Piezoelectric valve

Claim 2

A piezoelectric valve for controlling fluid flow through a valve port, comprising: (A) a fluid-tight valve body defining a pair of valve ports; (B) a diaphragm disposed within said valve body and including a plurality of piezoelectric members, said members being selectively piezoelectrically deflectable in opposite directions in a plane of operation thereof in response to voltages applied thereto to produce a cumulative excursion to selectively assume one of two functionally opposite positions relative to one of said valve ports, said members in one of said positions operatively blocking said one valve port and in the other of said positions unblocking said one valve port, at least one of said members being disposed intermediate said pair of valve ports; and (C) electrical means operatively connected to said members for piezoelectrically deflecting the same to one of said positions.

Claim 3

The piezoelectric valve of claim 1 wherein said members are adapted to be selectively piezoelectrically deflected between a first orientation wherein said members are bowed apart and a second orientation wherein said members are generally parallel, said members assuming said first orientation when said electrical means are energized to piezoelectrically deflect said members and said second orientation when said electrical means are de-energized so said members are not piezoelectrically deflected.

Claim 4

The piezoelectric valve of claim 1 for controlling a fluid flow through said valve port and a second valve port, wherein said valve body further defines a second valve port aligned with said valve port, said valve port is an inlet port and said second valve port is an exhaust port, said valve port and second valve port are said pair of valve ports, and at least one of said members is disposed intermediate said valve port and second valve port.

Claim 5

The piezoelectric valve of claim 3 wherein piezoelectric deflection of said members to selectively block or unblock said valve port also selectively unblocks or blocks said second valve port.

Claim 6

The piezoelectric valve of claim 1 for providing 3-way valve action for controlling a fluid flow among said valve port and second and third valve ports, wherein said valve body further defines second and third valve ports.

Claim 7

The piezoelectric valve of claim 1 wherein said valve body limits the excursion of one of said members.

Claim 8

The piezoelectric valve of claim 6 wherein said valve body blocks the excursion of one of said members in a given direction and thereby substantially doubles the effective excursion of the other of said members in the opposite direction.

Claim 9

The piezoelectric valve of claim 7 wherein said valve body blocks the excursion of said one member in a given direction and thereby substantially more than doubles the effective usable excursion of said other member in the opposite direction.

Claim 10

The piezoelectric valve of claim 7 additionally comprising means for biasing said members in the given direction.

Claim 11

The piezoelectric valve of claim 1 wherein said electrical means are functionally electrically connected to a common electrical circuit for simultaneous piezoelectric deflection of said plurality of members.

Claim 12

The piezoelectric valve of claim 1 wherein said members are substantially planar when not piezoelectrically deflected and substantially curved when piezoelectrically deflected.

Claim 13

The piezoelectric valve of claim 1 wherein said valve ports are in spaced and generally opposite disposition to each other.

Claim 14

A piezoelectric valve for controlling fluid flow through a valve port and a second valve port, comprising: (A) a fluid-tight valve body defining a valve port and a second valve port aligned with said valve port, said valve port being an inlet port and said second valve port being an exhaust port; (B) a diaphragm disposed within said valve body and including at least a pair of piezoelectric members, said members being selectively piezoelectrically deflectable in opposite directions in a plane of operation thereof in response to voltages applied thereto to produce a cumulative excursion to selectively assume one of two functionally opposite positions relative to said valve port and said second valve port, said members in one of said positions operatively blocking said valve port and operatively unblocking said second valve port and in the other of said positions operatively unblocking said valve port and operatively blocking said second valve port, said valve port extending through one of said pair of said members, and the other of said pair of said members having a first face for selectively blocking or unblocking said valve port and an opposed second face for selectively blocking or unblocking said second valve port; and (C) electrical means operatively connected to said members for piezoelectrically deflecting the same to one of said positions.

Claim 15

A piezoelectric valve for controlling fluid flow through a valve port and a second valve port, comprising: (A) a fluid-tight valve body defining a valve port and a second valve port aligned with said valve port, said valve port being an inlet port and said second valve port being an exhaust port; (B) a diaphragm disposed within said valve body and including at least a pair of piezoelectric members, said members being selectively piezoelectrically deflectable in opposite directions in a plane of operation thereof in response to voltages applied thereto to produce a cumulative excursion to selectively assume one of two functionally opposite positions relative to said valve port and said second valve port, said members in one of said positions operatively blocking said valve port and operatively unblocking said second valve port and in the other of said positions operatively unblocking said valve port and operatively blocking said second valve port, said valve port extending through one of said pair of said members, and the other of said pair of said members having a first face for selectively blocking or unblocking said valve port and an opposed second face for selectively blocking or unblocking said second valve port; and (C) electrical means operatively connected to said members for piezoelectrically deflecting the same to one of said positions.

Claim 16

The piezoelectric valve of claim 13 wherein said one member has a central annular portion fixed to said valve body about said valve port to thereby substantially double the effective excursion of said other member.

Claim 17

The piezoelectric valve of claim 14 additionally including an annular element having opposed faces, one face being secured to said central annular portion of said one member and the opposite face being secured to said valve body about said valve port.

Claim 18

The piezoelectric valve of claim 14 additionally comprising means for biasing said members towards said valve port.

Claim 19

The piezoelectric valve of claim 14 providing 3-way valve action for controlling a fluid flow among said valve port, said second valve port and a third valve port, wherein said valve body additionally defines said third valve port, said third valve port being an inlet/outlet port, said third valve port being in fluid communication with an unblocked one of said valve port and said second valve port.

Claim 20

The piezoelectric valve of claim 17 wherein said diaphragm additionally includes flow channel means disposed intermediate said members to space the members apart and enable the flow of fluid intermediate said members between the center thereof and the periphery thereof.

Claim 21

The piezoelectric valve of claim 18 wherein said valve port extends through said central annular portion of said one member, and an unblocked valve port communicates with the end of said flow channel means adjacent the center of said members, an unblocked second valve port communicates with said third valve port directly, and said third valve port communicates with the end of said flow channel means adjacent the periphery of said members, thereby providing fluid communication between said third valve port and alternately an unblocked one of said valve port and said second valve port.

Claim 22

The piezoelectric valve of claim 18 wherein said flow channel means is annular in configuration.

Claim 23

The piezoelectric valve of claim 20 wherein said flow channel means is a convoluted washer.

Claim 24

A piezoelectric valve for controlling fluid flow through a valve port, comprising: (A) a fluid-tight valve body defining a pair of spaced and generally opposed valve ports; (B) a diaphragm including at least a pair of piezoelectric members and a flow channel means disposed between and spacing said members apart, said members being selectively piezoelectrically deflectable in opposite directions in a plane of operation thereof in response to voltages applied thereto to produce a cumulative excursion to selectively assume one of two functionally opposite positions relative to one of said valve ports, said members in one of said positions operatively blocking said one valve port and in the other of said positions operatively unblocking said one valve port, said valve body precluding the excursion of one of said members in a given direction and thereby substantially doubling the effective excursion of the other of said members in the opposite direction, at least one of said members being physically disposed intermediate said pair of valve ports; and (C) electrical means operatively connected to said members for piezoelectrically deflecting the same to one of said positions, said electrical means being functionally electrically connected to a common electrical circuit for simultaneous piezoelectric deflection of both of said members, said members being substantially planar when not piezoelectrically deflected and substantially curved when piezoelectircally deflected.

Claim 25

A piezoelectric valve for controlling fluid flow through a valve port, comprising: (A) a fluid-tight valve body defining a pair of spaced and generally opposed valve ports; (B) a diaphragm including at least a pair of piezoelectric members and a flow channel means disposed between and spacing said members apart, said members being selectively piezoelectrically deflectable in opposite directions in a plane of operation thereof in response to voltages applied thereto to produce a cumulative excursion to selectively assume one of two functionally opposite positions relative to one of said valve ports, said members in one of said positions operatively blocking said one valve port and in the other of said positions operatively unblocking said one valve port, said valve body precluding the excursion of one of said members in a given direction and thereby substantially doubling the effective excursion of the other of said members in the opposite direction, at least one of said members being physically disposed intermediate said pair of valve ports; and (C) electrical means operatively connected to said members for piezoelectrically deflecting the same to one of said positions, said electrical means being functionally electrically connected to a common electrical circuit for simultaneous piezoelectric deflection of both of said members, said members being substantially planar when not piezoelectrically deflected and substantially curved when piezoelectircally deflected.

Claim 26

A piezoelectric valve for providing three-way valve action for controlling a fluid flow among first, second and third valve ports, comprising: (A) a fluid-tight valve body defining first, second and third valve ports; (B) a diaphragm disposed within said valve body and including at least a pair of piezoelectric members, said members being selectively piezoelectrically deflectable in opposite directions in a plane of operation thereof in response to voltages applied thereto to produce a cumulative excursion to selectively assume one of two functionally opposite positions relative to first said valve port and said second valve port, said members in one of said positions operatively blocking said first valve port and operatively unblocking said second valve port and in the other of said positions operatively unblocking said first vale port and operatively blocking said second valve port, said first valve port being an inlet port extending through a central portion of said one member, said second valve port being an exhaust port aligned with said first valve port, and said third valve port being an inlet/outlet port in fluid communication with the periphery of said members and with one of said first and second valve ports when the same is unblocked, said other member having a first face for selectively blocking or unblocking said first valve port and an opposed second face for selectively unblocking or blocking said second valve port; (C) electrical means operatively connected to said members for piezoelectrically deflecting the same, said electrical means being functionally electrically connected to a common electrical circuit for simultaneous piezoelectric deflection of both of said members, said members being substantially planar when not piezoelectrically deflected and substantially curved when piezoelectrically deflected; (D) means for biasing said members towards said first valve port (E) means for securing a central annular portion of said one member to said valve body about said first valve port to preclude excursion of said one member in a given direction and thereby to substantially double the effective excursion of said other member in the opposite direction; and (F) flow channel means disposed between and spacing said members apart comprising a convoluted washer disposed in said diaphragm intermediate said members to enable the flow of fluid intermediate said members between the center thereof and the periphery thereof; said valve thereby providing fluid communication between said third valve port and an unblocked one of said first valve port and said second valve port.

Claim 27

A piezoelectric valve for providing three-way valve action for controlling a fluid flow among first, second and third valve ports, comprising: (A) a fluid-tight valve body defining first, second and third valve ports; (B) a diaphragm disposed within said valve body and including at least a pair of piezoelectric members, said members being selectively piezoelectrically deflectable in opposite directions in a plane of operation thereof in response to voltages applied thereto to produce a cumulative excursion to selectively assume one of two functionally opposite positions relative to first said valve port and said second valve port, said members in one of said positions operatively blocking said first valve port and operatively unblocking said second valve port and in the other of said positions operatively unblocking said first vale port and operatively blocking said second valve port, said first valve port being an inlet port extending through a central portion of said one member, said second valve port being an exhaust port aligned with said first valve port, and said third valve port being an inlet/outlet port in fluid communication with the periphery of said members and with one of said first and second valve ports when the same is unblocked, said other member having a first face for selectively blocking or unblocking said first valve port and an opposed second face for selectively unblocking or blocking said second valve port; (C) electrical means operatively connected to said members for piezoelectrically deflecting the same, said electrical means being functionally electrically connected to a common electrical circuit for simultaneous piezoelectric deflection of both of said members, said members being substantially planar when not piezoelectrically deflected and substantially curved when piezoelectrically deflected; (D) means for biasing said members towards said first valve port (E) means for securing a central annular portion of said one member to said valve body about said first valve port to preclude excursion of said one member in a given direction and thereby to substantially double the effective excursion of said other member in the opposite direction; and (F) flow channel means disposed between and spacing said members apart comprising a convoluted washer disposed in said diaphragm intermediate said members to enable the flow of fluid intermediate said members between the center thereof and the periphery thereof; said valve thereby providing fluid communication between said third valve port and an unblocked one of said first valve port and said second valve port.