US4904934A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Testing apparatus for semiconductor devices
Assignee: Mitsubishi Electric Corp
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Filing: 1988-10-19
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Granted: 1990-02-27
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Expires: 2008-10-19
Abstract
Abstract A testing apparatus includes a turntable, a driving device for rotating the turntable by a predetermined angle, and a plurality of pallets symmetrically fixed on the turntable around a center of rotation of the turntable. Each pallet holds a plurality of semiconductor devices and has electrode patterns for connection to leads of the semiconductor devices. A tester for testing the semiconductor devices is electrically connected with the electrode patterns of one of the pallets located at a first position in the rotation of the turntable by a connecting device. An exchanging device exchanges the semiconductor devices for new ones on one of the pallets located at a second position in the rotation of the turntable. A cover covers the turntable except around the second position. A heating device heats the inside of the cover to maintain the semiconductor devices held on the pallets in the cover at a high temperature.
Inventors
- 👤 Ryouji Nishihashi
- 👤 Kiyoji Imanaka
- 👤 Katsuji Kawaguchi
- 👤 Hidekazu Iwasaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 08:44
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/28; G01R31/2851; G01R31/2855; G01R31/286; G01R31/2865; G01R31/2867; G01R31/2893
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
148 words
A testing apparatus comprising: a plurality of pallets, each of said pallets having a plurality of electrode patterns and a plurality of supports, each of which supports a semiconductor device and electrically connects the semiconductor device to one of said electrode patterns; pallet moving means for moving said pallets along a path having a plurality of positions, the positions including a testing position and an exchanging position; a tester for testing the semiconductor devices; a plurality of contacts electrically connected to said tester; connecting means for electrically connecting said contacts to said electrode patterns for electrically connecting a plurality of the semiconductor devices on a pallet at the testing position to the tester at the same time; heating means for heating the semiconductor devices to a prescribed testing temperature; and exchanging means for exchanging the semiconductor devices on the pallet at the exchanging position with other semiconductor devices.
Claim 2
Dependent Claim
148 words
A testing apparatus comprising: a plurality of pallets, each of said pallets having a plurality of electrode patterns and a plurality of supports, each of which supports a semiconductor device and electrically connects the semiconductor device to one of said electrode patterns; pallet moving means for moving said pallets along a path having a plurality of positions, the positions including a testing position and an exchanging position; a tester for testing the semiconductor devices; a plurality of contacts electrically connected to said tester; connecting means for electrically connecting said contacts to said electrode patterns for electrically connecting a plurality of the semiconductor devices on a pallet at the testing position to the tester at the same time; heating means for heating the semiconductor devices to a prescribed testing temperature; and exchanging means for exchanging the semiconductor devices on the pallet at the exchanging position with other semiconductor devices.
Claim 3
Dependent Claim
25 words
A testing apparatus as claimed in claim 1 wherein said connecting means comprises means for moving said support towards the pallet at the testing position.
Claim 4
Dependent Claim
23 words
A testing apparatus as claimed in claim 1 wherein said connecting means comprises means for moving the pallet moving means towards said support.
Claim 5
Dependent Claim
73 words
A testing apparatus as claimed in claim 1 wherein said connecting means comprises: a support on which said contacts are mounted; and deflecting means for deflecting said contacts from a first position in which said contacts are not electrically connected to said electrode patterns of the pallet at the testing position and a second position in which said contacts are electrically connected to said electrode patterns of the pallet at the testing position.
Claim 6
Dependent Claim
80 words
A testing apparatus as claimed in claim 4 wherein: said support comprises a first plate; and said deflecting means comprises a second plate which is generally parallel to said first plate, a through hole formed in said second plate through which said contacts extend, means for moving said second plate parallel to said first plate, and means for exerting a force on said contacts to cause said contacts to deflect towards said electrode patterns when said second plate is moved.
Claim 7
Dependent Claim
30 words
A testing apparatus as claimed in claim 4 wherein said contacts are made of an elastically bendable material and are elastically biased towards one of said first and second positions.
Claim 8
Dependent Claim
23 words
A testing apparatus as claimed in claim 1 wherein said pallet moving means comprises a turntable and means for incrementally rotating said turntable.
Claim 9
Dependent Claim
30 words
A testing apparatus as claimed in claim 7 wherein said turntable includes a plurality of through holes and each of said pallets is mounted in one of the through holes.
Claim 10
Dependent Claim
23 words
A testing apparatus as claimed in claim 1 further comprising a cover including an opening in a position corresponding to the exchanging position.
Claim 11
Dependent Claim
28 words
A testing apparatus as claimed in claim 9 wherein said exchanging means comprises means for accessing the pallet at the exchanging position through the opening in said cover.
Claim 12
Dependent Claim
21 words
A testing apparatus as claimed in claim 1 wherein said heating means comprises means for supplying hot air within said cover.
Claim 13
Dependent Claim
56 words
A testing apparatus as claimed in claim 1 wherein each of said pallets has a first surface having a plurality of sockets for holding semiconductor devices and a second surface on which said electrode patterns are formed, each semiconductor device being electrically connected to one of said electrode patterns when mounted in one of said sockets.
Claim 14
Dependent Claim
30 words
A testing apparatus as claimed in claim 12 wherein the second surface of each pallet comprises a printed circuit board, said electrode patterns being formed on said printed circuit board.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-02-26 | 1993-08-28 | 1994-02-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-02-26 | 1997-08-28 | 1998-02-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-02-26 | 2001-08-28 | 2002-02-27 | $7700.00 | Window Closed / Lapsed |