US4907039A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor device
Assignee: NEC Electronics Corp
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Filing: 1988-06-24
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Granted: 1990-03-06
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Expires: 2008-06-24
Abstract
Abstract A semiconductor device in which a polyimide film is used as an inter-ply insulating film is disclosed. Bonding pads are formed on the polyimide film and an insulating film such as a silicon nitride film is formed on the polyimide film and on the bonding pads except bonding areas thereof. At least one small aperture is formed in the insulating film and a metal layer having an island shape is provided on the polyimide film within the small aperture.
Inventors
- 👤 Shinichi Chikaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 21:13
CPC Classifications
H; H10; H10W; H10W46/00; H10W72/00; H10W72/90; H10W46/101; H10W46/103; H10W70/00; H10W70/60; H10W72/50; H10W72/531; H10W72/536; H10W72/5363; H10W72/541; H10W72/5449; H10W72/551; H10W72/552; H10W72/5524; H10W72/59; H10W72/931; H10W72/932; H10W72/951; H10W72/952; H10W72/981; H10W72/983; H10W74/00; H10W90/00; H10W90/701; H10W90/751; H10W90/756
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
121 words
A semiconductor device comprising a semiconductor substrate, a polyimide film formed on said substrate, bonding pads provided on said polyimide film, a first metal layer provided on said polyimide film and having an island shape, said first metal layer being a completely electrically insulated layer, an insulating film having better moisture proof characteristics than said polyimide film and formed on said polyimide film to cover said bonding pads and said first metal layer, openings formed in said insulating film to expose bonding areas of said bonding pads, respectively, and a first aperture having a smaller area than each said opening and formed in said insulating film on said first metal layer to expose a surface section of said first metal layer.
Claim 2
Dependent Claim
121 words
A semiconductor device comprising a semiconductor substrate, a polyimide film formed on said substrate, bonding pads provided on said polyimide film, a first metal layer provided on said polyimide film and having an island shape, said first metal layer being a completely electrically insulated layer, an insulating film having better moisture proof characteristics than said polyimide film and formed on said polyimide film to cover said bonding pads and said first metal layer, openings formed in said insulating film to expose bonding areas of said bonding pads, respectively, and a first aperture having a smaller area than each said opening and formed in said insulating film on said first metal layer to expose a surface section of said first metal layer.
Claim 3
Dependent Claim
15 words
A semiconductor device of claim 1, wherein said insulating film is a silicon nitride film.
Claim 4
Dependent Claim
19 words
A semiconductor device of claim 1, wherein said first metal layer and said bonding pads are made of aluminum.
Claim 5
Dependent Claim
15 words
A semiconductor device of claim 1, wherein said first aperture has a square plan shape.
Claim 6
Dependent Claim
27 words
A semiconductor device of claim 1, wherein said first aperture has a configuration of a symbol selected from the group consisting of numerical symbols and alphabetic symbols.
Claim 7
Dependent Claim
15 words
A semiconductor device of claim 5, wherein said first aperture has a numerical symbol configuration.
Claim 8
Dependent Claim
15 words
A semiconductor device of claim 5, wherein said first aperture has an alphabetic symbol configuration.
Claim 9
Dependent Claim
65 words
A semiconductor device of claim 1, further comprising a second metal layer provided on said polyimide film and having an island shape, said second metal layer being a completely electrically insulated layer, and a second aperture having a smaller area than each said opening and formed in said insulating film on said second metal layer to expose a surface section of said second metal layer.
Claim 10
Dependent Claim
15 words
A semiconductor device of claim 8, wherein said insulating film is a silicon nitride film.
Claim 11
Dependent Claim
21 words
A semiconductor device of claim 8, wherein said first and second metal layers and said bonding pads are made of aluminum.
Claim 12
Dependent Claim
36 words
A semiconductor device of claim 8, wherein said first aperture has a square plan shape, and said second aperture has a configuration of a symbol selected from the group consisting of numerical symbols and alphabetic symbols.
Claim 13
Dependent Claim
15 words
A semiconductor device of claim 11, wherein said second aperture has a numerical symbol configuration.
Claim 14
Dependent Claim
15 words
A semiconductor device of claim 11, wherein said second aperture has an alphabetic symbol configuration.
References Cited (Backward Citations)
US4733289A
Cited
US4472730A
Cited
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