone, formic acid and ethyl acetate.
Claim 14
Dependent Claim
59 words
A process of forming a film on a substrate, which comprises bringing a substrate into contact with arced plasma of a gas containing at least one carbon-containing compound, said process including the steps of: generating the arced plasma in a slit of a DC discharge electrode; and moving the arced plasma upon a substrate by applying a magnetic field.
Claim 15
Dependent Claim
59 words
A process of forming a film on a substrate, which comprises bringing a substrate into contact with arced plasma of a gas containing at least one carbon-containing compound, said process including the steps of: generating the arced plasma in a slit of a DC discharge electrode; and moving the arced plasma upon a substrate by applying a magnetic field.
Claim 16
Dependent Claim
26 words
The process of claim 13, wherein the gas containing at least one carbon-containing compound is positioned between said electrodes in the form of a jet flow.
Claim 17
Dependent Claim
23 words
The process of claim 14, wherein said gas is positioned between the electrodes at a flow rate of from 0.01 to 500 m/sec.
Claim 18
Dependent Claim
19 words
The process of claim 13, wherein said magnetic field has a magnetic flux density of 80 to 2,000 gauss.
Claim 19
Dependent Claim
24 words
The process of claim 13 for formation of a film comprising a diamond-like substance, wherein said gas comprises hydrogen and a carbon-containing organic compound.
Claim 20
Dependent Claim
26 words
The process of claim 13, wherein said gas comprises the carbon-containing organic compound in an amount of 0.1 to 5 mol per 100 mol of hydrogen.
Claim 21
Dependent Claim
20 words
The process of claim 18, wherein said carbon-containing organic compound is an organic compound having 1 to 4 carbon atoms.
Claim 22
Dependent Claim
47 words
The process of claim 19, wherein said at least one carbon-containing compound is at least one member selected from the group consisting of methane, ethane, propane, butane, ethylene, propylene, butadiene, allylamine, methylamine, ethylamine, carbon disulfide, methanol, ethanol, formaldehyde, acetaldehyde, methyl ethyl ketone, formic acid and ethyl acetate.
Claim 23
Dependent Claim
13 words
The process of claim 13, wherein said arced plasma is high temperature plasma.
Claim 24
Dependent Claim
13 words
The process of claim 13 wherein said arced plasma is quasi-high temperature plasma.
References Cited (Backward Citations)
US4816113A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-03-19 | 1993-09-18 | 1994-03-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-03-19 | 1997-09-18 | 1998-03-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-03-19 | 2001-09-18 | 2002-03-20 | $7700.00 | Window Closed / Lapsed |