Exposure apparatus

Claim 2

An exposure apparatus for exposing, to a pattern of a first object, a second object by use of a radiation beam, said apparatus comprising: illuminating means for illuminating the first object with a radiation beam having a predetermined wavelength; detecting means for detecting a change in the wavelength of the radiation beam irradiating the first object; and control means operable in response to a signal from said detecting means, to cause the second object to be substantially unexposed to the pattern of the first object.

Claim 3

An apparatus according to claim 1, wherein said illuminating means comprises an excimer laser.

Claim 4

An apparatus according to claim 1, wherein said apparatus further comprises an openable and closable radiation-blocking member provided in the path of the radiation beam and wherein said control means controls the opening and closing of said radiation-blocking member.

Claim 5

An apparatus according to claim 1, wherein said illuminating means comprises a light source and driving means for driving said illuminating means and wherein said control means controls the drive of said illuminating means by said driving means.

Claim 6

A projection exposure apparatus for projecting a pattern of a first object upon a second object through a projection lens system to expose the second object to the pattern of the first object, said apparatus comprising: a first stage for supporting the first object; a second stage for supporting the second object, said second stage being movable; illumination means for illuminating the first object with a light having a predetermined wavelength, so that the second object is exposed to the pattern of the first object; detecting means for detecting a change in the wavelength of the light irradiating the second object; and control means operable in response to a signal from said detecting means, to control said apparatus so as to cause the second object to be substantially unexposed to the pattern of the first object.

Claim 7

A projection exposure apparatus for projecting a pattern of a first object upon a second object through a projection lens system to expose the second object to the pattern of the first object, said apparatus comprising: a first stage for supporting the first object; a second stage for supporting the second object, said second stage being movable; illumination means for illuminating the first object with a light having a predetermined wavelength, so that the second object is exposed to the pattern of the first object; detecting means for detecting a change in the wavelength of the light irradiating the second object; and control means operable in response to a signal from said detecting means, to control said apparatus so as to cause the second object to be substantially unexposed to the pattern of the first object.

Claim 8

An apparatus according to claim 5, wherein said control means is operable in response to the signal from said detecting means to control the movement of said second stage.

Claim 9

An apparatus according to claim 5, wherein said illumination means comprises an excimer laser and an optical system for directing a laser pulse from said laser to the first object.

Claim 10

An apparatus according to claim 7, wherein said apparatus further comprises openable and closable light-blocking means provided in the path of the laser pulse and wherein said control means controls the opening and closing of said light-blocking means.

Claim 11

An apparatus according to claim 8, wherein said apparatus further comprises adjusting means for adjusting the oscillation wavelength of said excimer laser and wherein said control means operates in response to a signal from said detecting means to selectively actuate said adjusting means and said light-blocking means.

Claim 12

An apparatus according to claim 8, wherein said apparatus further comprises means for monitoring the amount of exposure by the laser pulse and wherein said control means operates in response to a signal from said monitoring means to control said lightblocking means.

Claim 13

An apparatus according to claim 8, wherein said detecting means receives the laser pulse by way of a beam splitter provided in the path of the laser pulse, to detect the change in the wavelength thereof and wherein said beam splitter is provided between said laser and said light-blocking means.

Claim 14

An exposure apparatus for exposing an object, said apparatus comprising: a radiation source for emitting a radiation beam having a predetermined wavelength; a radiation system for directing the radiation beam from said radiation source to the object for exposure thereof; openable and closable beam-blocking means provided in the path of the radiation beam; a beam splitter disposed in the path of the radiation beam between said radiation source and said beam-blocking means; detecting means disposed to receive a portion of the radiation beam from said beam splitter, for detecting a change in the wavelength of the radiation beam during exposure; and control means for controlling said beam-blocking means in response to a signal from said detecting means, to cause the object to be substantially unexposed to the radiation beam.

Claim 15

An exposure apparatus for exposing an object, said apparatus comprising: a radiation source for emitting a radiation beam having a predetermined wavelength; a radiation system for directing the radiation beam from said radiation source to the object for exposure thereof; openable and closable beam-blocking means provided in the path of the radiation beam; a beam splitter disposed in the path of the radiation beam between said radiation source and said beam-blocking means; detecting means disposed to receive a portion of the radiation beam from said beam splitter, for detecting a change in the wavelength of the radiation beam during exposure; and control means for controlling said beam-blocking means in response to a signal from said detecting means, to cause the object to be substantially unexposed to the radiation beam.

Claim 16

An exposure apparatus for exposing an object, said apparatus comprising: means for directing a radiation beam having a predetermined wavelength to the object; means for detecting a change in the wavelength of the radiation beam irradiating the object; and control means operable in response to a signal from said detecting means to control the apparatus so as to cause the object to be substantially unexposed to the radiation beam.

Claim 17

An exposure apparatus for exposing an object, said apparatus comprising: means for directing a radiation beam having a predetermined wavelength to the object; means for detecting a change in the wavelength of the radiation beam irradiating the object; and control means operable in response to a signal from said detecting means to control the apparatus so as to cause the object to be substantially unexposed to the radiation beam.

Claim 18

A projection exposure apparatus for projecting a pattern of a reticle upon different shot areas on a wafer in a predetermined order, by use of a projection lens system, said apparatus comprising: a reticle stage for supporting the reticle; a wafer stage for supporting the wafer, said wafer stage being movable in a plane perpendicular to an optical axis of the projection lens system; illuminating means for illuminating the reticle with light having a predetermined wavelength; detecting means for detecting a change in the wavelength of the light irradiating the reticle; and control means operable in response to a signal from said detecting means, to control said apparatus so as to cause the wafer to be substantially unexposed to the pattern of the reticle, said control means having a memory for memorizing a shot area on the wafer having been exposed to the pattern of the reticle with the light whose wavelength has been changed.

Claim 19

A projection exposure apparatus for projecting a pattern of a reticle upon different shot areas on a wafer in a predetermined order, by use of a projection lens system, said apparatus comprising: a reticle stage for supporting the reticle; a wafer stage for supporting the wafer, said wafer stage being movable in a plane perpendicular to an optical axis of the projection lens system; illuminating means for illuminating the reticle with light having a predetermined wavelength; detecting means for detecting a change in the wavelength of the light irradiating the reticle; and control means operable in response to a signal from said detecting means, to control said apparatus so as to cause the wafer to be substantially unexposed to the pattern of the reticle, said control means having a memory for memorizing a shot area on the wafer having been exposed to the pattern of the reticle with the light whose wavelength has been changed.