RF transformer and diagnostic technique therefor

Claim 2

A gas laser having an RF transformer, said transformer comprising: first conductor means, said first conductor means having an axially extending electrically conductive surface portion and being electrically grounded; second conductor means, said second conductor means having an axially extending electrically conductive surface portion; third conductor means, said third conductor means having a electrically conductive surface portion, said third conductor means surface portion being spatially displaced from said first conductor means surface portion, said first and third conductor means surface portions cooperating to define therebetween an interior capacitance C x , said third conductor means also at least in part defining an exterior capacitance C L ; means supporting said second conductor means such that the surface portion thereof is intermediate the surface portions of said first and third conductor means whereby said second conductor means divides said capacitance C x into a pair of capacitances C A and C B ; fourth conductor means for defining an axially extending space within said exterior capacitance C L between said third and fourth conductor means wherein the laser gas is disposed; at least one of said third conductor means and said fourth conductor means comprising a plurality of axially spaced, transversely extending plates; at least a first inductive element connected between a pair of said conductor means; and means for applying an RF voltage between said first and second conductor means, the frequency of said RF voltage being chosen to coincide with a minimum voltage standing wave ratio of the transformer input impedance.

Claim 3

The laser of claim 1 wherein said second conductor means and said third conductor means each comprise a plurality of axially spaced, transversely extending plates.

Claim 4

The laser of claim 2 further comprising a plurality of inductive elements connected between said second and third conductor means.

Claim 5

The laser of claim 1 wherein said third conductor means and said fourth conductor means each comprise a plurality of axially spaced, transversely extending plates.

Claim 6

The laser of claim 4 wherein the transversely extending plates of said third conductor means project towards said fourth conductor means and the transversely extending plates of said fourth conductor means project toward said third conductor means in axially spaced alternating relationship.

Claim 7

The laser of claim 5 further comprising a gas discharge tube disposed in said axially extending space and wherein at least some of said transversely extending plates have distal end portions shaped to engage and support said gas discharge tube.

Claim 8

The laser of claim 4 further comprising a plurality of inductive elements connected between said third and fourth conductor means.

Claim 9

The laser of claim 1 further comprising a plurality of inductive elements connected between said first and third conductor means.

Claim 10

An RF gas laser having an RF transformer, said transformer comprising: first conductor means, conductor means having an axially extending electrically conductive surface portion and being electrically grounded; second conductor means, said second conductor means having an axially extending electrically conductive surface portion; third conductor means, said third conductor means having an electrically conductive surface portion, said third conductor means surface portion being spatially displaced from said first conductor means surface portion, said first and third conductor means surface portions cooperating to define therebetween an interior capacitance C x , said third conductor means also at least in part defining an exterior capacitance C L to ground; means supporting said second conductor means such that the said surface portion thereof is intermediate to said surface portions of said first and third conductor means, said second conductor means dividing said capacitance C x into a pair of capacitances C A and C B; fourth conductor means for defining an axially extending region within capacitance C L , said fourth conductor means including an oppositely disposed discharge electrode with which cooperates with said third conductor means; at least one of said third conductor means and said oppositely disposed discharge electrode having a contoured portion which at least partially defines a discharge gap of predetermined shape within said region; at least a first inductive element connected between a pair of said conductor means; and means for applying an RF voltage between said first and second conductor means, the frequency of said RF voltage being chosen to provide a minimum voltage standing wave ratio of the laser input impedance.

Claim 11

An RF gas laser having an RF transformer, said transformer comprising: first conductor means, conductor means having an axially extending electrically conductive surface portion and being electrically grounded; second conductor means, said second conductor means having an axially extending electrically conductive surface portion; third conductor means, said third conductor means having an electrically conductive surface portion, said third conductor means surface portion being spatially displaced from said first conductor means surface portion, said first and third conductor means surface portions cooperating to define therebetween an interior capacitance C x , said third conductor means also at least in part defining an exterior capacitance C L to ground; means supporting said second conductor means such that the said surface portion thereof is intermediate to said surface portions of said first and third conductor means, said second conductor means dividing said capacitance C x into a pair of capacitances C A and C B; fourth conductor means for defining an axially extending region within capacitance C L , said fourth conductor means including an oppositely disposed discharge electrode with which cooperates with said third conductor means; at least one of said third conductor means and said oppositely disposed discharge electrode having a contoured portion which at least partially defines a discharge gap of predetermined shape within said region; at least a first inductive element connected between a pair of said conductor means; and means for applying an RF voltage between said first and second conductor means, the frequency of said RF voltage being chosen to provide a minimum voltage standing wave ratio of the laser input impedance.

Claim 12

The laser of claim 9 further comprising a ceramic element extending from at least one of said second conductor means or said discharge electrode to at least partially define said discharge gap.

Claim 13

The laser of claim 9 wherein said second conductor means is shaped to define the field distribution in said discharge gap for discharge excitation .

Claim 14

The laser of claim 9 further comprising an axially extending housing enclosing at least said third conductor means.

Claim 15

The laser of claim 9 further comprising means defining a gas flow path traversing said gap and axially extending therethrough.

Claim 16

The laser of claim 13 further comprising a plurality of axially spaced ports communicating with said gas flow path.

Claim 17

The laser of claim 9 further comprising means for coupling a source of direct current to said third conductor means.

Claim 18

The laser of claim 9 further comprising means for coupling a source of low frequency alternating current to said third conductor means.

Claim 19

An RF excited gas laser having an RF transformer, said transformer comprising: first conductor means, said first conductor means having an axially extending electrically conductive surface portion and being electrically grounded; second conductor means, said second conductor means having an axially extending electrically conductive surface portion; third conductor means, said third conductor means having a electrically conductive surface portion, said third conductor means surface portion being spatially displaced from said first conductor means surface portion, said first and third conductor means surface portions cooperating to define therebetween an interior capacitance C x , said third conductor means also at least in part defining an exterior capacitance C L; means supporting said second conductor means such that the surface portion thereof is intermediate the surface portions of said first and third conductor means whereby said second conductor means divides said capacitance C x into a pair of capacitances C A and C B; fourth conductor means for defining an axially extending space within said exterior capacitance C L , said fourth conductor means being electrically grounded; at least a first inductive element connected between a pair of said conductor means; means for confining a gas in said axially extending space, means for applying an RF voltage between said first and second conductor means to initiate a discharge in said gas, the frequency of said RF voltage being chosen to coincide with a minimum voltage standing wave ratio of the transformer input impedance; and means for coupling a source of current to said third conductor means to supply electrical power to the discharge.

Claim 20

An RF excited gas laser having an RF transformer, said transformer comprising: first conductor means, said first conductor means having an axially extending electrically conductive surface portion and being electrically grounded; second conductor means, said second conductor means having an axially extending electrically conductive surface portion; third conductor means, said third conductor means having a electrically conductive surface portion, said third conductor means surface portion being spatially displaced from said first conductor means surface portion, said first and third conductor means surface portions cooperating to define therebetween an interior capacitance C x , said third conductor means also at least in part defining an exterior capacitance C L; means supporting said second conductor means such that the surface portion thereof is intermediate the surface portions of said first and third conductor means whereby said second conductor means divides said capacitance C x into a pair of capacitances C A and C B; fourth conductor means for defining an axially extending space within said exterior capacitance C L , said fourth conductor means being electrically grounded; at least a first inductive element connected between a pair of said conductor means; means for confining a gas in said axially extending space, means for applying an RF voltage between said first and second conductor means to initiate a discharge in said gas, the frequency of said RF voltage being chosen to coincide with a minimum voltage standing wave ratio of the transformer input impedance; and means for coupling a source of current to said third conductor means to supply electrical power to the discharge.

Claim 21

The laser of claim 17 further comprising an axially extending housing enclosing at least said third conductor means.